The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Annealing Effect on the Characteristics of Thin Film Inductors with Inner Coil Type

내부 코일형 박막 인덕터의 특성에 미치는 열처리 효과

  • 민복기 (한국전기연구소 전기재료연구부) ;
  • 김현식 (한국전기연구소 전기재료연구부 위촉연구원) ;
  • 송재성 (한국전기연구소 전기재료연구부)
  • Published : 1999.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

Thin film inductors of $10 mm \times 10 mm$ with inner coil type of 14 turns were fabricated by sputtering, photo-masking, and etching processes. Their characteristics of impedances and annealing after were investigated. The properties of impedances of the thin film magnetic core inductors with inner coil type were improved by magnetic field annealing due to the removal of residual stress and the improvement magnetic properties of magnetic films. But the characteristics of frequency of the thin film magnetic core inductors were not improved by magnetic field annealing due to properties of the spiral pattern and inner coil type. The thin film magnetic core inductor annealed by uniaxal field annealing method showed an inductance of 1000 nH and resistance of$ 6 \Omega$ of 1 at 2 MHz.

Keywords

References

  1. T. IEE Japan v.111-A no.4 Special Issue on A New Development in Magnetics -Micromagnetic Devices- K. Shirae
  2. IEEE Trans. Magn. v.28 Characteristics and analysis of a thin film inductor with closed magnetic circuit structure M. Yamaguchi;S. Arakawa;H. Ohzeki;H. Hayashi;K. I. Arai
  3. 電氣學會マグネティックス硏究會資料 MAG-89-164 高周波領域におげる薄膜インダクタの特性解析 武田;白川;平田;村上
  4. IEEE Trans. Magn. v.28 An improved technique of impedance measurement for thin film inductors over 10 ㎒ K. I. Arai;M. Yamaguchi;H. Ohzeki
  5. 日本電氣學會マグネティツクス硏究會 MAG-97-1 Recent developments of micro-magnetic devices and related technologies Shimada
  6. 第16回日本應用磁氣學術演槪要集 9PA-18 內部コイル刑薄膜インダクタの特性 荒川;山口;荒井
  7. 電氣學會マグネティツクス硏究會資料 MAG-91-59 內部コイル刑薄膜インダクタの基礎的特性 三上 寬祐;述本 浩章;白江 公輔
  8. 修士學位論文, 東北大學校 薄膜インダクタの基礎特性に關する硏究 川信一郞
  9. 박사학위논문, 경남대학교 Co-계 비정질 자성 박막을 이용한 평면 인덕터의 제조와 특성 김현식
  10. IEEE Trans. Magn. v.24 no.5 Annealing Behavior of Magnetic Anisotropy of CoNbZr Films M. Miura;H. Katahashi;M. Muramori;M. Kajiyama
  11. 한국전기전자재료학회지 v.11 no.6 $Co_{89}Nb_{8.5}Zr_{2.5}$비정질 박막의 이방성에 미치는 열처리 효과 김현식;민복기;송재성;오영우
  12. 第14回 日本應用磁氣學術演槪要集 11aG-6 薄膜インダクタの慈 心 形狀と電氣特性 平田;白天;鳥性;村上