• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.4
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• pp.254-259
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• 2007

In this report, several fabrication techniques for the formation of various nanochannels (with $SiO_2$, Si, or Quartz) are introduced. Moreover, simple fabrication technique for generating $SiO_2$ nanochannels without nanolithography is presented. By using different nanochannels, the degree of stretching DNA molecule will be evaluated. Finally, we introduce a nanometer scale fluidic channel with electrodes on the sidewall of it, to detect and analyze single DNA molecule. The cross sectional shape of the nanotrench is V-groove, which was implemented by thermal oxidation. Electrodes were deposited through both sidewalls of nanotrench and the sealing of channel was done by covering thin poly-dimethiysiloxane (PDMS) polymer sheet.

• Transactions on Electrical and Electronic Materials
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• v.15 no.3
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• pp.164-169
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• 2014

We investigated the etching characteristics of $HfAlO_3$ thin films in $O_2/Cl_2/Ar$ and $O_2/BCl_3/Ar$ gas, using a high-density plasma (HDP) system. The etch rates of the $HfAlO_3$ thin film obtained were 30.1 nm/min and 36 nm/min in the $O_2/Cl_2/Ar$ (3:4:16 sccm) and $O_2/BCl_3/Ar$ (3:4:16 sccm) gas mixtures, respectively. At the same time, the etch rate was measured as a function of the etching parameter, namely as the process pressure. The chemical states on the surface of the etched $HfAlO_3$ thin films were investigated by X-ray photoelectron spectroscopy. Auger electron spectroscopy was used for elemental analysis on the surface of the etched $HfAlO_3$ thin films. These surface analyses confirm that the surface of the etched $HfAlO_3$ thin film is formed with nonvolatile by-product. Also, Cl-O can protect the sidewall due to additional $O_2$.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.311-315
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• 2000

A numerical investigation is made of time-dependent buoyant convection in a square of a non-Boussinesq fluid. The density-temperature$({\rho}-T)$ relation is modeled by a quadratic function, with the maximum density ${\rho}_M$ at temperature $T_M$. The horizontal walls of the square are insulated, and a pulsating temperature $T_H=T_M+{\Delta}T'\;sin({\omega}{\tau})$ is imposed on the hot vertical sidewall. The temperature at the cold wall $T_c$ is constant. Extensive numerical solutions to the governing Navier-Stokes equations are portrayed. Resonance is identified by monitoring the amplitude of the mid-plane Nusselt number, $A(Nu^*)$. The primary resonance frequency is found by matching ${\omega}$ to the nondimensional basic mode $N_1$ of internal gravity oscillations. Due to the quadratic$({\rho}-T)$ relationship, the effective pulsation frequency for density, $2{\omega}$, is meaningful, which brings forth the secondary resonance frequency, i.e., $2{\omega}=N_1$

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.223-226
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• 2003

We propose an improvement method for a $\underline{G}ate$ $\underline{OX}ide(GOX)$ thinning at the edge of $\underline{S}hallow$ $\underline{T}rench$ $\underline{I}solation(STI)$, when STI is adopted to Dual Gate Oxide(DGOX) Process. In the case of SOC(System On-a-Chip), the DGOX process is usually used for realizing both a low and a high voltage parts in one chip. However, it is found that the severe GOX thinning occurs from at STI top edge region and a dent profile exists at the top edge of STI, when conventional DGOX and STI process carried out in high density device chip. In order to overcome this problem, a new DGOX process is tried in this study. And we are able to prevent the GOX thinning by H2 anneal, partially SiN liner skip, and a method which is merged a thick sidewall oxide(S/O) with a SiN pull-back process. Therefore, a good subthreshold characteristics without a double hump is obtained by the prevention of a GOX thinning and a deep dent profile.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.134.2-134.2
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• 2017

최근 고성능, 저 전력 반도체 소자를 위한 미세 공정 기술이 발전함에 따라, gate oxide의 두께 및 선폭이 감소하고, aspect ratio가 증가하고 있는 추세이다. 따라서 얇아진 gate oxide를 통한 채널 물질로의 boron 확산을 막기 위한 고농도 질화 막 증착의 필요성이 높아지고 있으며, high aspect ratio의 gate oxide에 적용 가능한 우수한 step coverage의 질화막 또한 요구되고 있다. 이러한 요구조건을 만족시키기 위해 일반적인 13.56MHz의 플라즈마 소스를 이용한 질화연구들이 선행되어져 왔으나, 높은 binding energy(~24 eV)를 가지고 있는 N2 molecule gas를 효과적으로 dissociation 하지 못해 충분한 질화공정이 수행되어질 수 없었을 뿐만 아니라 높은 공정온도($>200^{\circ}C$에서 진행되어 반도체소자에 손상을 줄 수 있다. 본 연구에서는 이러한 문제들을 해결하기 위해 VHF (162MHz)를 이용한 플라즈마를 통해 고밀도에서 낮은 전자온도와 높은 진동온도의 플라즈마를 구현하여 20%이상의 높은 질화율을 얻을 수 있었고, multi-tile push-pull 플라즈마 소스를 통해 VHF 사용 시 나타나는 standing wave effect를 제어하여 high aspect ratio의 gate sidewall spacer에 우수한 step coverage의 질화막을 형성시킬 수 있었다.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.10
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• pp.40-44
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• 2010

