• Bulletin of the Korean Chemical Society
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• v.28 no.6
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• pp.1015-1020
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• 2007

A simple approach to prepare arrays of Au/TiO2 composite nanoparticles by using Au-loaded block copolymers as templates combined with a sol-gel process is described. The organic-inorganic hybrid films with closely packed inorganic nanodomains in organic matrix are produced by spin coating the mixtures of polystyrene-block-poly(ethylene oxide) (PS-b-PEO)/HAuCl4 solution and sol-gel precursor solution. After removal of the organic matrix with deep UV irradiation, arrays of Au/TiO2 composite nanoparticles with different compositions or particle sizes can be easily produced. Different photoluminescence (PL) emission spectra from an organic-inorganic hybrid film and arrays of Au/TiO2 composite nanoparticles indicate that TiO2 and Au components exist as separate state in the initial hybrid film and form composite nanoparticles after the removal of the block copolymer matrix.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.58.1-58.1
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• 2009

나노 임프린트 리소그래피 기술은 기존의 노광 장비를 이용하는 기존의 리소그래피 공정에 비해 저렴한 공정으로 대면적 패터닝이 가능한 차세대 리소그래피 기술이다. 나노 임프린트 리소그래피는 기존의 나노 리소그래피 기술과는 다르게 기능성 무기물 물질을 직접 패터닝 할 수 있는 기술이다. 본 연구에서는 $TiO_2$ 나노 패턴을 를 기존의 증착, 리소그래피, 식각 등의 공정을 거치지 않고, sol-gel법과 나노 임프린트 리소그래피를 이용하여 직접 전사하는 기술에 대해 연구 하였다. 본 연구에서는 Tetrabutylorthotitanate를 precusor로 하는 ethanol 기반의 $TiO_2$ sol을 제작하여 이용하였다. PDMS mold를 임프린팅용 몰드로 사용하였으며, 이러한 PDMS mold는 노광 기술과 반응성 이온 식각을 이용하여 제작된 master mold로 부터 복제되었다. 제작된 sol을 Si wafer에 spin coating하여 넓게 도포한 후, wafer위에 PDMS mold를 밀착 시킨다. 이후, 5 bar의 압력과 $200^{\circ}C$의 온도에서 나노 임프린트 리소그래피 공정을 진행하여 $TiO_2$ gel 패턴을 형성한다. gel 상태의 $TiO_2$ 패턴을 anealing 공정을 통해 다결정질 TiO2 나노 패턴으로 제작하였다. 제작된 패턴을 scanning electron microscope(SEM)를 이용하여 확인하고, XRD 및 EDX를 이용하여 분석하였다.

• Journal of the Korean Vacuum Society
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• v.17 no.6
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• pp.549-554
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• 2008

Nickel Chloride coated protein chip plates were developed by using a spin coating method after $H_2$ plasma treatment. The adsorption ability of histidine tagged protein was investigated at various times of plasma treatment. The properties of the nickel chloride and protein on the surface of the slides were assayed using particle size analysis and the extent of the protein adsorption was determined by using a bio imaging analyzer system. The results show that the ability of protein adsorption decreased as increasing the time of $H_2$ plasma treatment. The mechanism on the ability of protein adsorption at the plate surface is discussed on results and discussions. The results also suggest that the surface stabilization of protein chip plates treated by plasma technology may be applicable in biosensor markets.

• Journal of Information Display
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• v.13 no.4
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• pp.151-157
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• 2012

A simple method of fabricating out-coupling structures was demonstrated via solution-processing to enhance light extraction from organic light-emitting diodes (OLEDs). Scattering layers were easily obtained by spin-coating an $SiO_2$ sol solution that contained $TiO_2$ particles. By introducing the scattering layer and the solution-processible corrugated structure as internal and external extraction layers, the OLEDs showed increased external quantum efficiency without a change in the electroluminescence spectrum compared to conventional devices. Using these solution-processible out-coupling structures, nearly all-solution-processed OLEDs with enhanced light extraction could be fabricated. The light extraction enhancement is attributed to the suppression by the out-coupling structures of the light-trapping that arose at the interface of the glass substrate and the air.

