• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Smart Structures and Systems
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• 제7권5호
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• pp.365-378
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• 2011

Piezo-based active structural health monitoring (SHM) requires amplifiers specifically designed for capacitive loads. Moreover, with the increase in number of applications of wireless SHM systems, energy efficiency and cost reduction for this type of amplifiers is becoming a requirement. General lab grade amplifiers are big and costly, and not built for outdoor environments. Although some piezoceramic power amplifiers are available in the market, none of them are specifically targeting the wireless constraints and low power requirements. In this paper, a piezoceramic transducer amplifier for wireless active SHM systems has been designed. Power requirements are met by two digital On/Off switches that set the amplifier in a standby state when not in use. It provides a stable ${\pm}180$ Volts output with a bandwidth of 7k Hz using a single 12 V battery. Additionally, both voltage and current outputs are provided for feedback control, impedance check, or actuator damage verification. Vibration control tests of an aluminum beam were conducted in the University of Houston lab, while wireless active SHM tests of a wind turbine blade were performed in the Harbin Institute of Technology wind tunnel. The results showed that the developed amplifier provided equivalent results to commercial solutions in suppressing structural vibrations, and that it allows researchers to perform active wireless SHM on moving objects with no power wires from the grid.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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• pp.88.1-88.1
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• 2010

Organic dyes, because of their many advantages, such as high molar extinction coefficients, convenience of customized molecular design for desired photophysical and photochemical properties, inexpensiveness with no transition metals contained, and environment-friendliness, are suitable as photosensitizers for the Dye-sensitized Solar Cell (DSSC). The efficiency of DSSC based on metal-free organic dyes is known to be much lower than that of Ru dyes generally, but a high solar energy-to-electricity conversion efficiency of up to 8% in full sunlight has been achieved by Ito et al. using an indoline dye. This result suggests that smartly designed and synthesized metal-free organic dyes are also highly competitive candidates for photosensitizers of DSSCs with their advantages mentioned above. Recently, the performance of DSSC based on metal-free organic dyes has been remarkably improved by several groups. We had reported the novel organic dye with double electron acceptor chromophore, which was a new strategy to design an efficient photosensitizer for DSSC. To verify the strategy, we synthesized organic dyes whose geometries, electronic structures and optical properties were derived from preceding density functional theory (DFT) and time-dependent density functional theory (TD-DFT) calculations. In this paper, we successfully synthesized the chromophore containing multi-acceptor push-pull system from triphenylamine with thiophene moieties as a bridge unit. Organic dyes with a single electron acceptor and double acceptor system were also synthesized for comparison purposes. The photovoltaic performances of these dyes were compared, and the recombination dark current curves and the incident photon-to-current (IPCE) efficiencies were also measured in order to characterize the effects of the multi-anchoring groups on the open-circuit voltage and the short-circuit current. In order to match specifications required for practical applications to be implemented outdoors, light soaking and thermal stability tests of these DSSCs, performed under $100mWcm^{-2}$ and $60^{\circ}C$ for 1000h.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 춘계학술발표대회
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• pp.16.1-16.1
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• 2009

We have fabricated solution processed oxide semiconductor active layer for thin film transistors (TFTs). The oxide semiconductor layers were prepared by ink-jet printing the sol-gel precursor solution based on doped-ZnO. Inorganic ZnO-based thin films have drawn significant attention as an active channel layer for TFTs applications alternative to conventional Si-based materials and organic semiconducting materials, due to their wide energy band gap, optical transparency, high mobility, and better stability. However, in spite of such excellent device performances, the fabrication methods of ZnO related oxide active layer involve high cost vacuum processes such as sputtering and pulsed laser deposition. Herein we introduced the ink-jet printing technology to prepare the active layers of oxide semiconductor. Stable sol-gel precursor solutions were obtained by controlling the composition of precursor as well as solvents and stabilizers, and their influences on electrical performance of the transistors were demonstrated by measuring electrical parameters such as off-current, on-current, mobility, and threshold voltage. Microstructure and thermal behavior of the doped ZnO films were investigated by SEM, XRD, and TG/DTA. Furthermore, we studied the influence of the ink-jet printing conditions such as substrate temperature and surface treatment on the microstructure of the ink-jet printed active layers and electrical performance. The mobility value of the device with optimized condition was about 0.1-1.0 $cm^2/Vs$ and the on/off current ratio was about $10^6$. Our investigations demonstrate the feasibility of the ink-jet printed oxide TFTs toward successful application to cost-effective and mass-producible displays.

