An international Comparison Measurement of Silicon Wafer Sheet Resistance using the Four-point Probe Method |
Kang, Jeon-Hong
(Korea Research Institute of Standards and Science)
Ying, Gao (National Institute of Metrology (NIM)) Cheng, Yuh-Chuan (Center for Measurement Standards (CMS), Industrial Technology Research Institute (ITRI)) Kim, Chang-Soo (Korea Research Institute of Standards and Science) Lee, Sang-Hwa (Korea Research Institute of Standards and Science) Yu, Kwang-Min (Korea Research Institute of Standards and Science) |
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