Effect of the Sulfurization Temperature and Annealing Time of E-Beam Evaporated Sn Precursors on the Growth of SnSx Thin Films (E-빔 증착된 Sn 전구체의 황화 열처리 온도 및 시간에 따른 SnSx 박막 성장 효과)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.30 no.11
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- pp.734-739
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- 2017