• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.280-287
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• 2002

We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.769-773
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• 2001

Linear hydrostatic bearings have high stiffness, high damping and excellent guided motion straightness, and thus they are suitable for high precision machine tools. This paper describes the procedure for design and test of a high precision stamping press with vertical hydrostatic bearings. For a hydrostatic bearing set designed and manufactured, measurements were made for the straightness, repeatability and stiffness. They are found to be 1.36$\mu\textrm{m}$/100mm, 0.19$\mu\textrm{m}$/100mm and 1, 261N/$\mu\textrm{m}$ respectively. Based upon the experiences with the hydrostatic bearing, an improved design of the precision press is proposed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.137-140
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• 2003

Recently, as the demand of small-sized precision parts is rising in precision industry such as mobile, automobile, optic. etc. the requirement of small-sized machine tool is increasing. Desktop machine tool define small-sized machine tool that is able to install in table. According to diminishing in size, Desktop machine tool is able to economize production cost by reducing work area and consuming electric power. But Desktop machine tool generates vibration in acceleration and deceleration modes by inertia force of moving part. Also vibration is generated when it move simultaneously two axis or three axis. Such generating vibration situation is reason of declining stiffness of machine tool structure because of smallizing in size. And this vibration has a large effect on precision of machining products. Therefore, evaluating of the control characteristic is necessary for minimizing vibration of machine tool as much as possible to accomplish precision machining of small-sized parts

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.646-650
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• 1996

In this paper, A hydrostatic bearing spindle for high precision machining and a motor built-in spindle for high speed machining are developed toobtain the high precision machining accuracy of the prototype lathe. The sliding bearing with fluoric resin (turcite) pad is adopted for improving the damping charateristics of guide ways. The funning accuracy of moving elements isestimated to confirm the validity of application on the prototype; the high precision CNC lathe. The surface roughness of Cupper and Aluminum machined by the hydrostatic spindle are 0.07 .mu. m and 0.10 .mu. mRmax. The surface roughness of Aluminium machined by the built-in spindle are 0.10 .mu. mRmax. From this results, it is venified that the prototype lathe is effective to high precision maching.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.106-113
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• 2009

A 6-DOF precision stage was developed based on parallel kinematics structure with flexure hinges to eliminate backlash, stick-slip and friction and to minimize parasitic motion coupled with motions in the other-axis directions. For the stage, lever linkage mechanism was devised to reduce the height of system for the enhancement of horizontal stiffness. Frequency response comparison between experimental results and mathematical model extracted from dynamics of the stage was performed to identify the system parameters such as spring constants and damping coefficients of actuation modules, which cannot be calculated accurately by analytic methods owing to their complicated structures. This newly developed precision stage and its identified model will be very useful for precision positioning and control because of its high accuracy and non-coupled movement.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.4
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• pp.79-86
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• 2002

As consumer electronics, information, and aero-space industry grow, the demand for aspheric lens increases higher. To enhance the precision and productivity of aspheric surface, a CAM system for ultra-precision aspheric surface needs to be realized. In this study, the developed CAM system can generate NC code fur various aspheric surfaces fast and precisely by a new bi-arc interpolation method that the location of maximum error is fixed at an efficient point. The newly developed bi-arc meets the given tolerance more precisely, performs faster calculation. The cutting condition input module and the NC code verification module are adequate to ultra-precision machining, so that a operator can obtain products fast and easily.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.34-39
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• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.534-537
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• 1996

As consumer electronics, information, and aero-space industry grow, the demand for aspheric lens increases higher. To enhance the precision and productivity of aspheric surface, a CAM system for ultra-precision aspheric surface needs to be realized. In this study, the developed CAM system can generate NC code for various aspheric surfaces fast and precisely by Tri-arc interpolation method that the location of maximum error is fixed. The cutting condition input module and the NC code verification module are adequate to ultra-precision machining, so that a operator can obtain products fast and easily.

• Journal of the Korean Society for Aviation and Aeronautics
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• v.21 no.1
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• pp.8-14
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• 2013

As GNSS(Global Navigation Satellite System) is used in various filed, many countries establish GNSS system independently. But GNSS system has the limitation of accuracy and stability in stand-alone mode, because this system has error elements which are ionospheric delay, tropospheric delay, orbit ephemeris error, satellite clock error, and etc. For overcome of accuracy limitation, the DGPS(Differential GPS) and RTK(Real-Time Kinematic) systems are proposed. These systems perform relative positioning using the reference and user receivers. ETRI(Electronics and Telecommunications Research Institute) is developing precision navigation system in point of extension of GNSS usage. The precision navigation system is for providing the precision navigation solution to common users. If this technology is developed, GNSS system can be used in the fields which require precision positioning and control. In this paper, we introduce the precision navigation system and perform design and algorithm verification.