• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.140-148
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• 1998

We prepared $C_3N_4$ films by rf plasma enhanced chemical vapor deposition(PCVD) and alternating $C_3N_4$/TiN composite films by dc magnetron sputtering. X-ray diffraction (XRD) and transmission electron diffraction (TED) revealed that the structure of the films is amorphous or polycrystalline, depending on deposition conditions and heat treatment. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectroscopy confirmed the presence of $sp_3\; and sp _2$ hybridized C atoms bonded with N atoms in the tetrahedral and hexagonal configurations, respectively. Graphite-free $C_3N_4$ films were obtained by PCVD under optimal conditions. To prepare well crystallized $C_3N_4$ films by magnetron sputtering, we introduced negatively biased gratings in the sputtering system. CN films deposited at grating voltages (Vg) lower than 400V are amorphous. Crystallites of cubic and $\beta$-$C_3N_4$ were formed at increased voltages.

• Korean Journal of Materials Research
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• v.32 no.1
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• pp.1-8
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• 2022

In this investigation, Bi₂MoO₆ deposited graphene nanocomposite (BMG) was synthesized using a simple microwave assisted hydrothermal synthesis method. The synthesized BMG nanocomposite was characterized by X-ray diffraction, transmission electron microscopy, scanning electron microscopy with energy dispersive X-ray analysis, and photocurrent analysis. The study revealed that the catalysts prepared have high crystalline nature, enhanced light responsive property, high catalytic activity, and good stability. XRD results of BMG composite exhibit a koechlinite phase of Bi₂MoO₆. The surface property is shown by SEM and TEM, which confirmed a homogenous composition in the bulk particles of Bi₂MoO₆ and nanosheets of graphene. The catalytic behavior was investigated by the decomposition of Rhodamine B as a standard dye. The results exhibit excellent yields of product derivatives at mild conditions under ultrasonic/visible light-medium. Approximately 1.6-times-enhanced sono-photocatalytic activity was observed by introduction of Bi₂MoO₆ on graphene nanosheet compared with control sample P25 during 50 min test.

• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.190-196
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• 1998

Amorphous ternary $Si_xC_yN-z$ thin films were obtained by plasma enhanced chemical vapor deposition(PECVD) using $N_2, SiH_4 \;and \;C_2H_4$ as the reaction sources. The chemical state were characterized by x-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy(FTIR). The optical properties of the thin films were investigated by UV-visible spectrophotometer and ellipsometer, and the optical band gaps of thin films were determined from corresponding transmittance spectra following Tauc equation.

• Korean Journal of Materials Research
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• v.17 no.1
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• pp.1-5
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• 2007

GaN thin fan were grown by spin coated colloidal GaOOH precursor. Polycrystalline GaNs with crystalline size of $10{\sim}100nm$ were grown on $SiO_2$ substrate. The shape of crystallite above $900^{\circ}C$ had the hexagonal plate and column type. X-ray diffraction patterns for them correspond to those of the hexagonal wurtzite GaN. With increasing droplets. i.e, thickness of deposited layers, XRD intensity increased. PL (photoluminescence) spectrum consisted with an weak near band-edge emission at 3.45 eV and a broad donor-acceptor emission band at 3.32 eV. From the low temperature PL measurement on GaN grown at $800^{\circ}C$ that the shallow donor-acceptor recombination induced emission was more intense than the near band-edge excitonic emission.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.470-473
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• 2002

In order to get proper original suspension for the electrophoresis process of making YBaCuO films, YBaCuO superconductor powder was prepared with the Sol-gel method. The composition of the powder was analyzed by X-ray diffraction, which was identified as YBa$_2$Cu$_3$O$\sub$7-x/(Yl23) phase. The form of YBaCuO single particle was showed to be spherical by scanning electronic microscope and its size was among 0.2-1 $\mu\textrm{m}$. The critical transition temperature (T$\sub$c/) and the critical current density (J$\sub$c/) were measured with the four-probe, method. The T$\sub$c/ was about 91 K, and the J$\sub$c/ was 5-30 A/$\textrm{cm}^2$.

