• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.1
• /
• pp.129-137
• /
• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• 한국HCI학회:학술대회논문집
• /
• 2007.02a
• /
• pp.494-499
• /
• 2007

실제 영상과 가상의 오브젝트 또는 가상의 환경에 오브젝트를 합성하는 경우 등 사실적인 합성을 결과를 얻기 위해서는 실제 환경과 같은 배경 영상의 정확한 광원 정보가 필요하다. 본 논문에서는 실내 환경을 배경으로 영상을 합성 하는 과정에 필요한 광원정보를 카메라와 Light Probe를 이용하여 촬영된 단일 영상으로부터 추정하는 기법을 제안한다. 실내에 존재하는 광원들은 정확한 위치정보를 알 수 없는 실외환경에서와 달리 제한된 공간의 원점으로부터 3차원 공간에 위치한 좌표로 나타낼 수 있다. 광원을 추정하기 위해 먼저 실내 공간에 반사도가 높은 Light Probe를 위치하고 디지털 카메라의 적정 노출을 이용하여 광원 추정에 사용할 영상을 획득한다. 광원으로 존재하는 오브젝트의 경우 짧은 노출시간에도 카메라의 영상에 획득된다. 그렇기 때문에 단일 영상에서 광원의 영역을 추정하기 위해 영상처리를 통해 노출 시간을 짧게 하여 촬영한 영상과 비슷하게 밝은 영역만 표현되도록 처리를 한다. 전 처리된 영상으로부터 밝은 영역과 어두운 영역으로 구분을 하고 밝은 영역으로부터 광원의 정보를 추정한다. 추정된 광원들은 실제 렌더링에 곧바로 적용이 가능하며, 이를 통해 배경에 적합한 렌더링 결과를 얻을 수 있다.

• Journal of Industrial Technology
• /
• v.25 no.A
• /
• pp.87-93
• /
• 2005

Three-dimensional ultrasonic probes being applied to the medical imaging can be grouped into three depending on the scanning methods, which are a mechanical type system, a free-hand system, and 2D phased arrays system. A mechanical type scanner uses a mechanically driven transducer to acquire series of 2D plane images. By integrating these images, a 3-D medical image can be constructed. A motor driving mechanism is a conventional choice for mechanically driving a transducer assembly which picks the raw ultrasonic images up. In this paper we attempt to design a 3D ultrasonic probe which has a operating mechanism of s tilting 3-D scanning. The motion of a transducer assembly of the ultrasonic probe is analytically modelled. We propose a selection procedure for the diameter of a wire rope driving the transducer assembly and the size of torsional spring which gives an initial tension to wire ropes.

• Proceedings of the KSME Conference
• /
• 2008.11b
• /
• pp.2670-2675
• /
• 2008

We introduce a new type of surface microscope using hydrodynamic phenomena. The fluid flow through the opening of the pipette probe is blocked at short distances between the probe and the surface, thus increasing the pressure loss. Therefore, a scanning flow impedance microscope (SFIM) can image the surface topology by scanning the probe with measuring the pressure loss. The SFIM can display the topology regardless of surface hardness, surface electrical conductivity, and surrounding fluid. The present letter contains the first experimental results on surface topography obtained with this novel microscope. The preliminary results in air demonstrate the lateral resolution of the SFIM is very close to the inner diameter of the probe.

• Journal of the Korean Society for Precision Engineering
• /
• v.12 no.4
• /
• pp.119-126
• /
• 1995

This paper presents a non-contact measuring system using one point measuring method to measure surface profiles of dies and clay models for practical use in the field of production engineering. The system has a laser beam probe similar to a measuring probe in a contact measuring system and CCD linear sensor used to detect 300mm measurement range, displacement of measured surfaces, from an origin. There is no mechanical interference between this measuring system and a measured surface in this system. In this measuring system, it was needed 500-600ms including data processing time to measure one point. The experiments showed that the standard deviation was 800 .mu.m and the reproducibility was also 100-210 .mu. m.

