• 제목/요약/키워드: reflective ratio

검색결과 110건 처리시간 0.034초

건식각을 이용한 $0.18\mu\textrm{m}$ dual polysilicon gate 형성 및 plasma damage 특성 평가 (Study of plasma induced charging damage and febrication of$0.18\mu\textrm{m}$dual polysilicon gate using dry etch)

  • 채수두;유경진;김동석;한석빈;하재희;박진원
    • 한국진공학회지
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    • 제8권4A호
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    • pp.490-495
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    • 1999
  • In 0.18 $\mu \textrm m$ LOGIC device, the etch rate of NMOS polysilicons is different from that of PMOS polysilicons due to the state of polysilicon to manufacture gate line. To control the etch profile, we tested the ratio of $Cl_2$/HBr gas and the total chamber pressure, and also we reduced Back He pressure to get the vertical profile. In the case of manufacturing the gate photoresist line, we used Bottom Anti-Reflective Coating (BARC) to protect refrection of light. As a result we found that $CF_4O_2$ gas is good to etch BARC, because of high selectivity and good photoresist line profile after etching BARC. in the results of the characterization of plasma damage to the antenna effect of gate oxide, NO type thin film(growing gate oxide in 0, ambient followed by an NO anneal) is better than wet type thin film(growing gate oxide in $0_2+H_2$ ambient).

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Photoalignment of Liquid Crystal on Silicon Microdisplay

  • Zhang, Baolong;Li, K. K.;Huang, H. C.;Chigrinov, V.;Kwok, H. S.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.295-298
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    • 2003
  • Reflective mode liquid crystal on silicon (LCoS) microdisplay is the major technology that can produce extremely high-resolution displays. A very large number of pixels can be packed onto the CMOS circuit with integrated drivers that can be projected to any size screen. Large size direct-view thin film transistor (TFT) LCDs becomes very difficult to make and to drive as the information content increases. However, the existing LC alignment technology for the LCoS cell fabrication is still the mechanical rubbing method, which is prone to have minor defects that are not visible normally but can be detrimental if projected to a large screen. In this paper, application of photo-alignment to LCoS fabrication is presented. The alignment is done by three-step exposure process. A MTN $90^{\circ}$ mode is chose as to evaluate the performance of this technique. The comparison with rubbing mode shows the performance of photo-alignment is comparable and even better in some aspect, such as sharper RVC curve and higher contrast ratio.

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저온 양극산화공정을 이용한 반사 방지용 폴리머 마스터 제작 (Polymer master fabrication for antireflection using low-temperature AAO process)

  • 신홍규;권종태;서영호;김병희;박창민;이재숙
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1825-1828
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    • 2008
  • A simple method for the fabrication of porous nano-master for antireflective surface is presented. In conventional fabrication methods for antireflective surface, coating method with low refractive index has usually been used. However, it is required to have high cost and long times for mass production. In this paper, we suggested the fabrication method of antireflective surface by the hot embossing process using the porous nano patterned master on silicon wafer fabricated by low-temperature anodic aluminum oxidation. Through multi-AAO and etching processes, nano patterned master with high aspect ratio was fabricated at the large area. Pore diameter and inter-pore distance are about 150nm and from 150 to 200nm. In order to replicate anti-reflective structure, hot embossing process was performed by varying the processing parameters such as temperature, pressure and embossing time etc. Finally, antireflective surface can be successfully obtained after etching process to remove selectively silicon layer of AAO master.

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실물대모형 및 1/5, 1/10축소모형의 자연채광 성능평가에 관한 비교분석 (Comparative Daylighting Performance Analysis of Offices in 1/10, 1/5 Scale Models and Mock-up Model)

  • 백승헌;김정태
    • KIEAE Journal
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    • 제6권4호
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    • pp.25-32
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    • 2006
  • Mock-up model can be applied to measure accurate performance data but difficult to apply the variables in experiment. There can be a slight experiment errors in Scale model, but various parameters can be applied for a objective experiment. This paper aims to compare the daylighting performance in 1, 1/5, 1/10 scale model of offices and analyze the experiment errors to certificate the influence of model experiment. To analyse daylighting performance, a comparison of a Mock-up model, sized $12.0m(w){\times}7.2m(l){\times}3.7m(h)$, designed for experimentation of daylighting systems and its 1:5, 1:10 scale model. It has an identical configuration of reference room and the test room. For the test room, the lightshelf system was designed as Micro-4 reflective material. To assess work plane illuminance and light factor, photometric sensors of each room were installed at work-plane(6 points) and exterior horizontal illuminance (1 point). And luminance of window, rare of the room was measured under clear sky. It is to be monitored by Agilent data logger, photometric sensor Li-cor and the Radiant Imaging ProMetric 1400. Comparisons with a light factor, increase-decrease ratio and luminance are discussed.