• Journal of the Korean Vacuum Society
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• v.12 no.S1
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• pp.56-59
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• 2003

Wurtzite GaN films are grown by low-pressure MOCVD on (0001)-plane sapphire substrates. The GaN films have a total thickness of 4 $\mu$m with a surface Mg-doped p-type layer, which has a thickness of 0.5 $\mu$m. 90k eV $Mn^{+}$ ions are implanted into the GaN films at room temperature with doses ranging from $1 \times10^{15}$ to $1 \times 10^{16}\textrm{cm}^{-2}$. After an annealing step at $770^{\circ}C$ in flowing $N_2$, the structural characteristics of the $Mn^{+}$ implanted GaN films are studied by X-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS) and atomic force microscopy (AFM). The structural and morphological changes brought about by $Mn^{+}$ implantation and annealing are characterized.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.39-43
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• 2008

Atmospheric pressure plasma polishing (APPP) is a noncontact precision machining technology that uses low temperature plasma chemical reactions to perform atom-scale material removal. APPP is a complicated process, which is affected by many factors. Through a preliminary theoretical analysis and simulation, we confirmed that some of the key factors are the radio frequency (RF) power, the working distance, and the gas ratio. We studied the influence of the RF power and gas ratio on the removal rate using atomic emission spectroscopy, and determined the removal profiles in actual operation using a commercial form talysurf. The experimental results agreed closely with the theoretical simulations and confirmed the effect of the working distance. Finally, we determined the element compositions of the machined surfaces under different gas ratios using X-ray photoelectron spectroscopy to study the influence of the gas ratio in more detail. We achieved a surface roughness of Ra 0.6 nm on silicon wafers with a peak removal rate of approximately 32 $mm^{3}$/min.

• Imaging Science in Dentistry
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• v.36 no.3
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• pp.123-129
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• 2006

The use of computed tomography for dental procedures has increased recently. Cone beam computed tomography (CBCT) systems have been designed for imaging hard tissues of the dentomaxillofacial region. CBCT is capable of providing high resolution in images of high diagnostic quality. This technology allows for 3-dimensional representation of the dentomaxillofacial skeleton with minimal distortion, but at lower equipment cost, simpler image acquisition and lower patient dose. Because this technology produces images with isotropic sub-millimeter spatial resolution, it is ideally suited for dedicated dentomaxillofacial imaging. In this paper, we provide a brief overview of cone beam scanning technology and compare it with the fan beam scanning used in conventional CT and the basic principles of currently available CBCT systems.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.263-266
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• 2003

The fine $YBa_2Cu_3O_x$ powder ($0.2{\sim}1.0\;{\mu}m$) is produced by sol-gel method, and electrophoresis deposition is used for the preparation of $YBa_2Cu_3O_x$ thick films which are deposited on Ag wire. The oriented $YBa_2Cu_3O_x$ was tried to be prepared by the zone-melting method under low oxygen partial pressure. The orientation and the phase composition were examined by the X-ray diffraction and the superconductivities were measured by 4 line method. The critical current densities are still quite low, which may be due to unsuitable technical parameters for zone-melting of $YBa_2Cu_3O_x$ thick films. Therefore the heat treatment condition and controlling of low oxygen partial pressure should be improved in the future experiment.

• Korean Journal of Optics and Photonics
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• v.10 no.1
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• pp.10-14
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• 1999

One dimensional inhomogeneous phase modulation effects on the MTF of optical system was investigated. The lens under test was a doublet made in Korea. It was 36 mm effective diameter, 128.04 mm effective focal length. The ray-fans and spot diagrams were calculated and presented on the picture for on-axis and off-axis (field of view, $1^{\circ}$ and $2^{\circ}$). Phase modulation was carried out by positioning a phase modulator close contacted with the lens under test. One was linear type that had linearly increasing phase retardation and the other was stepped type which had phase difference $\pi$ for each step. The MTFs were measured on the Gaussian image plane and were compared with one another. The MTFs of linear type phase modulated apertures had a little lower values than the MTF of unmodulated aperture for on-axis but most of all the MTFs of one dimensional phase modulated aperture are improved than the MTF of unmodulated aperture.