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검색결과 76건 처리시간 0.026초

Phase identification of $C_3N_4$ in CN films prepared by rf plasma chemical vapor deposition and dc magnetron sputtering

  • Fu, Dejun;Wu, Dawei;Zhang, Zhihong;Meng, Xianquan;He, Mengbing;Guo, Huaixi;Peng, Yougui;Fan, Xiangjun
    • 한국진공학회지
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    • 제7권s1호
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    • pp.140-148
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    • 1998
  • We prepared $C_3N_4$ films by rf plasma enhanced chemical vapor deposition(PCVD) and alternating $C_3N_4$/TiN composite films by dc magnetron sputtering. X-ray diffraction (XRD) and transmission electron diffraction (TED) revealed that the structure of the films is amorphous or polycrystalline, depending on deposition conditions and heat treatment. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectroscopy confirmed the presence of $sp_3\; and sp _2$ hybridized C atoms bonded with N atoms in the tetrahedral and hexagonal configurations, respectively. Graphite-free $C_3N_4$ films were obtained by PCVD under optimal conditions. To prepare well crystallized $C_3N_4$ films by magnetron sputtering, we introduced negatively biased gratings in the sputtering system. CN films deposited at grating voltages (Vg) lower than 400V are amorphous. Crystallites of cubic and $\beta$-$C_3N_4$ were formed at increased voltages.

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Microwave Assisted Synthesis of Graphene-Bi2MoO6 Nanocomposite as Sono-Photocatalyst

  • Tang, Jia-Yao;Zhu, Lei;Fan, Jia-Yi;Sun, Chen;Oh, Won-Chun
    • 한국재료학회지
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    • 제32권1호
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    • pp.1-8
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    • 2022
  • In this investigation, Bi2MoO6 deposited graphene nanocomposite (BMG) was synthesized using a simple microwave assisted hydrothermal synthesis method. The synthesized BMG nanocomposite was characterized by X-ray diffraction, transmission electron microscopy, scanning electron microscopy with energy dispersive X-ray analysis, and photocurrent analysis. The study revealed that the catalysts prepared have high crystalline nature, enhanced light responsive property, high catalytic activity, and good stability. XRD results of BMG composite exhibit a koechlinite phase of Bi2MoO6. The surface property is shown by SEM and TEM, which confirmed a homogenous composition in the bulk particles of Bi2MoO6 and nanosheets of graphene. The catalytic behavior was investigated by the decomposition of Rhodamine B as a standard dye. The results exhibit excellent yields of product derivatives at mild conditions under ultrasonic/visible light-medium. Approximately 1.6-times-enhanced sono-photocatalytic activity was observed by introduction of Bi2MoO6 on graphene nanosheet compared with control sample P25 during 50 min test.

Optical properties of amorphous $Si_xC_yN_z$ ternary thin films prepared by plasma enhanced chemical vapor deposition

  • Zhang, Z.H.;Fan, X.J.;Guo, H.X.;Zhang, W.;Zhang, C.Y.;Luo, F.Y.
    • 한국진공학회지
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    • 제7권s1호
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    • pp.190-196
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    • 1998
  • Amorphous ternary $Si_xC_yN-z$ thin films were obtained by plasma enhanced chemical vapor deposition(PECVD) using $N_2, SiH_4 \;and \;C_2H_4$ as the reaction sources. The chemical state were characterized by x-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy(FTIR). The optical properties of the thin films were investigated by UV-visible spectrophotometer and ellipsometer, and the optical band gaps of thin films were determined from corresponding transmittance spectra following Tauc equation.

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GaOOH 선구체의 스핀코팅에 의한 GaN 박막의 성장 (Growth of GaN Thin-Film from Spin Coated GaOOH Precursor)

  • 이재범;김선태
    • 한국재료학회지
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    • 제17권1호
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    • pp.1-5
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    • 2007
  • GaN thin fan were grown by spin coated colloidal GaOOH precursor. Polycrystalline GaNs with crystalline size of $10{\sim}100nm$ were grown on $SiO_2$ substrate. The shape of crystallite above $900^{\circ}C$ had the hexagonal plate and column type. X-ray diffraction patterns for them correspond to those of the hexagonal wurtzite GaN. With increasing droplets. i.e, thickness of deposited layers, XRD intensity increased. PL (photoluminescence) spectrum consisted with an weak near band-edge emission at 3.45 eV and a broad donor-acceptor emission band at 3.32 eV. From the low temperature PL measurement on GaN grown at $800^{\circ}C$ that the shallow donor-acceptor recombination induced emission was more intense than the near band-edge excitonic emission.

Fine YBaCuO Powder Prepared by Sol-gel Method

  • Soh, Deawha;Li, Fenghua;Wang, Jue;Fan, Zhanguo
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.470-473
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    • 2002
  • In order to get proper original suspension for the electrophoresis process of making YBaCuO films, YBaCuO superconductor powder was prepared with the Sol-gel method. The composition of the powder was analyzed by X-ray diffraction, which was identified as YBa$_2$Cu$_3$O$\sub$7-x/(Yl23) phase. The form of YBaCuO single particle was showed to be spherical by scanning electronic microscope and its size was among 0.2-1 $\mu\textrm{m}$. The critical transition temperature (T$\sub$c/) and the critical current density (J$\sub$c/) were measured with the four-probe, method. The T$\sub$c/ was about 91 K, and the J$\sub$c/ was 5-30 A/$\textrm{cm}^2$.

