A study on the improvement of defective products with changing conditions of safety idle in ILD HDP processes (반도체 공정중 ILD HDP 공정 safety idle 조건개선으로 정체에 의한 불량 개선 연구)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2012.05a
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- pp.459-460
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- 2012