• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.267-267
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• 2012

최근 국내 반도체 장비 업체들에 의해서 차세대 반도체용 450 mm 웨이퍼 공정용 장비 개발이 진행 중에 있다. 반도체 산업은 계속해서 반도체 칩의 크기를 작게 하고, 웨이퍼 크기를 늘리면서 웨이퍼 당 칩수를 증가시켜 생산성을 향상해오고 있다. 현재 300 mm 웨이퍼에서 450 mm 웨이퍼를 도입하게 되면, 생산성 뿐만 아니라 30%의 비용절감과 50%의 cycle-time 단축이 기대되고 있다. 장비에 대한 이해와 공정에 대한 해석 능력을 위해 비용과 시간이 많이 들기 때문에 최근 컴퓨터를 활용한 수치 모델링이 진행되고 있다. 또한, 수치 모델링은 실험 결과와의 비교가 필수적이다. 본 연구에서는 450 mm 웨이퍼 공정용 장비의 전자밀도를 cut off probe를 통해 100 mTorr에 서 Ar 플라즈마를 파워에 따라 측정했다. 13.56 MHz 200 W, 500 W, 1,000 W로 입력 파워가 증가하면서 웨이퍼 중심에서 $6.0{\times}10^9#/cm^3$, $1.35{\times}10^{10}#/cm^3$, $2.4{\times}10^{10}#/cm^3$로 증가했다. 450 mm 웨이퍼 영역에서 전자 밀도의 불균일도는 각각 10.31%, 3.24%, 4.81% 였다. 또한, 이 450 mm 웨이퍼용 CCP 장비를 축대칭 2차원으로 형상화하고, 전극에 13.56 MHz를 직렬로 연결된 blocking capacitor ($1{\times}10^{-6}$ F/$m^2$)를 통해 인가할 수 있도록 상용 유체 모델 소프트웨어(CFD-ACE+, EXI corp)를 이용하여 계산하였다. 주요 전자-중성 충돌 반응으로 momentum transfer, ionization, excitation, two-step ionization을 고려했고, $Ar^+$와 $Ar^*$의 표면 재결합 반응은 sticking coefficient를 1로 가정했다. CFD-ACE+의 CCP 모델을 통해 Poisson 방정식을 풀어서 sheath와 wave effect를 고려하였다. Stochastic heating을 고려하지 않았을 때, 플라즈마 흡수 파워가 80 W, 160 W, 240 W에서 실험 투입 전력 200 W, 500 W, 1,000 W일 때와 유사한 반경 방향의 플라즈마 밀도 분포를 보였다. 200 W, 500 W, 1,000 W일 때의 전자밀도 분포는 수치 모델링과 전 범위에서 각각 10%, 3%, 2%의 오차를 보였다. 450 mm의 전극에 13.56 MHz의 전력을 인가할 때, 파워가 증가할수록 전자밀도의 최대값의 위치가 웨이퍼 edge에서 중심으로 이동하고 있음을 실험과 모델링을 통해 확인할 수 있었다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제1권2호
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• pp.125-131
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• 2001

When the program voltage is applied to a word line, a part of the boosted channel charge in inhibited bit lines is lost due to the coupling between the string select line (SSL) and the adjacent word line. This phenomenon causes the program disturbance in the cells connected to the inhibited bit lines. This program disturbance becomes more serious, as the word line pitch is decreased. To reduce the word line coupling, the rising edge of the word-line voltage waveform was changed from a pulse step into a ramp waveform with a controlled slope. The word-line ramping circuit was composed of a timer, a decoder, a 8 b D/A converter, a comparator, and a high voltage switch pump (HVSP). The ramping voltage was generated by using a stepping waveform. The rising time and the stepping number of the word-line voltage for programming were set to $\mutextrm{m}-$ and 8, respectively,. The ramping circuit was used in a 512Mb NAND flash memory fabricated with a $0.15-\mutextrm{m}$ CMOS technology, reducing the SSL coupling voltage from 1.4V into a value below 0.4V.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2009년 춘계학술대회논문집
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• pp.19-19
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• 2009

Dynamic Stall is a flow phenomenon which occurs on the retreating side of helicopter rotor blades during forward flight. It also occurs on blades of stall regulated wind turbines under yawing conditions as well as during gust loads. Time scales occurring during this process are comparable on both helicopter and wind turbine blades. Dynamic Stall limits the speed of the helicopter and its manoeuvrability and limits the amount of power production of wind turbines. Extensive numerical as well as experimental investigations have been carried out recently to get detailed insight into the very complex flow structures of the Dynamic Stall process. Numerical codes have to be based on the full equations, i.e. the Navier-Stokes equations to cover the scope of the problems involved: Time dependent flow, unsteady flow separation, vortex development and shedding, compressibility effects, turbulence, transition and 3D-effects, etc. have to be taken into account. In addition to the numerical treatment of the Dynamic Stall problem suitable wind tunnel experiments are inevitable. Comparisons of experimental data with calculated results show us the state of the art and validity of the CFD-codes and the necessity to further improve calculation procedures. In the present paper the phenomenon of Dynamic Stall will be discussed first. This discussion is followed by comparisons of some recently obtained experimental and numerical results for an oscillating helicopter airfoil under Dynamic Stall conditions. From the knowledge base of the Dynamic Stall Problems, the next step can be envisaged: to control Dynamic Stall. The present discussion will address two different Dynamic Stall control methodologies: the Nose-Droop concept and the application of Leading Edge Vortex Generators (LEVoG's) as examples of active and passive control devices. It will be shown that experimental results are available but CFD-data are only of limited comparison. A lot of future work has to be done in CFD-code development to fill this gap. Here mainly 3D-effects as well as improvements of both turbulence and transition modelling are of major concern.

