• 제목/요약/키워드: scattering film

검색결과 299건 처리시간 0.024초

Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist

  • Jun, Hwa Joon;Na, Dae Gil;Kwon, Young Hoon;Kwon, Jin Hyuk
    • Journal of the Optical Society of Korea
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    • 제19권1호
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    • pp.80-83
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    • 2015
  • White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.

Design and Development of an Ultralow Optical Loss Mirror Coating for Zerodur Substrate

  • Cho, Hyun-Ju;Lee, Jae-Cheul;Lee, Sang-Hyun
    • Journal of the Optical Society of Korea
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    • 제16권1호
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    • pp.80-84
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    • 2012
  • A high reflectance mirror, which has very low absorption and scattering loss, was coated onto a crystalline substrate by ion beam sputtering and then annealed at $450^{\circ}C$. We carefully selected the mirror coating material, and designed the high reflectance mirror, in order to avoid UV degradation which comes from the He-Ne plasma. We measured the surface roughness of the Zerodur substrate using phase shift interferometry and atomic force microscopy, and compared it with the TIS scattering of the mirror. The cavity ring-down method was used to measure the absorption of the mirror, and the thin film structure was correlated to its results. We also compared the optical properties of coated mirrors before and after annealing.

Structure Analysis of $BaTiO_3$ Film on the MgO(001) Surface by Time-Of-Flight Impact-Collision Ion Scattering Spectroscopy

  • Yeon Hwang;Lee, Tae-Kun;Ryutaro Souda
    • 한국결정학회:학술대회논문집
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    • 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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    • pp.17-17
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    • 2002
  • Time-of-flight impact collision ion scattering spectroscopy (TOF-ICISS) was applied to study the geometrical structure of the epitaxially grown BaTiO₃ layers on the MgO(100) surface. Hetero-epitaxial BaTiO₃ layers can be deposited by the following steps: first thermal evaporation of titanium onto the MgO(100) surface in the atmosphere of oxygen at 400℃, secondly thermal evaporation of barium in the same manner, and finally annealing at 800℃. Well ordered perovskite BaTiO₃ was confirmed from the ICISS spectra and reflection high electron energy diffraction (RHEED) patterns. It was also revealed that BaTiO₃ had cubic structure with the same lattice parameter of bulk phase.

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3가 크롬 박막 내의 극미세 결함 측정을 위한 중성자 소각 산란법의 적용 (Application of Small Angle Neutron Scattering to Determine Nano-size Cracks in Trivlent Chromium Layers)

  • 최용
    • 한국표면공학회지
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    • 제37권3호
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    • pp.175-178
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    • 2004
  • The size and number of nano-size defects of thin trivalent chrome layers were determined by small angle neutron scattering (SANS) without breaking the thin chrome layers. Most of defect size of the trivalent chromium prepared in this test conditions is in the range of about 40nm. The number of nano-size defects less than about 40nm of the trivalent chromium layer increases with plating voltage at constant current density From this study, SANS is proved as one of useful techniques to evaluate nano-size defects of thin film layer.

SOI MOSFET의 단채널 효과를 고려한 문턱전압과 I-V특성 연구 (A Study on Threshold Voltage and I-V Characteristics by considering the Short-Channel Effect of SOI MOSFET)

  • 김현철;나준호;김철성
    • 전자공학회논문지A
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    • 제31A권8호
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    • pp.34-45
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    • 1994
  • We studied threshold voltages and I-V characteristics. considering short channel effect of the fully depleted thin film n-channel SOI MOSFET. We presented a charge sharing model when the back surface of short channel shows accumulation depletion and inversion state respectively. A degree of charge sharing can be compared according to each of back-surface conditions. Mobility is not assumed as constant and besides bulk mobility both the mobility defined by acoustic phonon scattering and the mobility by surface roughness scattering are taken into consideration. I-V characteristics is then implemented by the mobility including vertical and parallel electric field. kThe validity of the model is proved with the 2-dimensional device simulation (MEDICI) and experimental results. The threshold voltage and charge sharing region controlled by source or drain reduced with increasing back gate voltage. The mobility is dependent upon scattering effect and electric field. so it has a strong influence on I-V characteristics.

