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The Formation of the Shallow Junction by RTD and Characteristic Analysis for $n^+$ -p Diode with Ti-silicide (고속 열 확산에 의한 얕은 접합 형성과 Ti-실리시이드화된 $n^+$ -p 다이오드 특성 분석)

  • 최동영;이성욱;주정규;강명구;윤석범;오환술
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.8
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    • pp.80-90
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    • 1994
  • The ultra shallow junction was formed by 2-step RTP. Phosphorus solid source(P$_{2}O_{5}$) was transfered on wafer surface during RTG(Rapid Thermal Glass Transfer) of which process condition was 80$0^{\circ}C$ and 60sec. The process temperature and time of the RTD(Rapid Thermal Diffusion) were 950~105$0^{\circ}C$ during 5~15sec respectively sheet resistances were measured as 175~320$\Omega$/m and junction depth and dopth and dopant surface concentration were measured as 0.075~0.18$\mu$m and 5${\times}10^{19}cm^{4}$ respectively. Ti-silicide was formed by 2-step RTA after 300$\AA$ Titanium was deposited. The 1st RTA (2nd RTA) was carried out at the temperature of $600^{\circ}C$(700~80$0^{\circ}C$) for 30 seconds (10~60 seconds) under N$_2$ ambient. Sheet resistances after 2nd RTA were measured as 46~63$\Omega$/D. Si/Ti component ratio was evaulated as 1.6~1.9 from Auger depth profile. Ti-Silicided n-p junction diode (pattern size : 400$\times$400$\mu$m) was fabricated under the RTD(the process was carried out at the temperature of 100$0^{\circ}C$ for 10seconds) and 2nd RTA(theprocess was carried out at the temperature of 750$^{\circ}C$ for 60 seconds). Leakage current was measured 1.8${\times}10^{7}A/mm^{2}$ at 5V reverse voltage. Whent the RTD process condition is at the temperature of 100$0^{\circ}C$ for 10seconds and the 2nd RTA process condition is at the temperature of 75$0^{\circ}C$ for 60 seconds leakage current was 29.15${\times}10^{9}A$(at 5V).

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Physicochemical Properties and Antioxidant Activities of Kimchi-added Croquette (김치 첨가 크로켓의 이화학적 품질 특성 및 항산화 활성)

  • Kim, Taejoon;Surh, Jeonghee
    • Journal of the East Asian Society of Dietary Life
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    • v.26 no.6
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    • pp.498-506
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    • 2016
  • A croquette added with heat-treated kimchi at 20% showing higher sensory preferences was analyzed for its physicochemical properties and antioxidant activity using a croquette without kimchi as a control. Compared with the control, kimchi-added croquette had 3.3-fold higher organic acids content (p<0.001), resulting in a significant reduction of pH (p<0.001) and higher metal chelating activity (p<0.001). Upon addition of kimchi, total reducing capacity increased from 109.4 to $139.4{\mu}g/g$ gallic acid equivalents (p<0.01), and DPPH radical scavenging activity also increased 2-fold, which corresponded to 54% of the electron-donating ability of 0.35 mM gallic acid. In addition, contents of free amino acids and ${\gamma}-aminobutyric$ acid (GABA) appreciably increased by 1.6-fold (p<0.01) and 10-fold (p<0.001), respectively. This could be attributed to the ingredients of kimchi and/or enzymatic transformation of precursors by microorganisms during kimchi fermentation. Kimchi-added croquette was determined to be a good source of dietary fiber relative to its calorie content. Texture profile analysis showed no significant differences in hardness, springiness, cohesiveness, gumminess, and chewiness between the two croquettes with or without kimchi. Taken together, this study shows that utilization of heat-treated kimchi as a filling for croquette could be a good strategy to improve both the nutritional quality and antioxidant activity of croquette.

Chloride Penetration into Concrete in Tidal Zone by Diffusion-Convection Analysis (확산과 이송을 고려한 콘크리트의 염소이온 침투해석)

  • Kim, Ki-Hyun;Cha, Soo-Won;Jung, Hyung-Mok
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.22 no.6
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    • pp.607-615
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    • 2009
  • Analysis of chloride penetration into concrete is performed considering the repeated wetting and drying conditions of tidal zone, by means of the developed finite element program which enables the diffusion-convection analysis to be conducted. Heat conduction and moisture diffusion are also included in the finite element analysis program in order that their effects to chloride penetration may be considered. For the efficiency of calculation, the analyses of temperature, relative humidity and free chloride concentration are conducted successively in that order, by treating the convection of chloride due to moisture diffusion as an source or sink term. By comparing the analysis result from finite element analysis, where main variable is a wetting and drying period, with the chloride profiles from ACI Life-365 method, it is shown that the Life-365 method gives an accurate result for the submerged zone but does not consider the differences of wetting and drying period. To obtain an accurate chloride profile in the tidal zone, it is confirmed that the diffusion-convection finite element analysis should be applied.

