Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 8 Issue 4A
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- Pages.461-464
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- 1999
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- 1225-8822(pISSN)
A study on the fabrication of double rectangular spiral thin film inductor
Double rectangular spiral thin film inductor의 제조에 관한 연구
Abstract
Planar type thin film inductors have a potential for the application of miniaturized DC-DC converters. For those high current applications, the magnetic film with high current capability is required. The current capability of magnetic films is mainly determined from high saturation magnetization (4
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