• 대한기계학회논문집B
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• 제29권9호
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• pp.997-1005
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• 2005

The extinction characteristics of low strain rate normal gravity (1-g) nonpremixed methane-air flames were studied numerically and experimentally. A time-dependent axisymmetric two-dimensional (2D) model considering buoyancy effects and radiative heat transfer was developed to capture the structure and extinction limits of 1-g flames. One-dimensional (1D) computations were also conducted to provide information on 0-g flames. A 3-step global reaction mechanism was used in both the 1D and 2D computations to predict the measured extinction limit and flame temperature. A specific maximum heat release rate was introduced to quantify the local flame strength and to elucidate the extinction mechanism. Overall fractional contribution by each term in the energy equation to the heat release was evaluated to investigate the multi-dimensional structure and radiative extinction of 1-g flames. Images of flames were taken for comparison with the model calculation undergoing extinction. The two-dimensional numerical model was validated by comparing flame temperature profiles and extinction limits with experiments and ID computation results. The 2D computations yielded insight into the extinction mode and flame structure of 1-g flames. Two combustion regimes depending on the extinction mode were identified. Lateral heat loss effects and multi-dimensional flame structure were also found. At low strain rates of 1-g flame ('Regime A'), the flame is extinguished from the weak outer flame edge, which is attributed to multi-dimensional flame structure and flow field. At high strain rates, ('Regime B'), the flame extinction initiates near the flame centerline due to an increased diluent concentration in reaction zone, which is the same as the extinction mode of 1D flame. These two extinction modes could be clearly explained with the specific maximum heat release rate.

• 대한기계학회논문집B
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• 제36권11호
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• pp.1119-1126
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• 2012

세균의 집단 행동은 생물막의 형성에 중요한 역할을 하고 있다. 본 연구에서는 대장균(E. coli) 및 고초균(B. subtilis) 군집에서 형성된 유동성 생물막의 유체역학적 특성을 비교하고자 초기에 아가 플레이트 내에서 층을 이루다가 성장하는 군집 표면 위로 자발적으로 분포되는 200 nm의 형광입자를 가시화 하였다. 대장균 군집에서는 유동하지 않는 200 nm 크기의 형광입자를 이용하여 성장하는 세균 군집의 3차원 형상 프로파일을 측정하였다. 고초균 군집의 경계에서 나타나는 와류 패턴은 고초균이 분비하는 계면활성제 내에서 유동하는 형광입자를 추적하여 가시화하였다. 본 연구는 세균의 생리 기능을 조절하는 새로운 물리적인 요소를 밝혀내고 세균의 증식 및 군집 이동에 영향을 미치는 유동성 생물막의 효과를 파악하는 첫걸음이 될 것이다.

• 한국정보통신학회논문지
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• 제10권8호
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• pp.1495-1501
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• 2006

본 논문은 TFT 칼라 터치 LCD(liquid crystal display)를 사용한 홈 자동화 원격 제어 시스템 개발을 제안한다. 이 혁신적이고 인간공학적인 디자인, LCD와 하드웨어 버튼의 올바른 조합을 가지고 원격 제어하며 또한 이것의 산업 선도적 기술을 홈 엔터테인먼트의 최첨단 부분을 수요자에게 공급한다. 일시적 사용자를 위한 원격제어는 다양하고 자유로운 매크로와 적외선 명령어를 가지고 자동적으로 프로그래밍 되어졌다. 라디오 주파수 명령은 50-100인치 정도의 벽 및 문을 통하여 조작되어진다. 편집기는 수많은 브랜드의 AV 관련 제품들에 대한 IR 코드에 맞게 방대한 라이브러리를 포함한다. 이 데이터베이스는 매달 새 장치 포함하여 지속적으로 추가된다. 라이브 업 데이트를 지원함으로 최신 버젼의 소프트웨어를 유지할 수 있다. 소프트웨어 제거 및 설치하는 것을 대신하여 인터넷에서 소프트웨어를 다운로드 및 업 데이트를 할 수 있다.

