• 한국산업융합학회 논문집
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• 제17권2호
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• pp.61-68
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• 2014

Constructing structures is the basic process requiring establishment of grounds. However, cracks due to sinking and distorting ground influence directly on the safety of structural health. Vibrating wire sensor measures the crack of structure by detecting the differences of wire tensions in analogue manner. In the previous production process, the tension is adjusted manually measuring the frequency of vibrating wire. Therefore, the accuracy of a sensor was depends on the skill level of labor. In this study, the automatic tension control and fixing devise is developed to enhance both accuracy and productivity. To evaluate the performance of the vibrating wire sensor, the nonlinearity of sensor is measured. The automatic tension control and fixing devise enhances the nonlinearity of the sensor from 0.398 to 0.056%. Therefore, the accuracy of the newly proposed method is successful.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.234-236
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• 2006

Because of its long measurement range and ultra-precise resolution. the heterodyne laser interferometer systems are very common in various industry area such as semiconductor manufacturing. However the periodical nonlinearity property caused from frequency mixing is an obstacle to improve the high measurement accuracy in nanometer scale. In this paper to minimize the effect of nonlinearity, we propose an adaptive nonlinearity compensation algorithm. We first compute compensation parameters using least square (LS) with the capacitance displacement sensor as a reference input. We then update the parameters with recursive LS (RLS) while the values are optimized to modify the elliptical phase into circular one. Through comparison with some experimental results of laser system, we demonstrate the effectiveness of our proposed algorithm.

• 제어로봇시스템학회논문지
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• 제21권8호
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• pp.748-752
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• 2015

We present an output feedback controller for a class of nonlinear systems with uncertain nonlinearity and sensor noise. The sensor noise has both a finite constant component and a time-varying component such that its integral function is finite. The new design and analysis method is based on the matrix inequality approach. With our proposed controller, the states and output can be ultimately bounded even though the structure of nonlinearity is more general than that in the existing results.

• 전자공학회논문지A
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• 제30A권7호
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• pp.82-88
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• 1993

This paper describes fabrication of relative type capacitive pressure sensor to be in great demand for many fields. The fabricated sensor consists of two parts` a sensing diaphragm and a pyrox glass cover. The sensor size is 4.5${\times}3.4mm$^{2})$ and 400$\mu$m thick. To improve the nonlinearity, this sensor is designed a rectangular silicon diaphragm with a center boss structure, and in order to improve the temperature characteristics of the sensor in a packaging process, the sensing element is mounted on the pyrex glass support. Some suggestions toward the design and fabrication of improved sensors have been presented. The zero pressure capacitance, Co of sensor is 26.57pF, and the change of capacitance, ${\Delta}$C is 1.55pF from 0Kgf/Cm$^{2}$ to 1Kgf/Cm$^{2}$ at room temperature. The nonlinearity of the sensor output with center boss diaphragm is 1.29%F.S., and thermal zero shift and thermal sensitivity shift is less than 1.43%F.S./$^{\circ}C$and 0.14% F.S./$^{\circ}C$, respectively.

• 센서학회지
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• 제14권2호
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• pp.109-115
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• 2005

Calibration is a prerequisite procedure for employing a camera as a 3D sensor in an automated machines like robots. As accurate sensing is possible only when the vision sensor is calibrated accurately, many different approaches and models have been proposed for increasing calibration accuracy. Particularly an important factor which greatly affects the calibration accuracy is the nonlinearity in the mapping between 3D world and corresponding 2D image. In this paper GMDH algorithm is used to learn the nonlinearity without physical modelling. The technique proposed can be effective in various situations where the levels of noises and characteristics of nonlinear distortion are different. In simulations and an experiment, the proposed technique showed good and reliable results.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년 학술대회 논문집 정보 및 제어부문
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• pp.597-599
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• 2006

In this paper, we propose an artificial intelligence method to compensate the nonlinearity error which occurs in the heterodyne laser interferometer. Some superior properties such as long measurement range, ultra-precise resolution and various system set-up lead the laser interferometer to be a practical displacement measurement apparatus in various industry and research area. In ultra-precise measurement such as nanometer or subnanometer scale, however, the accuracy is limited by the nonlinearity error caused by the optical parts. The feedforward neural network trained by back-propagation with a capacitive sensor as a reference signal minimizes the nonlinearity error and we demonstrate the effectiveness of our proppsed algorithm through some experimental results.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.86-88
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted nonlinearity error which is caused from frequency-mixing. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on RLS(recursive least square) method and artificial intelligence method, which reduce the nonlinearity error in the heterodyne laser interferometer. With the capacitance displacement sensor we get a reference signal which can be transformed into the intensity domain. Using the back-propagation Neural Network method, we train the network to track the reference signal. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• 제어로봇시스템학회논문지
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• 제20권6호
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• pp.631-634
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• 2014

We propose a measurement state feedback controller for a class of nonlinear systems that have uncertain nonlinearity and sensor noise. The new design method based on the matrix inequality approach solves the measurement feedback control problem of a class of nonlinear systems. As a result, the proposed methods using a matrix inequality approach has the flexibility to apply the controller. In addition, the sensor noise can be attenuated for more generalized systems containing uncertain nonlinearities.

• 대한전자공학회논문지SD
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• 제48권10호
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• pp.6-14
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• 2011

본 논문에서는 배터리의 전류, 전압을 측정하기 위한 analog front-end IC 를 설계 하였다. 회로는 크게 programmable gain instrumentation amplifier (PGIA)와 델타-시그마 모듈레이터로 구성 되어 있다. 델타-시그마 모듈레이터는 2차 단일 비트 구조이고 0.25 ${\mu}m$ CMOS 공정을 사용 하였다. 설계된 회로는 오버 샘플링 비율이 256일 때 2 kHz 신호 대역에서 signal-to-noise ratio (SNR)는 82 dB 의 성능을 가지고, differential nonlinearity (DNL)은 ${\pm}$ 0.3 LSB (16bit 기준), integral nonlinearity (INL)은 ${\pm}$ 0.5 LSB 이다. 전체 소비 전력은 4.5 mW 이다.

• 센서학회지
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• 제30권1호
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• pp.42-46
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• 2021

In this paper, we describe the development of a force sensor to measure the tool gripping force of the BT50 spindle. The force sensor for a BT50 must be installed inside the gripping force tester; hence, it must be of an appropriate size and have a rated capacity suitable for measuring the gripping force. So, the structure of the force sensor for BT50 was modeled, the size of the sensing part was determined by structural analysis, and the force sensor was manufactured by attaching a strain gauge. The characteristic test results of the manufactured force sensor, indicated that the nonlinearity error, hysteresis error, and reproducibility errors were each within 0.91%, Therefore it was determined that the manufactured force sensor can be used for checking the spindle tool gripping force.