• 제목/요약/키워드: sheet-resistance

검색결과 1,239건 처리시간 0.025초

IC소자용 질화 텅스텐 박막의 면저항 특성 (The Sheet Resistance Properties of Tungsten Nitride Thin films for Intergrated Circuit)

  • 이우선;정용호;김남오;정종상;유병수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.94-97
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    • 1997
  • We investigated the sheet resistance properties of tungsten nitride thin films deposited by RF and DC sputtering system. It deposited at various conditions that determine the sheet resistance. The properties of the sheet resistance of these films were measured under various conditions. Sheet resistance analysed under the flow rate of the argon gas and contents of nitrogen from nitrogen-argon gas mixtures. We found that these sheet resistance were largely depend on the temperature of substrate, gas flow rate and RF power. Very high and low sheet resistance of tungsten films obtained by DC sputtering. As the increase of contents of nitrogen gas obtained from nitrogen-argon gas mixture, tungsten nitride thin films deposited by the reactive DC sputtering and the sheet resistance of these films were increased.

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반턱 고무 아스팔트 칼라 시트를 이용한 접합부 맞춤식 옥상 노출 방수공법에 관한 실험적 연구 (An Experimental Study on the Roof Exposure Waterproofing Method of Tenon Jointing Type used Shiplap Rubberized Asphalt Color Sheet)

  • 이정훈;이선규;곽효야;오상근
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2008년도 춘계 학술논문 발표대회
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    • pp.73-77
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    • 2008
  • In this study, we would like to study on the application of roof exposure waterproofing method of joint stability through shiplap rubberized asphalt color sheet to complement problem of fracture, exfoliation and water leakage by existing roof exposure sheet waterproofing material joint weakness. Accordingly, examined basis performance and stability for joint that shiplap rubberized asphalt color sheet through test of that tensile strength, bonding strength, water permeability after bonding, peel resistance after bonding, lengthen resistance after bonding and hang resistance after bonding. The results of this study, waterproofing method to using shiplap rubberized asphalt color sheet is judged to solved fracture, exfoliation and water leakage problems happened in joint by problem was joint of exposure sheet by minimizing gap of joint being integration by shiplap.

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Characteristics of Hot-Dip Znmgal Coatings with Ultra-High Corrosion Resistance

  • Sungjoo Kim;Seulgi So;Jongwon Park;Taechul Kim;Sangtae Han;Suwon Park;Heung-yun Kim;Myungsoo Kim;Doojin Paik
    • Corrosion Science and Technology
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    • 제23권4호
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    • pp.289-295
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    • 2024
  • Zn-Mg-Al alloy hot-dip galvanized steel sheet has high corrosion resistance. Compared to conventional Zn coating with the same coating thickness, the high corrosion resistance Zn-Mg-Al coating is more corrosion-resistant. Various coating compositions are commercially produced and applied in diverse fields. However, these steel sheets typically contain up to 3 wt% magnesium. In recent years, there has been a growing demand for higher corrosion resistance in harsh corrosive environments. Therefore, variations in Mg and Al contents were investigated while evaluating primary properties and performance. As a result, we developed new alloy-coated steel with ultra-high corrosion resistance. A Zn-5 wt%Mg-Al coated steel sheet was evaluated for its corrosion resistance and various properties. As the amount of Mg added increased, the corrosion loss tended to decrease. The corrosion resistance of the coated steel sheet in a particular composition, the Zn-5 wt%Mg-Al coating sheet, was about 1.5 to 2 times higher than that of the conventional Zn-3 wt%Mg-Al coating sheet. Ultimately, this ultra-high corrosion-resistance coated steel sheet will provide a robust solution to conserve Zn resources and contribute to a low-carbon society.

도장 알루미늄 합금판의 성능에 미치는 인산염피막의 영향 (Effects of phosphate coating on some performance of painted Al alloy sheet)

  • 이규환;노병호
    • 한국표면공학회지
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    • 제28권5호
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    • pp.289-299
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    • 1995
  • The effects of phosphate coating have been studied on physical properties and corrosion resistance of painted aluminum alloy sheet for automobile body. The physical properties (surface roughness, paint adhesion, impact resistance and pencil hardness) and corrosion resistance(cyclic corrosion and filiform corrosion) were investigated. Phosphate coatings enhanced the physical properties of painted Al alloy sheet, especially paint adhesion after the 240hours water immersion test. Phosphate coating also markedly improved the resistance for cyclic corrosion and filiform corrosion of painted cold rolled steel and Zn-Ni plated steel sheet as well as painted Al alloy sheet. The corrosion resistance of painted Al sheets was varied with the concentration of free fluoride ion and metal additives like Ni and Mn in the phosphating bath. A maximum corrosion resistance was obtained at about 300ppm of fluoride ion and additives of Ni and Mn obviously increased the corrosion resistance of painted specimens.

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차체 외판 부품의 덴트 특성 향상을 위한 알루미늄 판재의 성형조건에 관한 연구 (Forming Condition for Automotive Body Outer Panel using Aluminum Alloy Sheet for Improved Dent Resistance)

  • 고세진;김태정;김익수
    • 소성∙가공
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    • 제20권6호
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    • pp.420-426
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    • 2011
  • Dent resistance is determined by both shape characteristics, i.e., local radius of curvature and sheet thickness, and material properties such as yield strength. This work presents results of a study on the effect of work hardening and bake hardening on dent resistance of aluminum alloy sheet parts by considering the forming condition and baking temperature.

