• 제목/요약/키워드: run-by-run control

검색결과 633건 처리시간 0.035초

Identification and Multivariable Iterative Learning Control of an RTP Process for Maximum Uniformity of Wafer Temperature

  • Cho, Moon-Ki;Lee, Yong-Hee;Joo, Sang-Rae;Lee, Kwang-S.
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2003년도 ICCAS
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    • pp.2606-2611
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    • 2003
  • Comprehensive study on the control system design for a RTP process has been conducted. The purpose of the control system is to maintain maximum temperature uniformity across the silicon wafer achieving precise tracking for various reference trajectories. The study has been carried out in two stages: thermal balance modeling on the basis of a semi-empirical radiation model, and optimal iterative learning controller design on the basis of a linear state space model. First, we found through steady state radiation modeling that the fourth power of wafer temperatures, lamp powers, and the fourth power of chamber wall temperature are related by an emissivity-independent linear equation. Next, for control of the MIMO system, a state space modeland LQG-based two-stage batch control technique was derived and employed to reduce the heavy computational demand in the original two-stage batch control technique. By accommodating the first result, a linear state space model for the controller design was identified between the lamp powers and the fourth power of wafer temperatures as inputs and outputs, respectively. The control system was applied to an experimental RTP equipment. As a consequence, great uniformity improvement could be attained over the entire time horizon compared to the original multi-loop PID control. In addition, controller implementation was standardized and facilitated by completely eliminating the tedious and lengthy control tuning trial.

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Comparisons of Multivariate Quality Control Charts by the Use of Various Correlation Structures

  • Choi, Sung-Woon;Lee, Sang-Hoon
    • 한국경영과학회지
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    • 제20권3호
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    • pp.123-146
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    • 1995
  • Several quality control schemes have been extensively compared using multivariate normal data sets simulated with various correlation structures. They include multiple univariate CUSUM charts, multivariate EWMA charts, multivariate CUSUM charts and Shewhart T$^{3}$ chart. This paper considers a new approach of the multivariate EWMA chart, in which the smoothing matrix has full elements instead of only diagonal elements. Performance of the schemes is measured by avaerage run length (ARL), coefficient of variation of run length (CVRL) and rank in order of signaling of off-target shifts in the process mean vector. The schemes are also compared by noncentrality parameter. The multiple univariate CUSUM charts are generally affected by the correlation structure. The multivariate EWMA charts provide better ARL performance. Especially, the new EWMA chart shows remarkable results in small shifts.

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운동이 쥐의 위축가자미근의 질량과 상대근 무게에 미치는 영향 (Effect of Exercise on the Mass and Relative Muscle Weight of Atrophied Soleus Muscles of Rats)

  • 최명애
    • 대한간호학회지
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    • 제21권3호
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    • pp.281-294
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    • 1991
  • The purpose of this study was to determine the amount of soleus muscle atrophy in rats due to 28 days of decreased activity induced by hindlimb suspension, to observe the restoration of mass and relative muscle weight of the atrophied soleus muscle at day 28 of recovery to control value, and to compare the effect of run training on the mass and relative muscle weight of the atrophied soleus muscle at day 28 of recovery with that of sedentary rats. Adult female Wistar rats were maintained for 28 days with hindlimb suspension. Rats were then assigned randomly to a cage sedentary or running group. Soleus muscle mass and relative muscle weight following hindlimb suspension were compared with a control value. The soleus muscle mass and relative muscle weight of the running and cage sedentary groups following hindlimb suspension were compared with those of a control group. Soleus muscle mass and relative muscle weight of the run training group were compared with those of cage sedentary group. The results obtained were as follows : 1. Soleus muscle mass and relative muscle weight was reduced to 53.28% and 51.11% respectively by hindlimb suspension. 2. Soleus muscle mass and relative muscle weight of the training group t day 28 of recovery was restored to the control value. 3. Soleus muscle mass of the training group was greater than that of the cage sedentary group by 6.6% without statistical significance at day 28 of recovery. 4. Relative soleus muscle weight of the traning group was significantly greater than that of the cage sedentary group by 15.79% From these results, it may be concluded that run training during the posthypokinetic period facilitates the recovery of the atrophied soleus muscle mass of rats.

