Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.10c
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- Pages.597-599
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- 2006
Accuracy improvement of laser interferometer with neural network
신경회로망을 이용한 레이저 간섭계 정밀도 향상
Abstract
In this paper, we propose an artificial intelligence method to compensate the nonlinearity error which occurs in the heterodyne laser interferometer. Some superior properties such as long measurement range, ultra-precise resolution and various system set-up lead the laser interferometer to be a practical displacement measurement apparatus in various industry and research area. In ultra-precise measurement such as nanometer or subnanometer scale, however, the accuracy is limited by the nonlinearity error caused by the optical parts. The feedforward neural network trained by back-propagation with a capacitive sensor as a reference signal minimizes the nonlinearity error and we demonstrate the effectiveness of our proppsed algorithm through some experimental results.
Keywords
- Nonlinearity;
- laser interferometer;
- artificial intelligence compensation;
- capacitive displacement sensor