Applicability of Scroll Expander-compressor for Stirling Engine (스털링 엔진에 대한 스크롤 팽창기 : 압축기의 적용성)

  • Kim, Seong-Jun;Kim, Hyun-Jin;Kim, Young-Min
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.21 no.2
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    • pp.94-102
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    • 2009
  • Conceptual design of scroll expander and scroll compressor for 10kW-class Stirling engine utilizing solar energy as heat source has been carried out to estimate the applicability of scroll mechanism for Stirling cycle. CO2 was chosen as working fluid, since it has lower expansion index and higher density among probably usable gases. Gas temperature at the expander inlet was set at $700^{\circ}C$, and that at the compressor inlet was at $40^{\circ}C$. System efficiency reached maximum at the pressure ratio of about 2.5, and the peak efficiency increased with increasing high side pressure. Due to safety concern, the pressure condition of 6 MPa/2.5 MPa was chosen as design condition. Orbiting scroll members for the expander and compressor were designed to have double-sided structure in order to reduce the overall scroll size and to cancel out the axial gas forces acting on the orbiting scroll base plate. By parametric study on the scroll profile, smaller possible size for the scroll members was obtained. With the shaft speed of 3600rpm, the shaft output of the designed scroll expander was calculated to be 45.4kW, while input power for the scroll compressor was 34.5kW, yielding 10.9kW for the output power of the Stirling engine. System efficiency was estimated to be about 7.3%, and overall efficiencies of the scroll expander and compressor were around 84.1% and 88.3%, respectively.

XPS study of sapphire substrate surface nitridated by plasma activated nitrogen source (Plasma로 활성화된 질소 원자를 사용한 사파이어 기판 표면의 저온 질화처리의 XPS 연구)

  • 이지면;백종식;김경국;김동준;김효근;박성주
    • Journal of the Korean Vacuum Society
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    • v.7 no.4
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    • pp.320-327
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    • 1998
  • The chemical aspects of nitridated surface of sapphire(0001) have been studied by X-ray photoelectron spectroscopy. Nitridated layer was formed by remote plasma enhanced-ultrahigh vacuum deposition at a low temperature range. It was confirmed that this nitridated surface was mainly consists of AIN layer. The relative amounts of nitrogen reacted with AL on the sapphire surface and their surface morphology were investigated with X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) as a function of radio-frequency power, reaction temperature, and reaction time. The amounts of atomic nitrogen activated by plasma which was subsequently incorporated into sapphire were increased with RF power. But the amounts of nitrogen reacted with AI in sapphire was initially increased and then remained constant. However, the relative amounts of AIN were nearly constant with irrespective of nitridation temperature and time. Furthermore, a depth porfile of nitridated layer with XPS showed that the nitridated surface consisted of three layers with different stoichiometry.

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Utilizing Advanced Pad Conditioning and Pad Motion in WCMP

  • Kim, Sang-Yong;Chung, Hun-Sang;Park, Min-Woo;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.171-175
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    • 2001
  • Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics and metal, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter level dielectrics and metal. Especially, defects like (micro-scratch) lead to severe circuit failure, and affects yield. Current conditioning method - bladder type, orbital pad motion - usually provides unsuitable pad profile during ex-situ conditioning near the end of pad life. Since much of the pad wear occurs by the mechanism of bladder tripe conditioning and its orbital motion without rotation, we need to implement new ex-situ conditioner which can prevent abnormal regional force on pad caused by bladder-type and also need to rotate the pad during conditioning. Another important study of ADPC is related to the orbital scratch of which source is assumed as diamond grit dropped from the strip during ex-situ conditioning. Scratch from diamond grit damaged wafer severely so usual1y scraped. Figure 1 shows the typical shape of scratch damaged from diamond. We suspected that intensive forces to the edge area of bladder type stripper accelerated the drop of Diamond grit during conditioning, so new designed Flat stripper was introduced.

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A Foodborne Outbreak of Staphylococcus aureus Associated with Fried Chicken in Republic of Korea

  • Hyeon, Ji-Yeon;Chung, Gyung-Tae;Bing, Sun-Hye;Kwon, Kyung-Sook;Lee, Hyeon-Hee;Kim, Soo-Jin;Jeon, Se-Eun;Kang, Yeon-Ho;Kim, Junyoung
    • Journal of Microbiology and Biotechnology
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    • v.23 no.1
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    • pp.85-87
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    • 2013
  • An outbreak of Staphylococcus aureus infections occurred in a university with an enrollment of 80 students in the city of Daejon, Republic of Korea. All nine S. aureus isolates from patients (n = 7), staff members (n = 1), and the fried chicken served as the lunch (n = 1) harbored the enterotoxin A gene and showed an identical antibioticresistant profile, PFGE banding pattern (STAS16.001), and sequence type, ST 6. These results suggested that the outbreak was associated with eating the fried chicken that had been handled by an infected staff member. This case report demonstrated a practical approach to identifying the source and transmission of an infection.