• 한국컴퓨터정보학회논문지
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• 제21권10호
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• pp.11-19
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• 2016

The size of a display is large, The form becoming various of that do not apply to previous methods of gaze tracking and if setup gaze-track-camera above display, can solve the problem of size or height of display. However, This method can not use of infrared illumination information of reflected cornea using previous methods. In this paper, Robust pupil detecting method for eye's occlusion, corner point of inner eye and center of pupil, and using the face pose information proposes a method for calculating the simply position of the gaze. In the proposed method, capture the frame for gaze tracking that according to position of person transform camera mode of wide or narrow angle. If detect the face exist in field of view(FOV) in wide mode of camera, transform narrow mode of camera calculating position of face. The frame captured in narrow mode of camera include gaze direction information of person in long distance. The method for calculating the gaze direction consist of face pose estimation and gaze direction calculating step. Face pose estimation is estimated by mapping between feature point of detected face and 3D model. To calculate gaze direction the first, perform ellipse detect using splitting from iris edge information of pupil and if occlusion of pupil, estimate position of pupil with deformable template. Then using center of pupil and corner point of inner eye, face pose information calculate gaze position at display. In the experiment, proposed gaze tracking algorithm in this paper solve the constraints that form of a display, to calculate effectively gaze direction of person in the long distance using single camera, demonstrate in experiments by distance.

• 한국정밀공학회지
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• 제24권10호
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• pp.64-74
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• 2007

Because of the size and environment in the shipbuilding process, the portable type robot is required for the automatic seam tracking. For this reason, the structure of laser sensor should be considered in the initial design step and the coordinate transformation between welding robot and laser sensor, which is joint finder, must be identified exactly and the real time tracking algorithm based on these consideration could be developed. In this research, laser displacement sensor in which its structure is laser beam's vertical projection, is developed to recognize the location of weld joint. In practical applications, however, images of weld joints are often degraded because of the surface specularity or spatter. To overcome the problem, the constrained joint finding algorithm is proposed. In the approach of coordinate conversion rule for the visual feedback control among welding torch, robot body and laser sensor is applied by the same reference point method. In the real time seam tracking algorithms we propose constrained sampling method which uses look ahead distance. The RLS(Recursive Least Square) filter is applied to obtain the smooth tracking path from the sensitive edge data. From the experimental results, we could see the possibility that the developed laser sensor with proposed processing algorithm and real time seam tracking method can be used as a welding under the shipbuilding condition.

• Progress in Superconductivity
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• 제7권1호
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• pp.6-10
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• 2005

We have studied feasibility of single-layer second-order $high-T_c$ SQUID gradiometers in magnetocardiography. We have measured human cardiomagnetic signals using a short-baseline (5.8 mm) single-layer second-order YBCO gradiometer in partially shielded environments. The gradiometer has an overall size of $17.6\;mm{\times}6\;mm$ and contains three parallel-connected pickup coils which are directly coupled to a step-edge junction SQUID. The gradiometer showed an unshielded gradient noise of $0.84\;pT/cm^2/Hz^{1/2}$ at 1 Hz, which corresponds to an equivalent field noise of $280\;fT/Hz^{1/2}$. The balancing factor was $10^3$. Based on the same design rules as the short-baseline devices, we have studied fabrication of 30 mm-long baseline gradiometers. The devices had an overall size of $70.2\;mm{\times}10.6\;mm$ with each pickup coil of $10\;mm{\times}10\;mm$ in outer size. As Josephson elements we made two types of submicron bridges, which are variable thickness bridge (VTB) and constant thickness bridge (CTB), from $3\;{\mu}m-wide$ and 300 nm-thick YBCO lines with a thin layer of Au on top by using a focused ion beam (FIB) patterning method. VTB was 300 nm wide, 200 nm thick, 30 nm long with Au removed and CTB 100 nm wide and 30 nm long. In temperature-dependent critical currents, $I_c(T)$, VTB showed an nonmetallic barrier-type behavior and CTB an SNS behavior. We believe that those characteristics are ascribed to naturally formed grain boundaries crossing the bridges.

• 대한전자공학회논문지TC
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• 제46권12호
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• pp.102-107
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• 2009

기술의 발달로 의료장비의 현대화가 이루어지고 PACS와 같은 시스템이 보편화되면서 디지털 의료영상처리 기술에 대한 관심이 높아지고 있다. 영역분할 기술은 디지털의료영상처리에서 첫 번째 단계로 필요한 전처리기술이다. 영역분할을 통하여 특정 부위가 종양, 부종, 파손 및 괴사세포와 같은 이상 현상을 나타내는 것을 조기에 발견할 수 있도록 해주고, 의사들이 적절한 처방을 내려줄 수 있도록 도와줄 수 있다. 특히 두뇌영상에서 백질, 회백질 및 CSF(cerebral spinal fluid)의 영역분할은 두뇌연구의 핵심기술이다. 이들 의료영상에서 기존의 윤곽선이나 영역 확장법은 애매한 경계선과 장기내의 물리적 특성이 비균질하여 영역분할의 실패율을 높게 한다. 퍼지기반의 영역분할 알고리듬은 불분명한 경계를 이루는 장기의 영역분할에 강하다고 알려져 있다. 본 연구에서는 자기공명영상이 강하게 나타내는 잡음에도 안정적인 퍼지기반의 영역분할 알고리듬을 제안하였다. 제안된 알고리듬은 이웃화소들을 군집시킬 때에 평균과 분산의 정보를 이용하여 최소한의 계산을 추가함으로써, 기존의 퍼지기반 영역분할 방법에 비하여 실패율이 대략 30% 이하로 낮은 것을 확인하였다.