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수용성 폴리머를 사용한 비산먼지 방지제의 미세먼지 저감에 관한 기초적 연구 (A Fundamental study of Fine Dust Reduction of Dust Inhibitor using Water Soluble Polymer)

  • 임성규;조인성;이한승
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2020년도 가을 학술논문 발표대회
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    • pp.38-39
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    • 2020
  • Since a lot of fugitive dust is generated at construction and civil engineering construction sites in Korea, the fine dust regulation at construction sites has been strengthened in accordance with the implementation of the Special Act on Fine Dust Reduction. In a construction site, water is generally sprayed to temporarily reduce the generation rate of scattered dust, but there is a problem that when water evaporates, it scatters again. In this study, the performance of a scattering dust inhibitor incorporating a polymer that stabilizes the ground and reduces the rate of scattering dust by forming a polymer film even when water evaporates using a polymer and a surfactant was evaluated.

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FePt/MgO(001) 자성박막 결정화의 두께의존성 (Thickness Dependence of the Crystallization of FePt/MgO(001) Magnetic Thin Films)

  • 정지욱;이민수;조태식
    • 한국전기전자재료학회논문지
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    • 제23권2호
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    • pp.153-158
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    • 2010
  • The crystallization of FePt/MgO(001) magnetic thin films of various thicknesses has been studied using synchrotron x-ray scattering, atomic force microscope, and vibrating sample magnetometer. In film with a 499-$\AA$-thick, face-centered tetragonal, ordered FePt phase was dominantly crystallized into perpendicular (001) grains keeping the magnetically easy c-axis normal to the film plane during annealing. In film with a 816-$\AA$-thick, however, longitudinal (110) grains keeping the c-axis parallel to the film plane were grown on top of the perpendicular (001) grains. The behavior of the magnetic properties was consistent with the thickness dependence of the crystallization. We attribute the thickness dependence of the crystallization to the substrate effect, which prefers the growth of the c-axis oriented perpendicular grains near the film/substrate interfacial area.

Eyestrain-free Bi-Focal 3D Projection Display System

  • Seo, Jong-Wook;Kim, Tae-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1739-1741
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    • 2007
  • A 3D projection display using stacked screens to display the near and far images, respectively, is developed. The front screen is made of a scattering polarizer film, and the far image on the rear screen is clearly visible through it. The image is perceived as three-dimensional, and no eyestrain is suffered.

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TIS 방법을 이용한 유전체 고반사 거울의 산란 측정 (Scattering measurement of dielectric high reflection mirrors by TIS method)

  • 조현주;박흥진;황보창권;문환구;김진태;손승현;이재철
    • 한국광학회지
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    • 제8권4호
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    • pp.283-290
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    • 1997
  • 진공 증착법으로 수정 기판 위에 증착된 유전체 고반사 다층 박막의 산란을 TIS 방법을 이용하여 측정하였다. 기판온도 250~300.deg. C에서 증착한(Ta$_{2}$O$_{5}$/SiO$_{2}$) 다층 박막의 산란율은 0.048~0.050%이며 300.deg. C에서 4시간 열처리에 의하여 영향을 받지 않았다. 기판온도 250.deg. C에서 증착한 (TiO$_{2}$/SiO$_{2}$) 다층 박막의 산란율은 0.029%이며 열처리에 의하여 심한 인장 응력을 받았다. 두 다층 박막의 표면 거칠기는 거의 차이가 없었고 Ta$_{2}$O$_{5}$ 박막의 기둥이 TiO$_{2}$ 박막보다 작고 조밀도는 (Ta$_{2}$O$_{5}$/SiO$_{2}$) 다층 박막이 큰 것을 알 수 있었다. (Ta$_{2}$O$_{5}$/SiO$_{2}$) 다층 박막의 산란율이 큰 것은 Ta$_{2}$O$_{5}$ 박막이 더 조밀하고 기둥 크기가 작으므로 박막 내에 기둥 수가 증가하여 체적 산란이 증가하였기 때문인 것으로 판단된다. 것으로 판단된다.

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