A Study on Health Status and Occupational Stress of Seafarer (선원의 직업성 스트레스 및 건강도에 관한 연구)

  • Moon Serng-Bae;Jung Un-Seok;Ha Hae-Dong;Jun Seung-Hwan;Kim Jae-Ho
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2006.06b
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    • pp.39-46
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    • 2006
  • It is naturally to be expected that the stress of seafarers has some specific characters compared to other workers who are labouring on land. Because the physical rigors of working and living at sea has been endured as a part of job. The excessive stress caused by shipboard life, their jobs, can weaken the health status and court the work related accidents. Also it will be the immediate causes of marine accidents such as collision, sinking etc. In this paper, a questionnaire survey was undertaken to find out the approximate quantity and source of seafarer's occupational stress. And the heart rate of deck officers on duty was measured to develop a profile of correlation between the stress and the work.

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Mineral, Nutritional, and Phytochemical Profile, Total Phenolic Content, and Radical Scavenging Activity of Philippine Bamboo "Bolo" Gigantochloa levis (Blanco) Merr. Leaves

  • Tongco, Jovale Vincent V.;Rodriguez, Evelyn B.;Abasolo, Willie P.;Mun, Sung Phil;Razal, Ramon A.
    • Natural Product Sciences
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    • v.22 no.1
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    • pp.60-63
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    • 2016
  • The study is a pioneering effort to determine the mineral, nutritional, and phytochemical composition and phenolic content and to determine the free radical scavenging activity of Gigantochloa levis (Blanco) Merr, a native bamboo species (locally known as "bolo") in the Philippines. Proximate analysis showed that air-dried G. levis leaves contain 15.8% ash, 22.6% crude protein, 1.2% crude fat, 29.3% crude fiber, and 19.7% total sugar. Phytochemical tests indicated the presence of diterpenes, triterpenes, saponins, phenols, tannins, and flavonoids in both the ethanolic and aqueous leaf extracts, while phytosterols were only detected in the ethanolic extract. Folin-Ciocalteu assay determined the total phenolic content in gallic acid equivalents (GAE) to be $85.86{\pm}3.71$ and $32.32{\pm}1.01mg\;GAE/100g$ dried sample for the ethanolic and aqueous extracts, respectively. The total phenolic content in quercetin equivalents (QE) was $74.44{\pm}3.11$ and $29.43{\pm}0.85mg\;QE/100g$ dried sample for the ethanolic and aqueous extracts, respectively. The radical scavenging activity of the different solvent fractions containing varying concentrations of the extract was determined using the 2, 2-diphenyl-1-picrylhydrazyl (DPPH) assay. The ethyl acetate and 1-butanol fractions were found to have the highest radical scavenging activity. Mineral analysis via Energy Dispersive X-Ray Spectrometry (EDS) of the ash of G. levis leaves showed that Si is the major component, followed by K and Mg. These results point to the potential of G. levis leaves as a source of minerals and bioactive compounds with medicinal value.

Overproduction of Lignin Peroxidase from Phanerochaete chrysosporium PSBL-1 (Phanerochaete chrysosporium PSBL-1의 배양조건 최적화를 통한 Lignin Peroxidase의 과량생산)

  • 정병철;한윤전;장승욱;정욱진;원유정
    • Korean Journal of Microbiology
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    • v.36 no.3
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    • pp.228-235
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    • 2000
  • Until now, it was diIliculi to overproduce lignin peroxidase(LiP) fiom Pl~anemchaete ch~ysosporium since the lack of optimized growth conditions. In this paper, we optimized the LIP production conditions and monitored LIP isozyines of fl chqsospoi.ium PSBL-1. The optimized condition includes sponge matrix support, no addition of $MnSO_4$, excess addition of niixogen source(48 inM diarmnonium), and addition of stabilizer(2 mM verakyl alcohol). Finally we obtained Lip activity of 1,800 unitsll. HI isozyne was overproduced when inyceliuin was cultivated in media containing $Mn^{2+}$ (2.73 inM) and excess nitrogen(48 11d4 diannnonium). Three azo dyes(acid yellow 9, congo ued, orange IT; each concenimtion of50 $\mu$M) we1-e rapidly decolorized within 2 inins by 0.4 un~t or Lip.

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