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Structural studies of $Mn^+$ implanted GaN film

  • Shi, Y.;Lin, L.;Jiang, C.Z.;Fan, X.J.
    • 한국진공학회지
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    • 제12권S1호
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    • pp.56-59
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    • 2003
  • Wurtzite GaN films are grown by low-pressure MOCVD on (0001)-plane sapphire substrates. The GaN films have a total thickness of 4 $\mu$m with a surface Mg-doped p-type layer, which has a thickness of 0.5 $\mu$m. 90k eV $Mn^{+}$ ions are implanted into the GaN films at room temperature with doses ranging from $1 \times10^{15}$ to $1 \times 10^{16}\textrm{cm}^{-2}$. After an annealing step at $770^{\circ}C$ in flowing $N_2$, the structural characteristics of the $Mn^{+}$ implanted GaN films are studied by X-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS) and atomic force microscopy (AFM). The structural and morphological changes brought about by $Mn^{+}$ implantation and annealing are characterized.

Analysis of Factors Impacting Atmospheric Pressure Plasma Polishing

  • Zhang, Ju-Fan;Wang, Bo;Dong, Shen
    • International Journal of Precision Engineering and Manufacturing
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    • 제9권2호
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    • pp.39-43
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    • 2008
  • Atmospheric pressure plasma polishing (APPP) is a noncontact precision machining technology that uses low temperature plasma chemical reactions to perform atom-scale material removal. APPP is a complicated process, which is affected by many factors. Through a preliminary theoretical analysis and simulation, we confirmed that some of the key factors are the radio frequency (RF) power, the working distance, and the gas ratio. We studied the influence of the RF power and gas ratio on the removal rate using atomic emission spectroscopy, and determined the removal profiles in actual operation using a commercial form talysurf. The experimental results agreed closely with the theoretical simulations and confirmed the effect of the working distance. Finally, we determined the element compositions of the machined surfaces under different gas ratios using X-ray photoelectron spectroscopy to study the influence of the gas ratio in more detail. We achieved a surface roughness of Ra 0.6 nm on silicon wafers with a peak removal rate of approximately 32 $mm^{3}$/min.

Cone beam형 전산화단층영상의 원리 (Basic principle of cone beam computed tomography)

  • 최용석;김규태;황의환
    • Imaging Science in Dentistry
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    • 제36권3호
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    • pp.123-129
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    • 2006
  • The use of computed tomography for dental procedures has increased recently. Cone beam computed tomography (CBCT) systems have been designed for imaging hard tissues of the dentomaxillofacial region. CBCT is capable of providing high resolution in images of high diagnostic quality. This technology allows for 3-dimensional representation of the dentomaxillofacial skeleton with minimal distortion, but at lower equipment cost, simpler image acquisition and lower patient dose. Because this technology produces images with isotropic sub-millimeter spatial resolution, it is ideally suited for dedicated dentomaxillofacial imaging. In this paper, we provide a brief overview of cone beam scanning technology and compare it with the fan beam scanning used in conventional CT and the basic principles of currently available CBCT systems.

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Zone-melting of EPD $YBa_2Cu_3O_x$ Thick Film under Low Oxygen Partial Pressure

  • 소대화
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.263-266
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    • 2003
  • The fine $YBa_2Cu_3O_x$ powder ($0.2{\sim}1.0\;{\mu}m$) is produced by sol-gel method, and electrophoresis deposition is used for the preparation of $YBa_2Cu_3O_x$ thick films which are deposited on Ag wire. The oriented $YBa_2Cu_3O_x$ was tried to be prepared by the zone-melting method under low oxygen partial pressure. The orientation and the phase composition were examined by the X-ray diffraction and the superconductivities were measured by 4 line method. The critical current densities are still quite low, which may be due to unsuitable technical parameters for zone-melting of $YBa_2Cu_3O_x$ thick films. Therefore the heat treatment condition and controlling of low oxygen partial pressure should be improved in the future experiment.

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2019 Novel Coronavirus (COVID-19) Pneumonia: Serial Computed Tomography Findings

  • Jiangping Wei;Huaxiang Xu;Jingliang Xiong;Qinglin Shen;Bing Fan;Chenglong Ye;Wentao Dong;Fangfang Hu
    • Korean Journal of Radiology
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    • 제21권4호
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    • pp.501-504
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    • 2020
  • From December 2019, Coronavirus disease 2019 (COVID-19) pneumonia (formerly known as the 2019 novel Coronavirus [2019-nCoV]) broke out in Wuhan, China. In this study, we present serial CT findings in a 40-year-old female patient with COVID-19 pneumonia who presented with the symptoms of fever, chest tightness, and fatigue. She was diagnosed with COVID-19 infection confirmed by real-time reverse-transcriptase-polymerase chain reaction. CT showed rapidly progressing peripheral consolidations and ground-glass opacities in both lungs. After treatment, the lesions were shown to be almost absorbed leaving the fibrous lesions.