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VSSI-CRL 합성관리도 (A VSSI-CRL Synthetic Control Chart)

  • 이재원;임태진
    • 한국경영과학회지
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    • 제30권4호
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    • pp.1-14
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    • 2005
  • We propose a VSSI-CRL(Variable Sampling Size and Samplina Interval-Conforming Run length) synthetic control chart in order to improve the statistical characteristics of both the VSSI chart and the CRL synthetic chart. The VSSI-CRL chart utilizes VSSI sampling scheme, but it produces a signal only when the CRI is less than a given limit. An algorithm for calculating the ARL(Average Run length) and ATS(Average Time to Signal) of the VSSI-CRL chart is developed by employing Markov chain method. We present some lemmas for describing the statistical characteristics of the VSSI-CRL chart under in-control state. A procedure for designing the VSSI-CRL chart is proposed based on the lemmas. Extensive comparative studios show that the VSSI-CRL chart is superior to the CRL synthetic chart or the VSSI chart in general, and is comparable to the EWMA chart in ATS performance.

재배열 기반의 교착상태 없는 혼성 병행실행제어 (A Hybrid Concurrency Control without Deadlock based on Reordering)

  • 조성호
    • 인터넷정보학회논문지
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    • 제7권6호
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    • pp.79-86
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    • 2006
  • 클라이언트-서버 데이터베이스 시스템에서 많은 병행실행제어가 연구되었다. 그러나 일반적으로 알려진 기법들은 데이터베이스에서 데이터의 집중으로 인한 수많은 변화를 수용하기 어렵다. 본 논문에서는 혼성 병행실행제어를 제안한다. 제안하는 기법은 첫 번째 실행에서는 낙관적인 기법을 사용하며 두 번째 실행에서는 비관적인 기법을 사용한다. 제안하는 기법에서는 두 번째 단계에서 잠금을 미리 선언하기 때문에, 비관적인 기법에서 발생할 수 있는 교착상태는 발생하지 않는다. 또한, 낙관적 단계의 검사가 실패하더라도 단 한번만 재실행되는 것을 보장한다. 실험을 통하여 제안하는 기법과 분산 낙관적 병행실행제어를 비교하고, 제안하는 기법이 분산 낙관적 병행실행제어보다 우수하다는 것을 보인다.

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주파수조정용 에너지저장장치 운전제어 기술의 개발과 계통연계 자동제어 운전 (Development of Operation and Control Technology of Energy Storage System for Frequency Regulation and Operation by Grid Connected Automatic Control)

  • 임건표;최요한;임지훈
    • 전기학회논문지P
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    • 제65권4호
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    • pp.235-241
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    • 2016
  • Grid-connected, large-capacity energy storage systems (ESS) can be used for peak load supply, frequency regulation, and renewable energy output smoothing. In order to confirm the capability of battery ESS to provide such services, 4MW/ 8MWh battery ESS demonstration facility was built in the Jocheon substation on Jeju Island. The frequency regulation technology developed for the Jocheon demonstration facility then became the basis for the 28MW and 24MW frequency regulation ESS facilities installed in 2014 at the Seo-Anseong and Shin-Yongin substations, respectively. The operation control systems at these two facilities were continuously improved, and their successful commercialization led to the construction of additional ESS facilities all over Korea in 2015. In seven (7) locations nationwide (e.g., Shin-Gimje and Shin-Gyeryeong), a total of 184 MW of ESS had been commercialized in 2016. The trial run for the new ESS facilities had been completed between April and May in 2016. In this paper, results of the trial run from each of the ESS facilities are presented. The results obtained from the Seo-Anseong and Shin-Yongin substations during a transient event by a nuclear power plant trip are also presented in this paper. The results show that the frequency regulation battery ESS facilities were able to quickly respond to the transient event and trial run of ESS is necessary before it is commercialized.

DEVELOPMENT OF LEVEE WEEDING ROBOT - Pathway Control System on the Strait Levee -

  • Takeda, J.;Takahashi, S.;Torisu, R.;Ashraf, M.A.
    • 한국농업기계학회:학술대회논문집
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    • 한국농업기계학회 2000년도 THE THIRD INTERNATIONAL CONFERENCE ON AGRICULTURAL MACHINERY ENGINEERING. V.II
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    • pp.325-332
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    • 2000
  • The objective of this research work is to develop an autonomous levee-weeding robot. In this paper, pathway control system for the robot is developed and simulated. A prototype autonomous vehicle for levee weeding is also developed and used in the actual test. The results obtained in this research work is summarized as follows; 1) The simulated typical time history of lateral displacements and heading angle of the vehicle in straight run shows that the vehicle tendency is always to achieve the target path from any of its deviated position and heading angle. 2) The test run on an asphalt surface by the prototype crawler-type vehicle is in good agreement with the simulation results.

