• Title/Summary/Keyword: substrate effects

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Integration of Ba0.5Sr0.5TiO3Epitaxial Thin Films on Si Substrates and their Dielectric Properties (Si기판 위에 Ba0.5Sr0.5TiO3 산화물 에피 박막의 집적화 및 박막의 유전 특성에 관한 연구)

  • Kim, Eun-Mi;Moon, Jong-Ha;Lee, Won-Jae;Kim, Jin-Hyeok
    • Journal of the Korean Ceramic Society
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    • v.43 no.6 s.289
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    • pp.362-368
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    • 2006
  • Epitaxial $Ba_{0.5}Sr_{0.5}TiO_3$ (BSTO) thin films have been grown on TiN buffered Si (001) substrates by Pulsed Laser Deposition (PLD) method and the effects of substrate temperature and oxygen partial pressure during the deposition on their dielectric properties and crystallinity were investigated. The crystal orientation, epitaxy nature, and microstructure of oxide thin films were investigated using X-Ray Diffraction (XRD) and Transmission Electron Microscopy (TEM). Thin films were prepared with laser fluence of $4.2\;J/cm^2\;and\;3\;J/cm^2$, repetition rate of 8 Hz and 10 Hz, substrate temperatures of $700^{\circ}C$ and ranging from $350^{\circ}C\;to\;700^{\circ}C$ for TiN and oxide respectively. BSTO thin-films were grown on TiN-buffered Si substrates at various oxygen partial pressure ranging from $1{\times}10^{-4}$ torr to $1{\times}10^{-5}$ torr. The TiN buffer layer and BSTO thin films were grown with cube-on-cube epitaxial orientation relationship of $[110](001)_{BSTO}{\parallel}[110](001)_{TiN}{\parallel}[110](001)_{Si}$. The crystallinity of BSTO thin films was improved with increasing substrate temperature. C-axis lattice parameters of BSTO thin films, calculated from XRD ${\theta}-2{\theta}$ scans, decreased from 0.408 m to 0.404 nm and the dielectric constants of BSTO epitaxial thin films increased from 440 to 938 with increasing processing oxygen partial pressure.

Effects of Detention Time and Disc Speed on the Treatment Efficiencies of RBC (체류시간(滯留時間)과 원판회전속도(圓板回轉速度)가 회전원판생물막법(回轉圓板生物膜法)의 처리효율(處理効率)에 미치는 영향(影響))

  • Kim, Sang Yong
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.4 no.3
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    • pp.1-9
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    • 1984
  • A mult-stage rotating biological contactor process was evaluated by using the mixtures of nightsoil and sewage as influent substrate. An emphasis was concentrated on the BOD removal efficiency at each stage of the process with respect to hydraulic detention times, rotating speeds of the disc and influent organic substrate concentrations. The results indicated that the process was found to be economically feasible when operated at hyduraulic detention time of 2 hours and disc rotating speed of 3 RPH. As to treatment efficiency, BOD removal efficiency of 40 to 50 percent could be obtained at the first stage regardless of influent organic substrate concentrations. The overall BOD removal efficiency of the process was found to be 88 to 90 percent at even high organic loading of $2.0kgBOD/m^3{\cdot}day$.

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Effects of Dopants Introduced into the Poly-Si on the Formation of Ti-Silicides (Poly-Si에 첨가한 도펀트가 Titanium Silicides 형성에 미치는 영향 Ⅱ)

  • Ryu, Yeon-Soo;Choi, Jin-Seog;Paek, Su-Hyon
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.2
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    • pp.73-80
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    • 1990
  • The formation of Ti-silicides with the type of substrate, the species and the concentration of dopant, and the annealing temperature was investigated with sheet resistance and thickness measurement, elemental depth profilling, and microstructure. It was directly affected by the type of substrate, the species and the concentration of dopant, and the annealing temperature. For the amorphous Si substrate, the smothness of $TiSi_2/Si$ interface was increased. Above concentr-ation of $1{\times}10^{16}ions/cm^2$, the rate of $TiSi_2/Si$ formation was decreased and the sheet resistance was increased. The initial profile of dopant according to the implantation energy was one of the factors influencing the out-diffusion of dopant. In $POCI_3$ process, this was less than in ion implantation process.