무리수의 개념적 측면을 강조한 교육방안: '통약불가능성'을 통한 무리수 고찰 (Teaching and Learning Irrational Number with Its Conceptual Aspects Stressed : Consideration of Irrational Number through the Conception of 'Incommensurability')

  • 변희현;박선용
    • 대한수학교육학회지:학교수학
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    • 제4권4호
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    • pp.643-655
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    • 2002
  • In this paper we emphasize the introduction of ‘incommensurability’ on the teaching and learning the irrational number because we think of the origin of number as ‘ratio’. According to Greek classification of continuity as a ‘never ending’ divisibility, discrete number and continuous magnitude belong to another classes. That is, those components were dealt with respectively in category of arithmetic and that of geometry. But the comparison between magnitudes in terms of their ratios took the opportunity to relate ratios of magnitudes with numerical ratios. And at last Stevin coped with discrete and continuous quantity at the same time, using his instrumental decimal notation. We pay attention to the fact that Stevin constructed his number conception in reflecting the practice of measurement : He substituted ‘subdivision of units’ for ‘divisibility of quantities’. Number was the result of such a reflective abstraction. In other words, number was invented by regulation of measurement. Therefore, we suggest decimal representation from the point of measurement, considering the foregoing historical development of number. From the perspective that the conception of real number originated from measurement of ‘continuum’ and infinite decimals played a significant role in the ‘representation’ of measurement, decimal expression of real number should be introduced through contexts of measurement instead of being introduced as a result of algorithm.

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투과형 홀로그램과 반사형 홀로그램에서의 Bragg detuning 현상에 대한 연구 (Study for the Bragg Detuning Effects on the Transmission Holograms and the Reflection Holograms)

  • 권윤영;김근율;박주연
    • 정보저장시스템학회논문집
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    • 제2권3호
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    • pp.189-195
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    • 2006
  • Bragg detuning effect if, one of the serious problems if the photopolymer is used for the recording material of holography memories. And the critical reasons of that are known as the bulk refractive index change and shrinkage of recording material. However, the trials for analyzing the effect are mainly on the K-sphere and biased on the transmission hologram. So, we approached Bragg detuning effect numerically and applied the method to the transmission holograms and the reflection holograms all together. We simulated it with MATLAB. As a result, the bulk refractive index change causes+Bragg detuning effect on the transmission holograms and the reflection holograms. But the shrinkage leads to+Bragg detuning effect on the transmission hologram and-Bragg detuning effect on the reflective hologram. Compared to experimental result, the bulk refractive index change(${\fallingdotseq}4{\times}10^{-4}$) and the ratio of shrinkage to the thickness of the material(${\fallingdotseq}1.67{\times}10^{-3}$) could be matched with Bragg detuning effect on the transmission hologram and the reflection hologram.

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폴리머 결합 링 반사기를 이용한 하이브리드 집적 파장 가변 레이저 (Hybrid-integrated Tunable Laser Diode Using Polymer Coupled-ring Reflector)

  • 박준오;이태형;정영철
    • 한국광학회지
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    • 제19권3호
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    • pp.219-223
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    • 2008
  • 광대역 파장 가변 레이저를 구현하기 위하여, 폴리머 결합 링 반사기를 반사형 반도체 광증폭기와 하이브리드 집적하여 광대역 파장 가변 레이저를 구현하였다. 도파로 폭과 높이의 제작 오차로 인하여 방향성 결합기의 결합 비 조합이 설계 값에서 다소 벗어나더라도 단일 피크 조건이 유지되도록 설계함으로써, 제작 수율을 높이도록 하였다. 구현한 파장 가변 레이저는 파장 가변 범위가 35 nm, 부모드 억제 비가 30 dB 이상 보임을 확인하였다.