• Electrical & Electronic Materials
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• v.8 no.5
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• pp.606-610
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• 1995

In this study, Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_{3}$ ceramic thin films were fabricated from an alkoxide-based by Sol-Gel method. Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_{3}$ stock solution was made and spin-coated on the Pt/ $SiO_{2}$/Si substrate at 4000[rpm] for 30[sec.]. Coated specimens were chied at 400[.deg. C] for 10[min]. The coating process was repeated 6 times and then heat-treated at 500-800[.deg. C] and 1 hour. The final thickness of the thin films were about 4800[.angs.]. The ferroelectric perovskite phases precipitated under the sintering of 700[.deg. C] for 1 hour. Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_{3}$ thin films sintered at 700[.deg. C] for 1 hour showed good dielectric and ferroelectric properties.

• Journal of the Korean Ceramic Society
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• v.45 no.1
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• pp.48-53
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• 2008

In order to reduce signal delay in ULSI, an intermetal material of low dielectric constant is required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. The ordered mesoporous silica film prepared by TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-76 surfactant was surface-modified by HMDS (hexamethyldisilazane) treatment to reduce its dielectric constant. HMDS can substitute $-Si(CH_3)_3$ groups for -OH groups on the surface of silica wall. In order to modify interior silica wall, HMDS was treated by two different processes except the conventional spin coating. One process is that film is dipped and stirred in HMDS/n-hexane solution, and the other process is that film is exposed to evaporated HMDS. Through the investigation with different HMDS treatment, it was concluded that surface modification in evaporated HMDS was more effective to modify interior silica wall of nano-sized pores.

• Journal of the Korean Ceramic Society
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• v.52 no.5
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• pp.384-388
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• 2015

We prepared blocking layers by adding 0.0 ~ 0.6 wt% nano diamond blends (DBs) to $TiO_2$ blocking layers to improve the energy conversion efficiencies (ECEs) of dye sensitized solar cells (DSSCs). TEM and micro-Raman spectroscopy were used to characterize the microstructure and phases of DBs, respectively. Optical microscopy and FE-SEM were used to analyze the microstructure of the $TiO_2$ blocking layer with DBs. UV-VIS-NIR spectroscopy was used to determine the absorbance of the working electrodes. A solar simulator and a potentiostat were used to determine the photovoltaic properties and the impedance of the DSSCs with DBs. From the results of the DBs analysis, we determined a 6.97 nm combination of nano diamonds and graphite. We confirmed that ECE increased from 5.64 to 6.48 % when the added DBs increased from 0.0 to 0.2 wt%. This indicates that the effective surface area and electron mobility increased when DBs were added to the $TiO_2$ blocking layer. Our results indicate that the ECE of DSSCs can be enhanced by adding an appropriate amount of DBs to the $TiO_2$ blocking layers.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.9
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• pp.1296-1299
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• 2012

$YBa_2Cu_3O_{7-x}$ thin films were fabricated by the spin-coating method on $SiO_2$/Si substrate using an alkoxide-based sol-gel method. The structural and electrical properties were investigated for various 1st annealing temperature. Due to the formation of the polycrystalline single phase, synthesis temperature was observed at around $720^{\circ}C-800^{\circ}C$. $YBa_2Cu_3O_{7-x}$ thin films with the 1st annealing temperature of $450^{\circ}C{\sim}500^{\circ}C$ showed the single XRD patterns without the second phase, such as $YBa_2Cu_4O_8$. The thickness of films was approximately $0.23{\mu}m{\sim}0.27{\mu}m$. Aerage grain size, resistance and temperature coefficient of resistance (TCR) of $YBa_2Cu_3O_{7-x}$ thin films with the 1st annealing temperature of $500^{\circ}C$ were $0.27{\mu}m$, $59.7M{\Omega}$ and -3.7 %/K, respecvitely.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.200-203
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• 2003

Ferroelectric europium-substitution $Bi_4Ti_3O_{12}$ thin films were fabricated by spin-coating onto a Pt/Ti/$SiO_2$/Si substrate. The $Bi_{3.25}Eu_{0.75}Ti_3O_{12}$ (BET) films have polycrystalline structure annealed at 700 C. We investigated that the influence of $Bi_4Ti_3O_{12}$ thin films by substituting for Bi ions with Bi ions using X-ray diffraction (XRD), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS). From the XPS measurement, it was suggested that the stability of the metal-oxygen octahedral should be related to substitute for Bi ions with Eu ions at annealed $800^{\circ}C$. The BET thin films showed a large remanent polarization (2Pr) of $60.99C/cm^2$ at an applied voltage of 10 V. The BET thin films exhibited no significant degradation of switching charge at least up to $5{\times}10^9$ switching cycles at a frequency of 50 kHz.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.1881-1883
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• 2005

In this study, PZT thin films were fabricated using sol-gel Processing onto $Si/SiO_2/Ti/Pt$ substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}\;A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.