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Detection of Rotor Bar Faults in Field Oriented Controlled Induction Motors

  • Akar, Mehmet
    • Journal of Power Electronics
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    • 제12권6호
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    • pp.982-991
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    • 2012
  • In this study, a new method has been presented for the detection of broken rotor bar (BRB) faults in inverter driven induction motors controlled via Field Oriented Control (FOC). To this end, a FOC controlled induction motor with a BRB fault was modeled using the Matlab/Simulink program. Experiments were carried out using the prepared simulation model at various loads and operating speeds. The motor current and speeds were monitored for healthy, 1, 2 and 3 BRB faults. The Resampling Based Order Tracking Analysis (RB-OTA) method was applied to the monitored signals. The obtained results were compared by using the classic Fast Fourier Transform (FFT) method. When the obtained results were analyzed via the FFT method no information regarding any faults was determined in the run up or run down regions of the motor and the presented method gave very good results. The reliability of the proposed method was validated with experimental results. The main innovative part of this study is that the RB-OTA method was implemented on the induction motor current signal for detecting BRB faults.

POSIX 쓰레드를 이용한 SR 실행지원시스템의 설계 및 구현 (Design and Implementation of SR Run-Time Support System Using POSIX ZThreads)

  • 김영곤;정영필;박양수;이명준
    • 한국정보처리학회논문지
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    • 제4권4호
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    • pp.1106-1120
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    • 1997
  • 본 연구에서는 POSIX 쓰레드(Pthreads)를 사용하여 구현한 새로운 SR 실행지원 시스템인 SR/RTS+를 제시한다. SR은 다중의 병행 제어 프리미티브를 이용해서 다양한 병행 프로그래밍 기법을 제공한다. 윈 SR 실행지원시스템이 자신의 고유한 쓰레드 경영 기법을 사용하였기 때문에 다른 컴퓨터 시스템에서 동작하기 위해서는 실행지원 시스템의 수정이 필요하다. 더우기 실행지원시스템의 실행 효율성은 이런 각각의 상이한 시스템에 연관되어 개별적으로 고려되어야 한다. 따라서 이식성을 증가시키고 실행 효 율성을 예측 가능하도록 하기 위해서 SR/RTS+를 하나의 POSIX프로세스내에서 다중의 실행의 쓰레드를 제공하는 Pthreaes(POSIX쓰레드)상에서 설계되었다. 또한 ,SR 컴파일러 Ptherads 인터페이스를 위한 코드를 적절히 생성하도록 수정되었다. SR/RTS+는 Florida Sate Univerisity에서 제공하는 Pthreads 라이브러리를 사용하여 Spare Workstation 상에서 개발되었으며, University of Arizona에서 제공하는 SR 검증 도구로 테스트하였다.

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효율적인 응급의료 정보전달매체로서의 119구급활동일지 분석 (An Analysis of the 119 EMS System using the Standardized Record on the Efficient Emergency Medical Information Delivery Media)

  • 노상균
    • 한국화재소방학회논문지
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    • 제24권1호
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    • pp.64-71
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    • 2010
  • 이 연구를 위해 2009년 1월1일부터 2009년 2월 8일 까지 일개 종합병원에 119구급대로 내원한 모든 환자의 구급활동일지 255부를 조사하였다. 구급활동일지의 전체 기재율 62.1%, 가장 높은 항목은 환자 인수자에 대한 기록으로 100.0%, 가장 낮은 항목은 의사지도에 관한 항목으로 0.4%로 나타나 기대치에 미치지 못한 것으로 조사되었다. 효율적인 응급의료 정보전달매체로서의 119구급활동일지의 기재율을 높이기 위해서는 전문 인력의 확충과 의료진의 적극적인 관심 및 피드백, 구급활동일지의 항목 배열의 규칙성, 기록의 중요성에 대한 지속적인 교육이 필요할 것으로 사료된다.