Food Consumption and Utilization Efficiency in Samia ricini Donovan Reared on Ricinus communis, lin. Leaves Supplemented with Cyanobacteria

  • Sujatha, K.;Jaikishan Singh, R.S.;Sampath, A.;sanjeeva Rao, B.V.
    • International Journal of Industrial Entomology and Biomaterials
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    • 제28권2호
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    • pp.32-38
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    • 2014
  • Food consumption and conversion efficiency of eri silkworm Samia ricini Donovan were studied during $4^{th}$ and $5^{th}$ larval instars by feeding castor leaves fortified with 100, 200, 300, 400 and 500 ppm concentrations of aqueous extracts of cyanobacteria Anabaena variabilis. The nutritional indices viz., ingesta, digesta, approximate digestibility (%), reference ratio and efficiency parameters like ECI and ECD were recorded which were significantly high at 400 ppm concentration treated batches of $4^{th}$ instar larvae over control batches. The decline in nutritional efficiency parameters of $5^{th}$ instar treated larvae might be due to higher utilization of the digested food for metabolic activities. Significant difference of ECI to cocoon % and non-significant difference of ECD to cocoon% and shell were observed between the treatments and control. Cyanabacteria feed supplement contains antibiotic and nutritions factors which has reflective effect on the biological parameters in eri silkworm and therefore has greater application in commercial eri silkworm rearing.

$TiO_2$ 함량에 따른 $P_2O_5-ZnO$계와 $SiO_2-ZnO-B_2O_3$계 유전체의 반사 및 유전특성 (Reflecting and Dielectric Characteristics of $P_2O_5-ZnO\;and\;SiO_2-ZnO-B_2O_3$ Dielectric Systems due to the Contents of $TiO_2$)

  • 류부형;권순석
    • 한국안전학회지
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    • 제20권4호
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    • pp.29-33
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    • 2005
  • In this paper, reflectance and the dielectric characteristics for $P_2O_5-ZnO-BaO$ system and $SiO_2-ZnO-B_2O_3$ system have been investigated as a function of contents of $TiO_2$. The reflectance was decreased with increasing the contents of $TiO_2$ and the reflectance of $P_2O_5-ZnO-BaO$ system was lowered than that of $SiO_2-ZnO-B_2O_3$ system. The dielectric constant of $P_2O_5-ZnO-BaO$ system was higher than $SiO_2-ZnO-B_2O_3$ system, and the dielectric constant in the both system was increased with increasing of $TiO_2$ contents. This can be explained as the space charge effects. These results are could be applied to the under plate dielectrics of PDP required high reflective ratio and breakdown strength.

200kW 탑형 태양열발전시스템의 Heliostat Field 설계 (Design of Heliostat Field for 200kW Tower Type Solar Thermal Power Plant)

  • 박영칠
    • 한국태양에너지학회 논문집
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    • 제32권5호
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    • pp.41-51
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    • 2012
  • Heliostat field is the most important subsystem in the tower type solar thermal power plant since its optical performance affects the total system efficiency most significantly while the construction cost of it is the major part of total construction cost in such a power plant. Thus a well designed heliostat field to maximize the optical efficiency as well as to minimize the land usage is very important. This work presents methodology, procedures and result of heliostat filed design for 200kW solar thermal power plant built recently in Daegu, Korea. A $2{\times}2(m)$ rectangular shaped receiver located at 43(m) high and tilted $28^{\circ}$ toward heliostat field, 450 of heliostats of which the reflective surface is formed by 4 of $1{\times}1(m)$ flat plate mirror facet, and the land area having about $140{\times}120(m)$ size are used to form the heliostat field. A procedure to deploy 450 heliostats in radial staggered nonblocking formation is developed. Also the procedures to compute the cosine effect, intercept ratio, blocking and shading ratio in the field are developed. Finally the heliostat filed is designed by finding the optimal radial distance and azimuthal spacing in radial staggered nonblocking formation such that the designed heliostat field optical efficiency could be maximized. The designed heliostat field has 77% of annual average optical efficiency, which is obtained by annually averaging the optical efficiencies computed between the time of where sun elevation angle becomes $10^{\circ}$ after sunrise and the time of where sun elevation angle becomes $10^{\circ}$ before sunset in each day.