• 제어로봇시스템학회논문지
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• 제15권12호
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• pp.1240-1245
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• 2009

The throughput characteristics of the cluster tool with dual blade robot are analyzed. Using equipment's cycle time chart of the equipment, simple analytic form of the throughput is derived. Then, several important throughput characteristics are analyzed by the throughput formula. First, utilization of the process chamber and the robot are maximized by assigning the equipment to the process whose processing time is near the critical process time. Second, rule for selecting optimal number of process chambers is suggested. It is desirable to select a single process chamber plus a single robot structure for relatively short time process and multi process chambers plus a single robot, namely cluster tool for relatively long time process. Third, throughput variation between equipments due to the wafer transfer time variation is analyzed, especially for the process whose processing time is less than critical process time. And the throughput and the wafer transfer time of the equipments in our fabrication line are measured and compared to the analysis.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2008년도 춘계학술대회 논문집
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• pp.417-422
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• 2008

The DC high speed circuit breaker used in Seoul Metro for line no.1.2 is Japan HITACHI and FUJI breaker, and for line no.3.4 is Whipp & Bourne MM74 breaker from UK. The years that each breakers made are 1973(line no.1), 1984(line no.3.4), So that equipments are superannuated. Nowday the for equipment exchanging is executing, equipment for exchanging were used the Secheron breaker from Swiss. but now the Intec breaker made in Korea is used. The RTU of supervisory control and data acquisition system have the capabilities that can observe, control and work the installation efficiently. In this paper, as summarizing the solving process of problem that happened the SCADA system when old-equipment exchange and concerned point for logical supervision and control of reservation factors and equipment, I'll provide the direction that can do receiving-process of control-equipment, progressed with the exchange of old-electronic equipment.

• Korean Chemical Engineering Research
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• 제59권3호
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• pp.467-479
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• 2021

Abstract: A kinetic model was developed for the dehydration of ethanol to ethylene based on two parallel reaction pathways. Kinetic parameters were estimated by fitting experimental data of powder catalysts in a lab-scale test, and the effectiveness factor was determined using data from pellet-type catalysts in bench-scale experiments. The developed model was used to design a multitubular fixed-bed reactor (MTR) and an adiabatic reactor (AR) at a 10 ton per day scale. The two different reactor types resulted in different process configurations: the MTR consumed the ethanol completely and did not produce the reaction intermediate, diethyl ether (DEE), resulting in simple separation trains at the expense of high equipment cost for the reactor, whereas the AR required azeotropic distillation and cryogenic distillation to recycle the unreacted ethanol and to separate the undesired DEE, respectively. Quantitative analysis based on the equipment and annual energy costs showed that, despite high equipment cost of the reactor, the MTR process had the advantages of high productivity and simple separation trains, whereas the use of additional separation trains in the AR process increased both the total equipment cost and the annual energy cost per unit production rate.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.2059-2063
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• 2004

Most power plants have operated many independent computerize systems for maintenance. Independence of systems have caused complexity of business process and inconvenience of computer system management. Because the equipment and material master data is not standardize and structurize, it is difficult to manage equipment maintenance history and material delivery. Especially equipment classification criterion is important for standardization of every maintenance information. It is necessary to integrate function of independent systems for business process simplification and rapid work flow. this paper provides equipment classification criterion design and system integration method with the case of live system development.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2007년도 The 1st International Symposium on Advanced Magnetic Materials
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• pp.71.1-71.1
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• 2007

• 한국산업융합학회 논문집
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• 제22권6호
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• pp.797-805
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• 2019

An important problem of offshore plant process piping is equipment accidents due to the removal of fine metal debris and foreign substances in the pipes that deliver fluids such as hydraulic oil, lubricating oil and thermal oil. Temporary flushing equipment to remove debris uses fluid equipment of centrifugal pump and gear pump to prevent equipment accident of offshore platform. The equipment manufacturer requires the shipyard to have a cleanliness rating inside the pipe to meet the international standards ISO4406 and NAS1638 quality levels to prevent damage to the equipment sold. The quality of the internal flushing of pipes conforms to the regulations suggested by the equipment manufacturer. In this paper, three types of electric heater capacity, which is a method of evaporating and removing water inside a pipe during an oil flushing process, were compared. In addition, the study was conducted to remove the flushing oil in the pipe and to improve oil quality.

• 한국초전도ㆍ저온공학회논문지
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• 제3권1호
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• pp.69-73
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• 2001

For developing the cryogenic air separation unit, it requires some technology such as basic process design. equipment design and manufacturing based on the cryogenic physical properties and separation theory. In this study, we developed a process and equipment for producing high purity nitrogen which has the production capacity of 1600N㎥/h under 1 ppm $O_2$ and $H_2O$. Also we found that the number of theoretical plate(NTP) of distillation column was 44 and maximum nitrogen recovery ration of this process was 42% from the process simulation. The performance test was also carried out for the nitrogen recovery ratio and equipment efficiency. The results showed that the optimum nitrogen recovery was 41% and the maximum equipment efficiency was attained.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2390-2392
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• 1998

In this paper, we discuss the development of monitoring system with data process equipment which transfers data from Remote Terminal Unit(RTU) to monitoring computer. The RTUs sense temperature, pressure and PLC(Programmable Logic Controller) nodes conditions of scrubber in semiconductor manufacture processing. The data Process equipment is connected every RTU and a monitoring computer through serial communication. This equipment receives informations from RTU, process data, and transfers them to monitoring computer. To avoid congestion in data communication, task scheduling algorithm used RT O/S(Real-Time Operating System) is embedded in ROM which is a part of data Process equipment.

• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.16-21
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• 2020

How accurately reproducible energy is delivered to the wafer in the process of making thin films using PE-CVD (Plasma enhanced chemical vapor deposition) during the semiconductor process. This is the most important technique, and most of the reaction on the wafer surface is made by thermal energy. In this study, we studied the method of monitoring the change of thermal energy transferred to the wafer surface by monitoring the temperature change according to the change of the thin film formed on the showerhead facing the wafer. Through this research, we could confirm the monitoring of wafer thin-film which is changed due to abnormal operation and accumulation of equipment, and we can expect improvement of semiconductor quality and yield through process reproducibility and equipment status by real-time monitoring of problem of deposition process equipment performance.

• Korea-Australia Rheology Journal
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• 제21권4호
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• pp.289-297
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• 2009

We numerically analyzed flow characteristics of the polymer melt in the screw equipment using a proper modeling and investigated design parameters which have influence on the mixing performance as the capability of the screw equipment. We considered the non-Newtonian and non-isothermal flow in a single rotor equipment to investigate the mixing performance with respect to screw dimensions as shape parameter of the single rotor equipment and screw speed as process parameter. We used Bird-Carreau-Yasuda model as a viscous model of the polymer melt and the particle tracking method to investigate the mixing performance in the screw equipment and considered four mixing performance indexes: residence time distribution, deformation rate, total strain and particle standard deviation as a new mixing performance index. We compared these indexes to determine design parameters and object function. On basis of the analysis results, we carried out the optimal design by using the response surface method and design of experiments. In conclusion, the differences of results between the optimal value and numerical analysis are about 5.0%.