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Thermal Stability and the Effect of Substrate Temperature on the Structural and Magnetic Properties of Pd/Co Multilayer Films (Pd/Co 다층박막의 구조 및 자기적 특성에 미치는 기판온도 및 열적안정성에 관한 연구)

  • 허용철;김상록;이성래;김창수
    • Journal of the Korean Magnetics Society
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    • v.3 no.4
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    • pp.298-304
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    • 1993
  • The effects of the substrate temperature and the Pd underlayer on the structure and the magnetic properties of Pd/Co multilayer films prepared by the thermal evaporation were studied. As the substrate temperature increases up to $150^{\circ}C$, the crystallinity of sublayers, (111) texture and the interface sharpness of Pd/Co multilayers were improved due to the enhanced mobility of adatoms. As results of that, the perpendicular and surface anisotropy energies were increased but the coercivity was decreased because the pinning sites of domain wall decreased due to the grain growth. The grain size of the multilayers increased with Pd underlyer thickness. Thermal degradation was enhanced at above $200^{\circ}C$ due to interdiffusion at the Pd/Co interface. The intensity of the main diffraction peak rapidly decayed in the initial stage of aging and then decreased slowly. The rapid change of the intensity in the initial stage was speculated to be due to the structural relaxation phenomena and the later stage change was due to the interdiffusion. The activation energy for the interdiffusion in Pd4/Co1 multilayers was 14.9 KCal/mole.K.

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Effects of DC Substrate Bias Power Sources and Reactant Gas Ratio on Synthesis and Tribological Properties of Ternary B-C-N Coatings (기판 바이어스 DC 전원의 종류와 반응가스 분압비가 3성분계 B-C-N 코팅막의 합성과 마찰 특성에 미치는 영향)

  • Jeong, Da-Woon;Kim, Doo-In;Kim, Kwang-Ho
    • Journal of Surface Science and Engineering
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    • v.44 no.2
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    • pp.60-67
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    • 2011
  • Ternary B-C-N coatings were deposited on Si(100) wafer substrate from $B_4C$ target by RF magnetron sputtering technique in $Ar+N_2+CH_4$ gas mixture. In this work, the effect of reactant gas ratio, $CH_4/(N_2+CH_4)$ on the composition, kinds and amounts of bonding states comprising B-C-N coatings were investigated using two different bias power sources of continuous and unipolar DCs. In addition, the tribological properties of coatings were studied with the composition and bonding state of coating. It was found that the substrate bias power had an effect on chemical composition, and all of the obtained coatings were nearly amorphous. Main bonding states of coatings were revealed from FTIR analyses to be h-BN, C-C, C-N, and B-C. The amount of C-C bonging mainly increased with increase of the reactant gas ratio. From our studies, both C-C and h-BN bonding states improved the tribological properties but B-C one was found to be harmful on those. The best coating from tribological points of view was found to be $BC_{1.9}N_{2.3}$ composition.

Effects of Ni layer as a diffusion barrier on the aluminum-induced crystallization of the amorphous silicon on the aluminum substrate (알루미늄 기판 상의 Ni layer가 a-Si의 AIC(Aluminum Induced Crystallization)에 미치는 영향)

  • Yun, Won-Tae;Kim, Young-Kwan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.2
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    • pp.65-72
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    • 2012
  • Aluminum induced crystallization of amorphous silicon was attempted by the aluminum substrate. To avoid the layer exchange between silicon and aluminum layer, Ni layer was deposited between these two layers by sputtering. To obtain the bigger grain of the crystalline silicon, wet blasted silica layer was employed as windows between the nickel and a-Si layer. Ni obtained after the annealing treatment at $520^{\circ}C$ was found to be a promising material for the diffusion barrier between silicon and aluminum. One way to obtain bigger grain of crystalline silicon layer applicable to solar cell of higher performance was envisioned in this investigation.

SPICE Model of the Spiral Inductor on Silicon Substrate (실리콘 기판 위의 나선형 인덕터에 대한 SPICE 모델)

  • Kim, Yeong-Seuk;Park, Jong-Wook;Kim, Nam-Soo;Yu, Hyun-Kyu
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.10
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    • pp.11-16
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    • 2000
  • The SPICE model of the spiral inductor on silicon substrate which can be easily used for the RF IC design has been developed. In this proposed model the equivalent circuit element of the spiral inductor are defined by the layout and process parameters using the user-defined function and subcircuit of the SPICE. The total inductance is calculated using the subcircuit Li for the arbitrary turn i and the subcircuit Mij for two arbitrary turns. The model was verified by comparing the simulated data with the measured s-parameters, total inductance, and quality factor of the spiral inductor fabricated by the CMOS 0.8${\mu}m$ process. The proposed SPICE model of the spiral inductor is scalable and includes the effects of the silicon substrate.

