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Direct Measurement of Spindle Motion Error Using a Regular Crystalline Lattice and a Scanning Tunneling Microscope  

Chaikool, Patamaporn (Department of Mechanical Engineering, Nagaoka University of Technology)
Aketagawa, Masato (Department of Mechanical Engineering, Nagaoka University of Technology)
Okuyama, Eiki (Department of Mechanical Engineering, Akita University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.9, no.4, 2008 , pp. 11-15 More about this Journal
Abstract
Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.
Keywords
Spindle motion error; Regular crystalline lattice; Scanning tunneling microscope; Picometer;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
Times Cited By Web Of Science : 3  (Related Records In Web of Science)
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