• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
• /
• pp.63-63
• /
• 2003

The nanotopography of silicon wafers has emerged as an important factor in the STI process since it affects the post-CMP thickness deviation (OTD) of dielectric films. Ceria slurry with surfactant is widely applied to STI-CMP as it offers high oxide-to-nitride removal selectivity. Aiming to control the nanotopography impact through ceria slurry characteristics, we examhed the effect of surfactant concentration and abrasive size on the nanotopography impact. The ceria slurries for this study were produced with cerium carbonate as the starting material. Four kinds of slurry with different size of abrasives were prepared through a mechanical treatment The averaged abrasive size for each slurry varied from 70 nm to 290 nm. An anionic organic surfactant was added with the concentration from 0 to 0.8 wt %. We prepared commercial 8 inch silicon wafers. Oxide Shu were deposited using the plasma-enhanced tetra-ethyl-ortho-silicate (PETEOS) method, The films on wafers were polished on a Strasbaugh 6EC. Film thickness before and after CMP was measured with a spectroscopic ellipsometer, ES4G (SOPRA). The nanotopogrphy height of the wafer was measured with an optical interferometer, NanoMapper (ADE Phase Shift)

• Transactions on Electrical and Electronic Materials
• /
• 제4권2호
• /
• pp.1-4
• /
• 2003

The purpose of this study was to investigate the characteristics of slurry including phosphoric acid for chemical-mechanical planarization of copper and tantalum nitride. In general, the slurry for copper CMP consists of alumina or colloidal silica as an abrasive, organic acid as a complexing agent, an oxidizing agent, a film forming agent, a pH control agent and additives. Hydrogen peroxide (H$_2$O$_2$) is the material that is used as an oxidizing agent in copper CMP. But, the hydrogen peroxide needs some stabilizers to prevent decomposition. We evaluated phosphoric acid (H$_3$PO$_4$) as a stabilizer of the hydrogen peroxide as well as an accelerator of the tantalum nitride CMP process. We also estimated dispersion stability and zeta potential of the abrasive with the contents of phosphoric acid. An acceleration of the tantalum nitride CMP was verified through the electrochemical test. This approach may be useful for the development of the 2$\^$nd/ step copper CMP slurry and hydrogen peroxide stability.

• 한국세라믹학회지
• /
• 제56권5호
• /
• pp.443-452
• /
• 2019

In this study, TiO₂-polyvinyl alcohol (PVA) composite granules were prepared via spray drying technique. To investigate the effects of solid content and binder/powder ratio in the slurry on the granulation behavior of TiO₂ powders, the feed compositions were designed to vary over a wide range. The morphology, actual densities, and average granule size and size distribution of the TiO₂-PVA composite granules were characterized by using scanning electron microscopy technique, a gas pycnometer, and an image analyzing program (Image-J), respectively. The results indicate that solid content and the amount of PVA in the feedstock slurry are the dominant factors determining the granule morphology, size, and size distribution of TiO₂-PVA composite. Moreover, it was observed that increasing the solid content and the amount of PVA in the slurry improved the granulation process and reduced the granule defects. For the preparation of spherical TiO₂-PVA composite granules with the minimum amount of non-granulated powders, the optimized composition of the feedstock slurry was found to be 35 wt.% solid and 3 wt.% PVA.

• The Korean Journal of Ceramics
• /
• 제5권2호
• /
• pp.104-109
• /
• 1999

Rheological properties of dense slurries over 45 volume % with different monosaccharides and disaccharides were checked in order to increase the solid content of dense slurries without sacrificing plasticity using creep testing method. Strain in creep test showed good correlations with Burger model which is expressed as an exponential function of time. Among several monosaccharides and disaccharides studied here, fructose and sucrose were most effective in making dense alumina slurry plastic than other monosaccharides and disaccharides like glucose, galactose, xyloss and maltose. In the case of dense alumina slurry with sucrose, sucrose content or additional water content enhanced to the plasticity of the slurries.

• 한국분말재료학회지
• /
• 제27권3호
• /
• pp.193-197
• /
• 2020

Porous Cu-14 wt% Co with aligned pores is produced by a freeze drying and sintering process. Unidirectional freezing of camphene slurry with CuO-Co₃O₄ powders is conducted, and pores in the frozen specimens are generated by sublimation of the camphene crystals. The dried bodies are hydrogen-reduced at 500℃ and sintered at 800℃ for 1 h. The reduction behavior of the CuO-Co₃O₄ powder mixture is analyzed using a temperature-programmed reduction method in an Ar-10% H₂ atmosphere. The sintered bodies show large and aligned parallel pores in the camphene growth direction. In addition, small pores are distributed around the internal walls of the large pores. The size and fraction of the pores decrease as the amount of solid powder added to the slurry increases. The change in pore characteristics according to the amount of the mixed powder is interpreted to be due to the rearrangement and accumulation behavior of the solid particles in the freezing process of the slurry.

