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http://dx.doi.org/10.5370/KIEEP.2010.59.4.423

Development of Hand-Held Type Sheet Resistance Meter Based on a Dual-Configuration Four-Point Probe Method  

Kang, Jeon-Hong (한국표준과학연구원)
Yu, Kwang-Min (한국표준과학연구원)
Kim, Wan-Seop (한국표준과학연구원)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers P / v.59, no.4, 2010 , pp. 423-427 More about this Journal
Abstract
Portable sheet resistance-measuring instrument using the dual-configuration Four-Point Probe method is developed for the purpose of precisely measuring the sheet resistance of conducting thin films. While single-configuration Four-Point Probe method has disadvantages of applying sample size, shape and thickness corrections for a probe spacing, the developed instrument has advantages of no such corrections, little edge effects and measuring simply and accurately the sheet resistance between $0.2\Omega/sq$ and $2k\Omega/sq$.
Keywords
Four-Point Probe; Single- & Dual-Configuration; Sheet Resistance; Accuracy; Uncertainty;
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  • Reference
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