• 전자공학회논문지B
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• 제32B권10호
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• pp.1286-1293
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• 1995

Modified equivalent lumped element model for square spiral inductors have been derived. This model shows more accurate analysis performance than conventional models, and gives reliable design parameters. And this model is made through comparison among distributed multiple coupled line, numerical analysis and experimental data.

• 대한전자공학회논문지SD
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• 제45권5호
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• pp.58-64
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• 2008

CMOS $0.18{\mu}m$ 공정을 이용하여 1.8V supply voltage에서 6Gbps 이상의 처리속도를 가지는 1:2 demultiplexer(DEMUX)를 구현하였다. 높은 동작속도를 위하여 Current mode logic(CML)의 Flipflop을 사용하였으며 추가적인 동작속도 향상을 위하여 On-chip micro stacked spiral inductor($10{\times}10{\mu}m^2$)를 사용하였다. 총 12개의 인덕터를 사용하여 $1200{\mu}m^2$의 면적증가만으로 Inductive peaking의 효과를 나타낼 수 있었다. Chip의 측정은 wafer상태로 진행하였고 Micro stacked spiral inductor가 있는 1:2 demultiplexer와 그것이 없는 1:2 demultiplexer를 비교하여 측정하였다. 6Gbps에서 측정결과 Micro stacked spiral inductor를 1:2 demultiplexer가 inductor를 사용하지 않은 구조보다 Eye width가 약3%정도 증가하였고 또한 Jitter가 43%정도 감소하여 개선효과가 있음을 확인하였다. 소비전력은 76.8mW, 6Gbps에서의 Eye height는 180mV로 측정되었다.

• 한국진공학회지
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• 제8권4A호
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• pp.461-464
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• 1999

Planar type thin film inductors have a potential for the application of miniaturized DC-DC converters. For those high current applications, the magnetic film with high current capability is required. The current capability of magnetic films is mainly determined from high saturation magnetization (4$\piM_s$) as well as large anisotropy field $(H_k)$. We fabricated a double rectangular spiral thin film inductor which consist of magnetic layer, coil and insulator. Highest inductance values as well as best frequency characteristics can be obtained from 5 MHz and quality factor exhibit about 7.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권1호
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• pp.56-58
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• 2002

A closed form expression for the quality factor of the spiral inductor, methodologically, is presented as a function of the inductance ($L_{ind}$), metal-line width (W), spacing (S), inner and the diameter ($D_i$). For a given inductance, the dependences of quality factor on W, S, and $D_i$ are analyzed, and suggested the design optimization guidelines.

• 대한전자공학회논문지TC
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• 제39권12호
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• pp.559-565
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• 2002

현재 RFIC를 위해 실리콘 기판상에 구현되는 인덕터의 Q 값은 12 이하로 알려져있기 때문에, 고성능 회로설계를 위해서는 더욱 높은 Q 값을 갖는 인덕터의 구현이 필수적이다. 본 논문에서는 본드와이어를 이용하여 높은 Q 값을 가지는 두 개의 인덕터를 제안하였고, 동일한 인덕터에 PGS를 적용하여 총 4가지 형태의 인덕터를 구현하였다. 제안된 본드와이어 인덕터는 일반적인 금속선로보다 넓은 단면적 때문에 상대적으로 작은 도체 손실을 갖고, 인덕터의 상당부분이 공기 중에 위치하므로 기생 캐패시턴스 성분을 줄일 수 있다. 해석 및 측정결과 1.5 GHz 에서 기존의 나선형 인덕터보다 상당히 개선된 15이상의 Q 값을 가짐을 확인하였다. 또한 자동 본딩 머신을 사용하여 구현하기 때문에, 동일한 형태의 인덕터를 반복적으로 쉽게 만들 수 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.912-915
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• 2004

Inductors material utilized in the downsizing passive devices and Rf components requires the physical and electrical properties at given area such as inductors thickness reduction, inductance and q-factor increase, low leakage current and thermal stability. In this study, Spiral inductors on the $SiO_2/Si$(100) substrate were fabricated by the magnetron sputtering method. Cu thin film with the thickness of $2{\mu}m$ was deposited on the substrate. Also we fabricated square inductors through the wet chemical etching technique. The inductors are completely specified by the turn width and the spacing between spirals. Both the width and spacing between spirals were varied from 10 to $60{\mu}m$ and from 20 to $70{\mu}m$, respectively. Inductance and Q factor dependent on the RF frequency were investigated to analyze performance of inductor arrays

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
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• pp.289-291
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• 2003

This paper deals with the design of a spiral micro inductor using LTCC(Low Temperature Cofired Ceramics) technology. The inductors using the LTCC technology have some prominent properties of high integration of circuits, high confidence and low cost comparing with previously fabricated thick-film inductors. In this paper, we designed a new spiral-type micro inductor comprising a magnetic material to improve the inductance and leakage flux. we, in addition, presented the simulation results for various shapes of the magnetic material in the micro inductor, Finally application of the micro inductor to the boost DC-DC converter is investigated.

• 전자공학회논문지A
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• 제33A권12호
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• pp.53-58
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• 1996

In this paper, a simple fabrication technique of an air-bridge for interconnection of isolated electrodes of microwave active and passive devices and MMIC's is proposed. The proposed air-bridge proceses are mainly combinations of thermal evaporation, positive photoresist and image reversal processes for easy lift-off of up to 2.0 .mu.m thick metal. According to the resutls of air-birdge processes, it is confirmed that air-gap and thickness of theair-bridge are about 3.5.mu.m, and 2.0.mu.m, respectively. And it is also possible to make the fine air-bridge with widths of 5~60.mu.m and post-intervals of 25~200.mu.m withot collapse. finally, GaAs power MESFET's and rectangular spiral inductors are fabricatd and measured in order to confirm of feasibility of the proposed air-bridge processes. The MAG of the fabricated power MESFET's is 10dB at 10GHz, and the inductance of the (200.mu. * 6 turns) rectangular spiral inductors 4.5 nH inX-band.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.91-92
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• 2005

The electromagnetic coupling effect in standard CMOS process is simulated and evaluated. EM coupling transfer characteristic between planar spiral inductors by isolation methode in standard CMOS have simulated and measured. Measurement results show that suppression of EM coupling effect by ground guardring. The evaluated structures are fabricated 1P5M(one poly, five metal) 0.25um standard CMOS process. These measurement results provide a isolation design guidelines in standard CMOS process for Rf coupling suppression.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권5호
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• pp.333-338
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• 1999

Thin film inductors of $10 mm \times 10 mm$ with inner coil type of 14 turns were fabricated by sputtering, photo-masking, and etching processes. Their characteristics of impedances and annealing after were investigated. The properties of impedances of the thin film magnetic core inductors with inner coil type were improved by magnetic field annealing due to the removal of residual stress and the improvement magnetic properties of magnetic films. But the characteristics of frequency of the thin film magnetic core inductors were not improved by magnetic field annealing due to properties of the spiral pattern and inner coil type. The thin film magnetic core inductor annealed by uniaxal field annealing method showed an inductance of 1000 nH and resistance of$ 6 \Omega$ of 1 at 2 MHz.