• 한국세라믹학회지
• /
• 제46권5호
• /
• pp.447-451
• /
• 2009

Continuous SiC fiber-reinforced SiC composites ($SiC_f$/SiC) were fabricated by electrophoretic deposition (EPD). Nine types of slurries with different powder contents, binder resin amounts and slurry pH were deposited on Tyranno$^{TM}$-SA fabrics by EPD at 135 V for ten minutes to determine the optimal conditions. Further EPD using the optimum slurry conditions was performed on fabrics with four different pyrolitic carbon (PyC) thicknesses. The density of the hot-pressed composites decreased with increasing PyC thickness due to the difficulty of infiltrating the slurry into the narrow gaps between the fibers. On the other hand, the mechanical strength increased with increasing PyC thickness despite the decrease in density, which was explained by the enhanced crack deflection with increasing PyC thickness. The $SiC_f$/SiC composites showed the highest density and flexural strength of 94% and 342 MPa, respectively, showing EPD as a feasible method for dense $SiC_f$/SiC fabrication.

• 소성∙가공
• /
• 제31권5호
• /
• pp.290-295
• /
• 2022

Recently, the use of high-tech ceramic parts in functional electronic parts, automobile parts and semiconductor equipment parts is increasing. These ceramics materials are required to have high reproducibility, reliability, large size and complex shapes. The researchers initiated the work to develop a new shaping method called gel casting, which allows high performance ceramic materials with a complex shape to be produced. The manufacturing process parameters of gel casting include uniform mixing of the initiator, bubble removal, and slip injection. In this study, we analyzed the dispersion and gelation characteristics according to the change in the additive content of the alumina slurry in the gel casting process. The alumina slurry for gel casting was prepared by mixing a solvent, a monomer and a dispersant through a ball mill. Alumina powder and a gelation initiator were added to the mixed solution, and ball milling was performed for 24 hours. A viscosity of 6,435 cps and a stable zeta potential value were obtained under the conditions of alumina powder content of 55 vol% and dispersant 2.0 wt%. After curing for 12 hours by adding aps 0.1wt%, TEMED 0.2wt%, and Monomer 3, 5wt%, it was possible to separate from the molding cup, confirming that the gelation was completed.

• 한국재료학회지
• /
• 제25권1호
• /
• pp.27-31
• /
• 2015

This paper proposes a novel way of fabricating aligned porous Sn by freeze-drying of camphene slurry with stannic oxide ($SnO_2$) coated Sn powders. The $SnO_2$ coated Sn powders were prepared by surface oxidation of the initial and ball-milled Sn powders, as well as heat treatment of tin chloride coated Cu powders. Camphene slurries with 10 vol% solid powders were prepared by mixing at $50^{\circ}C$ with a small amount of oligomeric polyester dispersant. Freezing the slurry was done in a Teflon cylinder attached to a copper bottom plate cooled at $-25^{\circ}C$. Improved dispersion stability of camphene slurry and the homogeneous frozen body was achieved using the oxidized Sn powder at $670^{\circ}C$ in air after ball milling. The porous Sn specimen, prepared by freeze-drying of the camphene slurry with oxidized Sn powder from the heat-treated Sn/tin chloride mixture and sintering at $1100^{\circ}C$ for 1 h in a hydrogen atmosphere, showed large pores of about $200{\mu}m$, which were aligned parallel to the camphene growth direction, and small pores in their internal walls. However, $100{\mu}m$ spherical particles were observed in the bottom part of the specimen due to the melting of the Sn powder during sintering of the green compact.

• 한국재료학회지
• /
• 제23권6호
• /
• pp.339-343
• /
• 2013

Porous Ti-systems with unidirectionally aligned channels were synthesized by freeze-drying and a heat treatment process. $TiH_2$ powder and camphene were used as the source materials of Ti and sublimable vehicles, respectively. Camphene slurries with $TiH_2$ content of 10 and 15 vol% were prepared by milling at $50^{\circ}C$ with a small amount of oligomeric polyester dispersant. Freezing of the slurry was done in a Teflon cylinder attached to a copper bottom plate cooled at $-25^{\circ}C$ while unidirectionally controlling the growth direction of the camphene. Pores were generated subsequently by sublimation of the camphene during drying in air for 48 h. The green body was heat-treated at $1100^{\circ}C$ for 1 h in a nitrogen and air atmosphere. XRD analysis revealed that the samples composed of TiN and $TiO_2$ phase were dependent on the heat-treatment atmosphere. The sintered samples showed large pores of about 120 mm which were aligned parallel to the camphene growth direction. The internal wall of the large pores had relatively small pores with a dendritic structure due to the growth of camphene dendrite depending on the degree of nucleation and powder rearrangement in the slurry. These results suggest that a porous body with an appropriate microstructure can be successfully fabricated by freeze-drying and a controlled sintering process of a camphene/$TiH_2$ slurry.

• 수산해양교육연구
• /
• 제26권6호
• /
• pp.1209-1216
• /
• 2014

This feeding experiment was conducted to investigate the effects of slurry type diet on growth performance and survival rate of growing leptocephalus, eel larva. We need to find new materials of diets for rearing eel larvae. Test diets were formulated with the eggs of the shark, fish soluble concentrate, soybean peptide and fish protein hydrolysate. Fish (average length 6 mm) were fed 3 slurry type diet(A, B and C) based on shark egg for 5 times per day. During feeding experiment, survival rates were significantly different among 3 slurry type diets. Total protein, lipid, moisture, ash and free amino acids contents were analyzed for slurry type diets. Leptocephalus fed the C slurry type diet was grown up to $38.0{\pm}9mm$ at 150 days. But all leptocephalus fed B slurry type diet were died at 100 days, reaching $16.4{\pm}8mm$. This results suggest that basic information for diet development of eel leptocephalus.