• Journal of radiological science and technology
• /
• v.37 no.2
• /
• pp.117-124
• /
• 2014

This study has investigated the effects of the defects in the probe elements influence Doppler images in the medical ultrasonic scanners. This work was implemented that the quality of Doppler images depended on the extent and location of the probe element defected. The probe performance was rated in terms of the number of piezoelectric elements lost and this was studied in the experiment by electrical disconnection to the elements. The results showed that Doppler velocity became rapidly reduced as the defected elements encountered with the element group activated at the Doppler mode, not as the flow velocity. The effect of the probe defect is decreased when the defects occurred at the element group activated for Doppler mode, as was increased the number of the elements. It was observed that the higher the flow velocity of Doppler flow phantom is, the wider the spectrum of Doppler is. And the Doppler velocity soared up and the dispersion of image brightness is increased when the defected elements got out of the elements activated at Doppler mode. The result showed that TADVP(time-average-Doppler-velocity-profile) is decreased with the increase of the probe element defect, especilly in the region of high frequency. It is expected that the research of various defects of probe elements are needed, and this study can be practical tools for probe based ultrasonic QA in the future.

• KIPS Transactions on Software and Data Engineering
• /
• v.3 no.5
• /
• pp.187-194
• /
• 2014

Prostate cancer is a malignant tumor occurring in the prostate. Recently, the repetition rate is increasing. Image inspection method which we can check the prostate structure the most correctly is MRI(Magnetic Resonance Imaging), but it is hard to apply it to all the patients because of the cost. So, they use mostly TRUS(Transrectal Ultrasound) images acquired from prostate ultrasound inspection and which are cheap and easy to inspect the prostate in the process of treating and diagnosing the prostate cancer. Traditionally, in the hospital the doctors saw the TRUS images by their eyes and manually segmented the boundary between the prostate and nonprostate. But the manually segmenting process not only needed too much time but also had different boundaries according to the doctor. To cope the problems, some automatic segmentations of the prostate have been studied to generate the constant segmentation results and get the belief from patients. In this study, we propose an average shape model to segment the prostate boundary in TRUS prostate image. The method has 3 steps. First, it finds the probe using edge distribution. Next, it finds two straight lines connected with the probe. Finally it puts the shape model to the image using the position of the probe and straight lines.

• Journal of Ocean Engineering and Technology
• /
• v.26 no.3
• /
• pp.61-65
• /
• 2012

Air-water flow measurements are of importance for the coastal and ocean engineering fields. Although kinematic investigations of the multi-phase flows have been conducted for long time, velocity measurements still are concerned with many researchers and engineers in coastal and ocean areas. In the present study, an imaging technique using shadowgraphy and fiber optic probe for velocity measurements of air bubbles is introduced. The shadow graphy image technique is modified from the typical image velocimetry methods, and optical fibers are used for the well-known intrusive coupled phase-detection probe system. Since the imaging technique is a non-intrusive optical method from the air, it is usually applied for 2D flows. On the other hand, the double fiber optic probes touch flows regardless of flow patterns. The results of the flow measurements by both methods are compared and discussed. The methods are also applied to the measurements of overtopping flows by a breaking wave over the structure fixed on the free surface.

• Current Optics and Photonics
• /
• v.7 no.3
• /
• pp.283-296
• /
• 2023

An intraoral spectral domain optical coherence tomography (SD-OCT) system has been developed, using a custom-built hand-held scanner and spectrometer. The hand-held OCT probe, based on a microelectromechanical systems scanner and a self-built miniaturized drive circuit, had a field of view sufficient for dental diagnosis. The spectrometer using a fabricated f-theta lens provided the image depth required for dental diagnosis. The axial and transverse resolutions of the OCT system in air were 7.5 ㎛ and 12 ㎛ respectively. The hand-held probe could scan an area of 10 × 10 mm², and the spectrometer could image along a depth of 2.5 mm. To verify the utility of the developed OCT system, OCT images of tooth hard and soft tissues were acquired, and a user-interface program for diagnosis was developed. Early caries and microcracks that were difficult to diagnose with existing methods could be found, and the state of restoration could be observed. Measuring the depth of the gingival sulcus, distinguishing subgingival calculus, and detecting an implant under the gingiva suggested the possibility of the SD-OCT system as a diagnostic for dental soft tissues. Through the presented OCT images, the capability of the developed SD-OCT system for dental diagnosis was demonstrated.

• 제어로봇시스템학회:학술대회논문집
• /
• 2001.10a
• /
• pp.53.4-53
• /
• 2001

This paper described about the system which can be inspect work roll surface for deciding a milling schedule and roll changing at hot strip mill in POSCO. Developed system consists of CCD camera, Xenon lamp with fiber bundle and mechanical control part. The water probe build up water pole between head of probe and roll surface to acquisite a good image from a work roll surface under the bad environment with steam, cooling water and high temperature. This system is possible to monitor a work roll surface of about 12${\times}$9mm. We have shown the validation of the developed system which can monitor the evolution of degradation on work roll surface.