이종재료(알루미늄합금-강판)의 저항 점용접에 관한 연구 (A Study on Resistance Spot Welding of Dissimilar Sheet Metals(Aluminum Alloy - Steel Sheets))

  • 손병천;우승엽;이재범;최용범;장희석
    • Journal of Welding and Joining
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    • 제15권4호
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    • pp.42-62
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    • 1997
  • Resistance spot welding has been widely used in the sheet metal joining processes because of its high productivity and convenience. Recently, automobile industries are trying to replace partly steel sheets with aluminum alloy sheets. Among currently produced aluminum alloys, Al alloy sheets of Al-Mg-Si(6000 series) are being tested. Especially, 6000 series are the most probable substitute in view of strength and weldability. In this paper, an attempt was made to apply resistance spot welding to joining of dissimilar sheet metals (KS6383+SCPZn or KS6383+SHCP). An effort was made to balance heating rate in the Al alloy with that in the steel sheets by increasing electrode tip diameter. Although resistance spot welding of Al alloy sheet and sheet metals does not produce desirable nugget, it proved to have reasonable strength if optimal weld condition is found by tensile-shear strength and fatigue life test. Since spot weld joints in automobile are always experiencing repeated load, spot welding methodology proposed in this paper is found to be not suitable to automobile body manufacturing.

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Development of a Handheld Sheet Resistance Meter with the Dual-configuration Four-point Probe Method

  • Kang, Jeon-Hong;Lee, Sang-Hwa;Yu, Kwang-Min
    • Journal of Electrical Engineering and Technology
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    • 제12권3호
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    • pp.1314-1319
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    • 2017
  • A handheld sheet resistance meter that can easily and quickly measure the sheet resistance of indium tin oxide films was developed. The dual-configuration four-point probe method was adopted for this instrument, which measured sheet resistance in the range from $0.26{\Omega}/sq$. to $2.6k{\Omega}/sq$. with 0.3 % ~ 0.5 % uncertainty. The screen of the instrument displayed the sheet resistance when the probe was in contact with the sample surface and the value continued to be displayed during the probe contact. Even after separating the probe from the surface, the value was still displayed on the screen and could be read easily. A feature of the instrument was the use of the dual-configuration technique to reduce edge effects markedly compared with the single-configuration technique and its ease of operation without applying correction factors for sample size and thickness.

Dual-Configuration Four-Point Probe Method에 의한 휴대형 면저항 측정기 개발 (Development of Hand-Held Type Sheet Resistance Meter Based on a Dual-Configuration Four-Point Probe Method)

  • 강전홍;유광민;김완섭
    • 전기학회논문지P
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    • 제59권4호
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    • pp.423-427
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    • 2010
  • Portable sheet resistance-measuring instrument using the dual-configuration Four-Point Probe method is developed for the purpose of precisely measuring the sheet resistance of conducting thin films. While single-configuration Four-Point Probe method has disadvantages of applying sample size, shape and thickness corrections for a probe spacing, the developed instrument has advantages of no such corrections, little edge effects and measuring simply and accurately the sheet resistance between $0.2\Omega/sq$ and $2k\Omega/sq$.

WSi2/CVD-Si/SiO2 구조의 게이트 전극 특성 (Characteristics of Gate Electrode for WSi2/CVD-Si/SiO2)

  • 박진성;정동진;이우성;이예승;문환구;김영남;손민영;이현규;강성철
    • 한국세라믹학회지
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    • 제30권1호
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    • pp.55-61
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    • 1993
  • In the WSi2/CVD-Si/SiO2 polycide structure, electrode resistance and its property were studied as a function of deposition temperature and thickness of CVD-Si, diffusion condition of POCl3, and WSi2 being deposited or not. Resistivity of poly-Si is decreased with increment of thickness in the case of POCl3 diffusion of low sheet resistance, but it is increased in the case of high sheet resistance. The resistivity of amorphous-Si is generally lower than that of poly-Si. Initial sheet resistance of poly-Si/WSi2 gate electrode is affected by the thickness and resistance of poly-Si layer, but final resistance after anneal, 900$^{\circ}C$/30min/N2, is only determined by WSi2 layer. Flourine diffuses into SiO2, but tungsten does not. In spite of out-diffusion of phosphorus into WSi2 layer, the sheet resistance is not changed.

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An international Comparison Measurement of Silicon Wafer Sheet Resistance using the Four-point Probe Method

  • Kang, Jeon-Hong;Ying, Gao;Cheng, Yuh-Chuan;Kim, Chang-Soo;Lee, Sang-Hwa;Yu, Kwang-Min
    • Journal of Electrical Engineering and Technology
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    • 제10권1호
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    • pp.325-330
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    • 2015
  • With approval from the Asia Pacific Metrology Program Working Group on Materials Metrology (APMP WGMM), an international comparison for sheet resistance standards for silicon wafers was firstly conducted among Korea Research Institute of Standards and Science (KRISS) in Korea, CMS/ITRI in Taiwan, and NIM in China, which are national metrology institutes (NMIs), from August 2011 to January 2012. The sheet resistance values of the standards are $10{\Omega}$, $100{\Omega}$, and $1000{\Omega}$; the measurement was conducted in sequence at KRISS, CMS/ITRI, NIM, and KRISS again using the four-point probe method with single and dual configuration techniques. The reference value for the measurement results of the three NMIs was obtained through averaging the values of the three results for each sheet resistance range. The differences between the reference value and the measured values is within 0.22% for $10{\Omega}$, 0.17% for $100{\Omega}$, and 0.12% for $1000{\Omega}$. Therefore, the international consistency for conducting sheet resistance measurements is confirmed within 0.22% through the APMP WGMM approved comparison.