• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• 한국정밀공학회지
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• 제16권12호
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• pp.174-181
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• 1999

This paper describes the effect of the stylus tip size on the shape error in surface topography measurement. To analyze the distortional effect of an actual surface geometry origination from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. The magnitude of this distortion is defined as the ration of standard deviation, and this is expressed as an analytic function of the stylus tip radius and the geometrical parameter of a sinusoid. In this paper, the spectrum analysis of the profile is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is proposed to assess the shape error of measured data according to the various stylus tip sizes. From these results, a new method to select proper stylus tip radius is proposed.

• 한국생산제조학회지
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• 제8권1호
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• pp.126-134
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• 1999

In this paper, a new error compensating technique for form-error compensation of rough-surface profile obtained by contact stylus profilometer is proposed. By the method, the real contact points of rough-surface and diamond stylus can be estimated and the measured profile data corrected. To verify the compensation effect, the properties(Ra, RMS, Kurtosis, Skewness) of measured profile data and compensated data were compared. And, the cumulative RMS slope was proposed to assess the compensated effect of upper area of profile. The results show that the measuring error could be compensated very well in amplitude parameters and in proposed cumulative RMS slope by the developed form-error compensating technique.

• 한국생산제조학회지
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• 제5권4호
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• pp.108-120
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• 1996

A new technique and theory are proposed which correct orientation of a cylinder to perform a reliable measurement of the surface profile. We analyze characteristics of machined surfaces, e.g., ground, lapped and turned surfaces. Based upon the results. the optimum correction technique is derived by the statistical method. To verify the techinques, measurements are carried out by using the contact stylus profilometer on a controllable table. The measurement shows that surface information of cylinders can be acquired with high accuracy.

• Journal of the Optical Society of Korea
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• 제5권2호
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• pp.60-66
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• 2001

The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only $\pm$60 nm of P-V error for the 157 mm diameter spherical mirror.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2006년도 제31회 학술논문발표회 초록집
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• pp.99-99
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• 2006

• 한국광학회:학술대회논문집
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• 한국광학회 2007년도 하계학술발표회 논문집
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• pp.201-202
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• 2007

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 제12회 정기총회 및 01년도 동계학술발표회
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• pp.94-95
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• 2001

본 논문에서는 큰 광학면을 Profilometry로 측정하는데 있어서 꼭 필요한 기준계로 공기 중을 전파해가는 레이저 광선을 이용하는 방법을 논의하였다 Profilometer는 stylus tip이 직접 표면에 접촉하여 높이를 읽어가는 방식으로 이때 기준계는 정확한 높이를 구하는데 아주 중요한 역할을 한다 즉, 높이의 측정은 기준계를 기준 하여 이루어지기 때문에 기준계에서의 오차는 곧바로 높이의 오차로 이어지게 된다. (중략)

• 한국정밀공학회지
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• 제17권2호
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• pp.211-219
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• 2000

This paper simulated surface grinding process with statistically simulated grinding wheel topography, considering ridge formation phenomenon when grain scratch workpiece. Wheel grain is modeled as hybrid sphere and cone. Grinding wheel characteristic was evaluated with stylus by expanding the scanning region of the profilometer from a straight line to a plane. Each grain's diameter and semi-angle are assumed as normal distribution, each grain's protrusion height from wheel plane is assumed gamma distribution. So grinding wheel is simulated with grain's position randomly distributed without overlapping. Ground surface is 3-dimensionally simulated considering ridge formation of workpiece by each grain's cutting, and then surface profile and surface roughness parameters are compared with real ground workpiece.

• 한국진공학회지
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• 제7권4호
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• pp.403-409
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• 1998

본 연구에서는 자장강화된 유도결합형 플라즈마를 사용하여 이 플라즈마의 특성을 조사하고 또한 산화막 식각에 미치는 영향에 대하여 조사하였다. 자장 강화를 위해 4쌍의 영구자석이 사용되었고, 산화막 식각을 위해 $C_2F_6, CHF_3, C_4F_8$ 가스 및 이들 혼합가스가 사 용되었으며 첨가가스로 $H_2$를 사용하였다. 자장강화된 유도결합형 플라즈마 특성 분석을 위 해 Langmuir probe와 optical emission spectrometer를 이용하여 산화막 식각 속도 및 photoresist에 대한 식각 선택비를 stylus profilometer를 이용하여 측정하였다. 이온 밀도에 있어서 자장 유무에 따른 큰 변화는 관찰되지 않았으나 이온전류밀도의 균일도는 자장을 가 한 경우 웨이퍼가 놓이는 기판 부분에서 상당히 증가된 것을 알 수 있었다. 또한 자장이 가 해진 경우, 자장을 가하지 않은 경우에 비해 플라즈마 전위가 감소된 반면 전자온도 및 라 디칼 밀도는 크게 증가되는 것을 알 수 있었으며 산화막 식각시에도 높은 식각 속도와 식각 균일도를 보였다. 산화막 식각을 위해 수소가스를 사용한 가스조합중에서 C4F8/H2가스조합 이 가장 우수한 식각 속도 및 photoresist에 대한 식각 선택비를 나타내었으며 공정변수를 최적화 함으로써 순수 C4F8에서 4이상의 선택비와 함께 8000$\AA$/min의 가장 높은 식각속도 를 얻을 수 있었으며, 50%C4F8/50%H2에서 4000$\AA$/min의 산화막 식각 속도와 함께 15이상 의 식각 선택비를 얻을 수 있었다.