• Journal of the Semiconductor & Display Technology
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• v.9 no.4
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• pp.13-18
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• 2010

Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.8 no.3
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• pp.799-818
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• 2014

Spectrum sensing is a key technical challenge for cognitive radio (CR). It is well known that multi-cycle cyclostationarity (MC) detector is a powerful method for spectrum sensing. However, conventional MC detector is difficult to implement due to its high computational complexity. This paper pays attention to the fact that the computation complexity can be reduced by simplifying the test statistic of conventional MC detector. Based on this simplification process, an improved MC detector is proposed. Compared with the conventional one, the proposed detector has the low-computational complexity and sufficient-accuracy on sensing performance. Subsequently, the sensing performances are further investigated for the cases of Rayleigh, Nakagami-m, Rician, composite Rayleigh fading-lognormal shadowing and composite Nakagami fading-lognormal shadowing channels, respectively. Furthermore, the square-law combining (SLC) is introduced to improve the detection capability over fading-shadowing channels. The corresponding closed-form expressions of average detection probability are derived for each case by the moment generation function (MGF) approach. Finally, illustrative and analytical results show that the efficiency and reliability of proposed detector and the improvement on sensing performance by SLC over composite fading-shadowing channels.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.219-222
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• 2004

There are several factors that disturb an Ultra-Wideband (UWB) radio propagation in an indoor environment such as path loss, shadowing and multipath fading. These factors directly affect the quality of the received signal. In this paper, we investigated the influence of the human body shadowing on UWB propagation based on measured wireless channel in an anechoic chamber. The characteristics of the UWB channel including the transmitter and the receiver antenna effects are acquired over the frequency bandwidth of 3${\sim}$11 GHz. The major factors such as the power delay profile (PDP), the angular power distribution (APD), the pulse distortion and the RMS delay spread caused by the human body shadowing are presented.

• Journal of Power Electronics
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• v.17 no.2
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• pp.514-521
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• 2017

This paper proposes a shadowing compensation method for the solar modules of grid-connected photovoltaic generation systems. The shadowing compensator (SC) implemented by the proposed shadowing compensation method is used only for the solar modules that can be shaded by predictable sources of shading. The proposed SC can simplify both the power circuit and the control circuit as well as improve power efficiency and utilizes a voltage equalizer configured by a modified multi-winding fly-back converter. The proposed SC harvests energy from the entire solar cell array to compensate for the shaded sub-modules of the solar cell array, producing near-identical voltages of all shaded and un-shaded sub-modules in the solar cell array. This setup prevents the formation of multiple peaks in the P-V curve under shaded conditions. Hardware prototypes are developed for the SCs implemented by the conventional and modified multi-winding fly-back converters, and their performance is verified through testing. The experimental results show that both SCs can overcome the multiple peaks in the P-V curve. The proposed SC is superior to the SC implemented by the conventional multi-winding fly-back converter.

• Journal of Communications and Networks
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• v.16 no.2
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• pp.162-171
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• 2014

Spectrum sensing is a key technical challenge for cognitive radio (CR). It is well known that multicycle cyclostationarity (MC) detection is a powerful method for spectrum sensing. However, a conventional MC detector is difficult to implement because of its high computational complexity. This paper considers reducing computational complexity by simplifying the test statistic of a conventional MC detector. On the basis of this simplification process, an improved MC detector is proposed. Compared with the conventional detector, the proposed detector has low-computational complexity and high-accuracy sensing performance. Subsequently, the sensing performance is further investigated for the cases of Rayleigh, Nakagami-m, Rician, and Rayleigh fading and lognormal shadowing channels. Furthermore, square-law combining (SLC) is introduced to improve the detection capability in fading and shadowing environments. The corresponding closed-form expressions of average detection probability are derived for each case by the moment generation function (MGF) and contour integral approaches. Finally, illustrative and analytical results show the efficiency and reliability of the proposed detector and the improvement in sensing performance by SLC in multipath fading and lognormal shadowing environments.

• Journal of the Chungcheong Mathematical Society
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• v.26 no.4
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• pp.821-829
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• 2013

Let f be a diffeomorphism of a closed $C^{\infty}$ manifold M, and let ${\Lambda}{\subset}M$ be a closed f-invariant set. We show that if $f{\mid}_{\Lambda}$ is robustly chain transitive with shadowing, then ${\Lambda}$ is the hyperbolic homoclinic class.

• Journal of the Chungcheong Mathematical Society
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• v.11 no.1
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• pp.73-85
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• 1998

This paper deals with the topological stability of continuous maps. First, the notion of local expansion is given and we show that local expansions of compact metric spaces have the shadowing property. Also, we prove that if a continuous surjective map f is a local homeomorphism and local expansion, then f is topologically stable in the class of continuous surjective maps. Finally, we find homeomorphisms which are not topologically stable.

• Journal of the Chungcheong Mathematical Society
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• v.28 no.4
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• pp.647-651
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• 2015

Let (X, d) be a compact metric space, and let $f:X{\rightarrow}X$ be a continuous map. We consider that if a positively continuum-wise expansiveness continuous map f has the positively shadowing property in the nonwandering set, then the topological entropy is positive.

• Journal of the Chungcheong Mathematical Society
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• v.25 no.2
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• pp.235-239
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• 2012

Let $f$ be an Axiom A difeomorphism of a closed 2- dimensional smooth manifold M: We show that $f$ has the limit shadowing property if and only if $f$ satisfies the $C^0$ transversality condition.

• ETRI Journal
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• v.31 no.5
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• pp.500-505
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• 2009

The detrimental effect of short-term fading and shadowing can be mitigated using microdiversity and macrodiversity systems, respectively. In this paper, implementation of selection combining at both micro and macro levels to improve system performance is analyzed. An assessment of the performance of such a system is carried out by considering the desired signal as Rician fading with lognormal shadowing and cochannel interference signal as Rayleigh fading superimposed over lognormal shadowing. The proposed analysis is complemented by various performance evaluation results, including the effects on overall system performance of fading severity, shadowing spreads and branch correlation existing at the base station, and correlation between base stations.