• 제목/요약/키워드: scanning microscope

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초음파 주사 현미경의 분해능 향상을 위한 중첩된 펄스에코 신호의 분리 기법(디컨볼루션과 웨이브렛 변환의 혼합기법) (Separation of Superimposed Pulse-Echo Signal for Improvement of Resolution of Scanning Acoustic Microscope -Deconvolution Technique Combined with Wavelet Transform-)

  • 장경영;장효성;박병일
    • 한국정밀공학회지
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    • 제17권7호
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    • pp.217-225
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    • 2000
  • Scanning Acoustic Microscope (SAM) is used as an important nondestructive test tool in semiconductor reliability evaluation and failure analysis. However, inspections of chip attach adhesive interface fer thin chip has proven difficulty as the reflected signals from the chip top and bottom are superimposed. In this paper, in order to overcome this difficulty, a new signal processing method based on the deconvolution technique combined with the wavelet transform is proposed. The wavelet transform complements a disability of deconvolution technique of which performance largely decreases when the waveform of target signal is not identical to that of reference signal. Performances of the proposed method are demonstrated by through computer simulations using model signal and experiments for the fabricated semiconductor samples, and satisfactory results are obtained.

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Direct Measurement of Spindle Motion Error Using a Regular Crystalline Lattice and a Scanning Tunneling Microscope

  • Chaikool, Patamaporn;Aketagawa, Masato;Okuyama, Eiki
    • International Journal of Precision Engineering and Manufacturing
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    • 제9권4호
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    • pp.11-15
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    • 2008
  • Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.

유체역학 현상을 이용한 현미경 검사법 개발 (A Scanning Flow Impedance Micrscope)

  • 김태영;김동권;김성진
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회B
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    • pp.2670-2675
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    • 2008
  • We introduce a new type of surface microscope using hydrodynamic phenomena. The fluid flow through the opening of the pipette probe is blocked at short distances between the probe and the surface, thus increasing the pressure loss. Therefore, a scanning flow impedance microscope (SFIM) can image the surface topology by scanning the probe with measuring the pressure loss. The SFIM can display the topology regardless of surface hardness, surface electrical conductivity, and surrounding fluid. The present letter contains the first experimental results on surface topography obtained with this novel microscope. The preliminary results in air demonstrate the lateral resolution of the SFIM is very close to the inner diameter of the probe.

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의치상 레진의 중합 방법에 따른 크기의 안정성 및 표면 형태에 관한 연구 (DIMENSIONAL STABILITY AND SURFACE MORPHOLOGY OF VARIOUS DENTURE RESINS)

  • 채숙영;방몽숙
    • 대한치과보철학회지
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    • 제30권3호
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    • pp.401-410
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    • 1992
  • The purpose of this study was to investigate the dimensional changes and surface morphology of dentures processed by various polymerization conditions. The measurements were done by taking radiograph and using vernier calipers and each specimen was observed on scanning electron microscope. Results obtained were as follows. 1. The difference of dimensional stability was not recognized between various polymerization conditions(heat-cured resin, pour-type resin, microwave-cured resin, and injection molding resin). 2. There were expansion and shrinkage in the occlusal dimension, shrinkage in the frontal dimension, and expansion in the lateral dimension. 3. Scanning electron microscope pictures of heat-cured resin showed dense and regular surface morphology. 4. Microwave-cured resin surface appeared more regular and smooth than pour-type resin but less dense and more irregular than heat-cured resin. 5. Scanning electron microscope pictures of pour-type resin with the lowest dimensional change showed the most irregular surface morphology.

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Focused ion beam-scanning electron microscope examination of high burn-up UO2 in the center of a pellet

  • Noirot, J.;Zacharie-Aubrun, I.;Blay, T.
    • Nuclear Engineering and Technology
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    • 제50권2호
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    • pp.259-267
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    • 2018
  • Focused ion beam-scanning electron microscope and electron backscattered diffraction examinations were conducted in the center of a $73\;GWd/t_U\;UO_2$ fuel. They showed the formation of subdomains within the initial grains. The local crystal orientations in these domains were close to that of the original grain. Most of the fission gas bubbles were located on the boundaries. Their shapes were far from spherical and far from lenticular. No interlinked bubble network was found. These observations shed light on previous unexplained observations. They plead for a revision of the classical description of fission gas release mechanisms for the center of high burn-up $UO_2$. Yet, complementary detailed observations are needed to better understand the mechanisms involved.

반복변형된 Cu 및 Cu-Al 단결정 표면형상의 나노-스케일 관찰 (Nano-Scale Surface Observation of Cyclically Deformed Copper and Cu-Al Single Crystals)

  • 최성종;이권용
    • Tribology and Lubricants
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    • 제16권5호
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    • pp.389-394
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    • 2000
  • Scanning Probe Microscope (SPM) such as Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AEM) was shown to be the powerful tool for nano-scale characterization of material surfaces. Using this technique, surface morphology of the cyclically deformed Cu or Cu-Al single crystal was observed. The surface became proportionately rough as the number of cycles increased, but after some number of cycles no further change was observed. Slip steps with the heights of 100 to 200 nm and the widths of 1000 to 2000 nm were prevailing at the stage. The slipped distance of one slip system at the surface was not uniform, and formation of the extrusions or intrusions was assumed to occur such place. By comparing the morphological change caused by crystallographic orientation, strain amplitude, number of cycles or stacking fault energy, some interesting results which help to clarify the basic mechanism of fatigue damage were obtained. Furthermore, applicability of the scanning tunneling microscopy to fatigue damage is discussed.

