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Field-emission characteristics of carbon nanotube emitters in terms of tip angles of conical-type metal substrates  

Kim, Jong-Pil (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
Noh, Young-Rok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
Chang, Han-Beet (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
Publication Information
Journal of the Semiconductor & Display Technology / v.10, no.2, 2011 , pp. 115-119 More about this Journal
Abstract
A tip-type carbon nanotube(CNT)-based field emitter was studied to consider it as electron source for micro-focused x-ray tube. The CNT was grown directly on a metal (tungsten) substrate by using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) method. Prior to CNT growth, the metal substrate was etched to have various tip angles from $10^{\circ}$ to $180^{\circ}C$ (flat-type). The morphologies and microstructures of all the grown CNTs were analyzed via field-emission SEM. Furthermore, the effects of substrate tip-angles on the emission properties of CNT-based field emitters were characterized to estimate the maximum current density, the turn-on voltage, and the spatial distribution of electron beams. Prolonged long-term stability testing of the CNT emitters was also performed. All the experiment results obtained from this study indicated why a tip-type CNT emitter, compared with a flat-type CNT emitter, would be more desirable for a micro-focused x-ray system, in terms of the emission current level, the focused beam area, and the emission stability.
Keywords
Carbon nanotubes; Tip-angle; Field emission properties; Electron-beam focusing; Long-term stability;
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