• 한국전기전자재료학회논문지
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• 제27권11호
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• pp.690-695
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• 2014

In this paper, we develop a explosion-proof LED lighting (Ex circuit) circuit of Explosion-proof LED Signal Lamp (Ex LSL) to utilize the core module of the explosion-proof Local Control System (Ex LCS) for offshore plant applications. And then analyzed its electrical, optical and thermal characteristics. Ex circuit was applied input voltage from AC/DC(12~254) V. In this experiments, stable light-on characteristics were confirmed by eyes for the every input voltages with min. 78,462 and max. $517,975cd/m^2$ of luminance. also Output current and output luminance was made proportional. Because the measured maximum surface temperature of Ex circuit was $54.23^{\circ}C$ at AC 48 V, Ex circuit was rated with T6 of temperature class. Finally, Ex circuit was shown stable light on characteristics under the $-50^{\circ}C$ and $60^{\circ}C$ during 12 hours of test period.

• 한국산학기술학회논문지
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• 제17권6호
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• pp.239-245
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• 2016

본 논문에서는 스마트기기의 배터리를 전원으로 갖는 12 V 승압형 PWM 변환기를 설계하고 컨버터를 구성하는 각 소자들의 손실을 계산하여 가장 안정적인 동작을 하는 설계 값을 도출하였다. 12 V 승압형 PWM 변환기는 저항, 커패시터 및 인덕터 등의 여러 수동소자를 비롯하여, 다이오드, 전력 스위치용 파워 MOS 트랜지스터와 PWM 신호제어를 위한 IC를 사용하여 구현하였다. 컨버터를 구성하는 주요 소자들의 이론적인 계산 값과 회로설계 해석프로그램인 PSPICE를 사용한 시뮬레이션 결과를 비교하고 각 소자 값들을 변화시키며 결과 파형을 분석한다. 분석한 컨버터를 실제 PCB 보드에 구성하고 디지털 오실로스코프와 DMM 멀티미터를 사용하여 측정하였고, SPICE 시뮬레이션을 통해 얻은 결과 값과 비교하였다. 설계한 컨버터에서 사용한 제어용 IC 칩은 TI(텍사스 인스트루먼트) 사의 LM3481을 사용하여 설계를 구현하였고, 5V 입력, 12V의 출력 값을 가지는 것을 확인하였다. 모의실험과 동일한 조건에서 출력전압, 리플전압 및 부하, 입력전압 변도율 등의 특성에 대한 측정결과는 SPICE 시뮬레이션 결과와 일치하는 것을 확인하였다.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2004년도 학술대회 논문집
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• pp.371-374
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• 2004

Induction motors are a critical component of many industrial processes and are frequently integrated in commercially available equipment. Safety, reliability, efficiency, and performance are some of the major concerns of induction motor applications. Preventive maintenance of induction motors has been a topic great interest to industry because of their wide range application of industry. Since the use of mechanical sensors, such as vibration probes, strain gauges, and accelerometers is often impractical, the motor current signature analysis (MACA) techniques have gained murk popularity as diagnostic tool. Fault tolerant control (FTC) strives to make the system stable and retain acceptable performance under the system faults. All present FTC method can be classified into two groups. The first group is based on fault detection and diagnostics (FDD). The second group is independent of FDD and includes methods such as integrity control, reliable stabilization and simultaneous stabilization. This paper presents the fundamental FDD-based FTC methods, which are capable of on-line detection and diagnose of the induction motors. Therefore, our group has developed the embedded distributed fault tolerant and fault diagnosis system for industrial motor. This paper presents its architecture. These mechanisms are based on two 32-bit DSPs and each TMS320F2407 DSP module is checking stator current, voltage, temperatures, vibration and speed of the motor. The DSPs share information from each sensor or DSP through DPRAM with hardware implemented semaphore. And it communicates the motor status through field bus (CAN, RS485). From the designed system, we get primitive sensors data for the case of normal condition and two abnormal conditions of 3 phase induction motor control system is implemented. This paper is the first step to drive multi-motors with serial communication which can satisfy the real time operation using CAN protocol.