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Thermic Effect of Food, Macronutrient Oxidation Rate and Satiety of High-fat Meals with Butter and Sesame Oil on Healthy Adults (버터와 참기름을 함유한 지방 식사의 식이성 발열효과, 영양소 산화율 및 포만도)

  • Lee, Myung-Ju;Tsani, A.Fahmy Arif;Kim, Eun-Kyung
    • Korean Journal of Community Nutrition
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    • v.17 no.2
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    • pp.215-225
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    • 2012
  • The purpose of this study was to measure and investigate the acute effects of two fatty meals (high-SFA & high-PUFA) on post-prandial thermic effect, substrate oxidation, and satiety. Eight healthy adults (four males and four females) aged 19-22 years were assigned to consume two isocaloric meals: high in saturated fatty acids from butter and high in polyunsaturated fatty acids from sesame oil. Indirect calorimetry was used to measure resting energy expenditure (REE), post-prandial energy expenditure for five hours, and substrate oxidation. Satiety of the subjects after meals was estimated by using visual analogue scales (VAS). Five hours thermic effect of food (TEF) was not significantly different between butter meal (6.5% of energy intake) and sesame oil meal (7.3% of energy intake), but, the TEF of butter meal reached the peak point at 150 min and decreased more rapidly arriving to REE in 270 min. On the other hand, TEF of sesame oil meal reached the peak at 90 min and decreased slower than butter meal (still higher than REE at 300 min). No significant differences in substrate oxidation rates were found between the two meals. Post-prandial fat oxidation rates increased significantly after the consumption of both butter and sesame oil meal than that of the pre-prandial state. Satiety values (hunger, fullness, and appetite) were similar among the meals, but recovery of hunger and fullness to the pre-prandial state was faster in butter meal than that of the sesame oil meal.

Textile Adhesion Properties of Polyurethane Hot Melt Adhesives Containing Ester Groups (에스터기를 함유한 폴리우레탄 핫멜트 접착제의 직물에 대한 접착물성)

  • RANJi, Sepideh;LEE, Myung Cheon
    • Journal of Adhesion and Interface
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    • v.19 no.3
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    • pp.118-122
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    • 2018
  • In this study, polyurethane hot melt adhesive containing ester groups was synthesized. Three kinds of chain extenders were used to find out the best chain extender. Results showed that adhesive containing 1,4-butanediol as a chain extender exhibited the highest peel strength among them. Also, it was found that there existed the optimum molecular weight of 1,4-butanediol containing adhesive for make the highest peel strength.. Moreover, hot melt adhesive containing 1,4-butanediol chain extender was applied to various kinds of textiles substrate such as cotton, polyester, and urethane coated polyester textiles to study the effects of different substrates on the peel strength and water resistance at $60^{\circ}C$. It was found that cotton substrate showed the highest peel strength and urethane coated polyester substrate showed the highest resistance on $60^{\circ}C$ water.

Field-emission characteristics of carbon nanotube emitters in terms of tip angles of conical-type metal substrates (원추형 금속 기판의 팁 각도에 따른 탄소 나노튜브 이미터의 전계방출 특성)

  • Kim, Jong-Pil;Noh, Young-Rok;Chang, Han-Beet;Park, Jin-Seok
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.2
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    • pp.115-119
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    • 2011
  • A tip-type carbon nanotube(CNT)-based field emitter was studied to consider it as electron source for micro-focused x-ray tube. The CNT was grown directly on a metal (tungsten) substrate by using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) method. Prior to CNT growth, the metal substrate was etched to have various tip angles from $10^{\circ}$ to $180^{\circ}C$ (flat-type). The morphologies and microstructures of all the grown CNTs were analyzed via field-emission SEM. Furthermore, the effects of substrate tip-angles on the emission properties of CNT-based field emitters were characterized to estimate the maximum current density, the turn-on voltage, and the spatial distribution of electron beams. Prolonged long-term stability testing of the CNT emitters was also performed. All the experiment results obtained from this study indicated why a tip-type CNT emitter, compared with a flat-type CNT emitter, would be more desirable for a micro-focused x-ray system, in terms of the emission current level, the focused beam area, and the emission stability.