Laser drilling is an enabling technology for Through Silicon Via (TSV) interconnect applications. Recent advances in picoseconds laser drilling of blind, micron sized vias in silicon is presented here highlighting some of the attractive features of this approach such as excellent sidewall quality. In this study, we dealt with comparison of heat affection around drilled hole between a picosecond laser and a nanosecond laser process under the UV wavelength. Points which special attention should be paid are that picosecond laser process lowered experimentally recast layer, surface debris and micro-crack around hole in comparison with nanosecond laser process. These finding suggests that laser TSV process has possibility to drill under $10{\mu}m$ via. Finally, the laser drilling platform was constructed successfully.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.2 s.95
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• pp.135-147
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• 2005

As automobile technology advances, a smoother ride with less noise is desired. In order to achieve these purposes, a study on the vibration and noise produced by a moving automobile was carried out and a model for tire vibration characteristics which influence the ride performance was developed. The model was verified through simulations and experiments. The developed model was then applied to a half car model and automobile vibrations were analyzed. The effects of tire design parameters on the automobile vibration energy were investigated. The results from laboratory and field tests confirm the validity of the analytical model. The 17-DOF half-car model was built to analyze automobile vibration. The characteristics of the nonlinear model for a shock absorber were applied to this model. The results from the present 17-DOF half car model incorporating the analytical tire model with tire design parameters, were compared with the 5-DOF half car model where the tire was modeled with linear springs. The results of the 17-DOF model are close to the experimental results. Using the 17-DOF model, the influence of tire design parameter were considered. According to the analysis results, the vibrations at seat/body/wheel were predicted by simulation and experiment.

• Journal of Animal Environmental Science
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• v.20 no.4
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• pp.155-160
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• 2014

This study was researched for use by data for the improvement of ventilation system of optimum environmental control systems. The ventilation system for windowless swine housing was installed negative pressure system that circular pipe duct for inlet was installed on the ceiling and axial flow fan for exhaust was installed on the sidewall. The temperatures in the pen was measured using infrared thermography camera and thermocouple with data-logger. The temperature measurement points was selected by infrared thermography camera is alley (G), inlet (A), front-upper (B), front-lower (C), rear-upper (D), rear-lower (E), forward fan (F). The temperature measured at those selected points for temperature distribution was $28^{\circ}C$ that was maintained setting temperature in suitably. The temperature deviations of F point and A~E points in windowless swine housing was less then average $0.5^{\circ}C$. The result of air velocity of measured points was suitable to the breeding of pigs.

• Journal of Information Display
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• v.11 no.2
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• pp.84-90
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• 2010

This paper presents the effects of a dielectric layer and an electrolyte on the driving performance of an electrowetting on dielectric (EWOD)-based liquid lens. The range of tunable focal length of the EWOD-based liquid lens was highly dependent on the conditions of the dielectric layer, which included an inorganic oxide layer and an organic hydrophobic layer. Moreover, experiments on the physical and optical durability of electrolyte by varying temperature conditions, were conducted and their results were discussed. Finally, the lens with a truncated-pyramid silicon cavity having a sidewall dielectrics and electrode was fabricated by anisotropic etching and other micro-electromechanical systems (MEMS) technologies in order to demonstrate its performance. The lens with $0.6-{\mu}m$-thick $SiO_2$ layer and 10 wt% LiCl-electrolyte exhibited brilliant focal-length tunability from infinity to 3.19 mm.

• Journal of the Society of Naval Architects of Korea
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• v.42 no.3
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• pp.212-219
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• 2005

Real sea waves in a towing wave basin have been generated using random periodic motion of the segmented wave makers and the wave reflections of sidewalls. Theoretically, the real sea waves can be described by the superposition of many random oblique waves. This paper introduces numerical real sea wave generation in a rectangular wave basin using spectral method that uses a superposition of orthogonal functions which have to satisfy the Laplace equation. Oblique regular waves, long crested irregular waves and real sea waves were simulated and met the requirement of sidewall wave reflection and wave absorption. MLM (Maximum Likelihood Method) and Spatial Fourier Transform were used in order to obtain propagated wave direction characteristics. The estimated results proved the usefulness of the method and the performances showed reasonable directional patterns comparing with generating patterns.