Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

The effect on characteristic of ITO(glass) by polyimide thin film process

Polyimide 막 공정이 ITO Glass의 특성에 미치는 영향

  • 김호수 (충남대학교 전기공학과 고전압 및 재료연구실) ;
  • 김한일 (영동대학교 정보.전자공학부) ;
  • 정순원 (청주대학교 전자공학과) ;
  • 구경완 (영동대학교 정보.전자공학부) ;
  • 한상옥 (충남대학교 전기공학과 고전압 및 재료연구실)
  • Published : 2002.07.08
Download PDF
⟨ Previous Next ⟩

Abstract

The material that is both conductive in electricity and transparent to the visible-ray is called transparent conducting thin film. It has many field of application such as solar cell, liquid crystal display, transparent electrical heater, selective optical filter, and a optical electric device. In this study, indium tin oxide (ITO ; Sn-doped $In_2O_3$) thin films were deposited on $SiO_2$/soda-lime glass plates by a dc magnetron sputtering technique. The crystallinity and electrical properties of the films were investigated by X-ray diffraction(XRD), atomic force microscopy (AFM) scanning and 4-point probe. The optical transmittance of ITO films in the range of 300-1000nm were measured with a spectrophotometer. As a result, we obtained polycrystalline structured ITO films with (222), (400), and (440) peak. Transmittance of all the films were higher than 90% in the visible range.

Keywords