4분할 광검출기를 이용한 표면 추적 효과의 공초점 현미경 (Scanning confocal microscope of a surface following effect using a quad-detector)

  • 김수철;송장섭;권남익
    • 한국광학회지
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    • 제9권1호
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    • pp.1-4
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    • 1998
  • CD-Player에서 사용되고 있는 4분할 광검출기를 이용하여 작고 간단하며 표면 추적 효과를 가지는 공초점 현미경을 구성하였다. 구성한 공초점 현미경은 4분할 광검출기에서 검출되는 오차 신호의 거리에 따른 변화를 이용하였다. 초점 근처에서 민감하게 변하며 양극성인 성질을 가지는 오차 신호를 이용하여 표면 추적을 하지 않아도 정확한 높이 변화를 알 수 있는 표면 추적 효과를 얻었다. 또한 시료의 높이 차이가 크지 않을 경우 반사 신호를 통하여 재질의 차이까지 알 수가 있다. 구성한 공초점 현미경은 간단한 조작으로 반사 신호를 이용하여 영상을 구현할 수도 있어 두 방식으로 얻은 결과를 비교, 분석하였다.

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주사음향현미경을 이용한 코발트기 초내열합금 미세조직에 관한 장시간 열영향에 대한 비파괴평가 (Nondestructive Evaluation for Long-term Heat Treatment Effects on Microstructure of Co-base Superalloy by Scanning Acoustic Microscope)

  • 이준희;김정석
    • 열처리공학회지
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    • 제32권3호
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    • pp.118-123
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    • 2019
  • The aim of this study investigates the feasibility of scanning acoustic microscope (SAM) with high frequency transducer for material degradation. The test specimen was prepared by artificial heat treatment of Co-base superalloy. The high frequency 200 MHz acoustic lens was used to generate the leaky surface acoustic wave (LSAW) on the test specimens. The matrix precipitates coarsened with thermal aging time, and then grow up to several tens of micrometers. The velocity of LSAW decreased with increasing aging time. Also, it has a good correlation between LSAW and hardness. Consequently, V(z) curve methods of SAM using high frequency transducer is useful tool to evaluate the heat treatment effects on microstructure.

Stem cell behaviors on periodic arrays of nanopillars analyzed by high-resolution scanning electron microscope images

  • Jihun Kang;Eun-Hye Kang;Young-Shik Yun;Seungmuk Ji;In-Sik Yun;Jong-Souk Yeo
    • Applied Microscopy
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    • 제50권
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    • pp.26.1-26.3
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    • 2020
  • The biocompatible polyurethane acrylate (PUA) nanopillars were fabricated by soft lithography using three different sizes of nanobeads (350, 500, and 1000 nm), and the human adipose-derived stem cells (hASCs) were cultured on the nanopillars. The hASCs and their various behaviors, such as cytoplasmic projections, migration, and morphology, were observed by high resolution images using a scanning electron microscope (SEM). With the accurate analysis by SEM for the controlled sizes of nanopillars, the deflections are observed at pillars fabricated with 350- and 500- nm nanobeads. These high-resolution images could offer crucial information to elucidate the complicated correlations between nanopillars and the cells, such as morphology and cytoplasmic projections.

미나리 체세포 배발생과정의 해부학적 관찰 (Anatomical Observation of Somatic Embryogenesis in Oenanthe javanica ($B^{L}.$) DC.)

  • Gab Cheon KOH;Chang Soon AHN
    • 식물조직배양학회지
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    • 제22권6호
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    • pp.323-327
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    • 1995
  • 미나리의 체세포 배발생 과정을 해부학적으로 구명하기 위하여 배발생 기원세포와 캘러스를 광학현미경 및 전자현미경으로 관찰한 결과, 배발생 세포는 hematoxylin에 짙은 보라색으로, 비배발생 세포는 safranin에 적색으로 염색되어 광학현미경하에서 쉽게 구별할 수 있었다. 배발생 캘러스는 많은 수의 원배 및 발육중인 배, 비배발생 세포 등으로 구성되어 있었다. 체세포 배발생은 발육 중인 배나 세포괴의 표피세포에 위치한 배발생 세포의 하나가 분열하거나 세포괴내의 비배발생 세포속에 묻혀 있는 배발생 세포가 분열하여 일어났다. 배발생 과정은 항상 일정한 형태는 아니지만 단세포로부터 일정한 segmentation 과정를 거쳐서 배발생이 진행되는 것으로 나타났다. 투과전자현미경에 의한 관찰에서 배발생 세포는 비배발생 세포에 비하여 세포질이 조밀하고 핵이 대형이며 amyloplast, 인지질체 및 세포소기 관들이 많으며 액포가 없거나 매우 작았다. 이들 세포들은 두터운 세포벽에 의하여 주위의 비배발생 세포와 분리되어 있으며 세포윤곽은 둥글었다. 주사전자현미경으로 관찰한 배발생캘러스는 외부가 그물이 씌워진 형태의 구형의 다양한 크기의 배들과 비교적 크기가 큰 비배발생 세포들이 혼재하였다. 한편 비배발생능 캘러스는 구성세포가 크고 외부에는 gelatin같은 물질로 덮여 있었다.

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