• 한국전기전자재료학회논문지
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• 제35권1호
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• pp.44-49
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• 2022

In this paper, we investigated current (I)- and voltage (V)-sweeping properties in a double-stack structure, Ge₂Sb₂Te₅/Ti/W-doped Ge₈Sb₂Te₁₁, a candidate medium for applications to multilevel phase-change memory. 200-nm-thick and W-doped Ge₂Sb₂Te₅ and W-doped Ge₈Sb₂Te₁₁ films were deposited on p-type Si(100) substrate using magnetron sputtering system, and the sheet resistance was measured using 4 point-probe method. The sheet resistance of amorphous-phase W-doped Ge₈Sb₂Te₁₁ film was about 1 order larger than that of Ge₂Sb₂Te₅ film. The I- and V-sweeping properties were measured using sourcemeter, pulse generator, and digital multimeter. The speed of amorphous-to-multilevel crystallization was evaluated from a graph of resistance vs. pulse duration (t) at a fixed applied voltage (12 V). All the double-stack cells exhibited a two-step phase change process with the multilevel memory states of high-middle-low resistance (HR-MR-LR). In particular, the stable MR state is required to guarantee the reliability of the multilevel phase-change memory. For the Ge₂Sb₂Te₅ (150 nm)/Ti (20 nm)/W-Ge₈Sb₂Te₁₁ (50 nm), the phase transformations of HR→MR and MR→LR were observed at t<30ns and t<65ns, respectively. We believe that a high speed and stable multilevel phase-change memory can be optimized by the double-stack structure of proper Ge-Sb-Te films separated by a barrier metal (Ti).

• Macromolecular Research
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• 제17권12호
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• pp.963-968
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• 2009

Liquid crystal (LC; E7 and/or ML-0249)-embedded, poly(vinylidenefluoride-co-hexafluoropropylene) (PVdF-co-HFP)-based, polymer electrolytes were prepared for use in dye-sensitized solar cells (DSSCs). The electrolytes contained 1-methyl-3-propylimidazolium iodide (PMII), tetrabutylammonium iodide (TBAI), and iodine ($I_2$), which participate in the $I_3^-/I^-$ redox couple. The incorporation of photochemically stable PVdF-co-HFP in the DSSCs created a stable polymer electrolyte that resisted leakage and volatilization. DSSCs, with liquid crystal(LC)-embedded PVdF-co-HFP-based polymer electrolytes between the amphiphilic ruthenium dye N719 absorbed to the nanocrystalline $TiO_2$ photoanode and the Pt counter electrode, were fabricated. These DSSCs displayed enhanced redox couple reduction and reduced charge recombination in comparison to that fabricated from the conventional PVdF-co-HFP-based polymer electrolyte. The behavior of the polymer electrolyte was improved by the addition of optimized amounts of plasticizers, such as ethylene carbonate (EC) and propylene carbonate (PC). The significantly increased short-circuit current density ($J_{sc}$, $14.60\;mA/cm^2$) and open-circuit voltage ($V_{oc}$, 0.68 V) of these DSSCs led to a high power conversion efficiency (PCE) of 6.42% and a fill factor of 0.65 under a standard light intensity of $100\;mW/cm^2$ irradiation of AM 1.5 sunlight. A DSSC fabricated by using E7-embedded PVdF-co-HFP-based polymer electrolyte exhibited a maximum incident photon-to-current conversion efficiency (IPCE) of 50%.

• 전기전자학회논문지
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• 제24권1호
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• pp.319-325
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• 2020

본 논문에서 모바일 기기에 적용하는 DCM DC-DC 벅 변환기를 설계하였다. 이 변환기는 안정된 동작을 위한 보상기, PWM 로직과 파워 스위치로 구성되어 있다. 작은 하드웨어 폼-팩터를 얻기 위하여 칩 외부에서 사용하는 소자의 갯수를 최소화하여야 하며 이는 효율적인 주파수 보상과 디지털 스타트-업 회로로 구현하였다. 매우 작은 부하 전류에서 효율의 감소를 막기 위하여 버스트-모드 동작도 구현하였다. DCM 벅 변환기는 0.18um BCDMOS 공정으로 제작되었다. 2.8~5V의 입력 전압 범위에 대하여 출력 전압 값은 외부 저항 소자를 사용하여 1.8V로 프로그램 되었다. 1MHz의 스위칭 주파수 및 100mA의 부하 전류에서 측정된 최대 효율은 92.6%이다.