• International Journal of Control, Automation, and Systems
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• v.4 no.1
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• pp.1-9
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• 2006

This paper presents the modeling and multivariable feedback control of a novel high-precision multi-dimensional positioning stage. This integrated 6-degree-of-freedom. (DOF) motion stage is levitated by three aerostatic bearings and actuated by 3 three-phase synchronous permanent-magnet planar motors (SPMPMs). It can generate all 6-DOF motions with only a single moving part. With the DQ decomposition theory, this positioning stage is modeled as a multi-input multi-output (MIMO) electromechanical system with six inputs (currents) and six outputs (displacements). To achieve high-precision positioning capability, discrete-time integrator-augmented linear-quadratic-regulator (LQR) and reduced-order linearquadratic-Gaussian (LQG) control methodologies are applied. Digital multivariable controllers are designed and implemented on the positioning system, and experimental results are also presented in this paper to demonstrate the stage's dynamic performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.378-391
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• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.3
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• pp.62-68
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• 2002

To satisfy the requirement of the one axis linear positioning system, which is following control of the desired trajectory without following error and is the high positioning accuracy, feed-forward loop having cogging force model is proposed. In the one axis linear positioning system with linear PM motor, cogging force acting as disturbance is modeled analytically. Analytic model of cogging force is verified by result measured from positioning system constructed with linear PM motor. Measured result is very similar with proposed analytic model. Cogging force model is used as feet forward loop in control scheme of linear positioning system. Cogging force feed-forward'loop is obtained from analytic model of cogging farce. Trajectory following error is reduced from 300nm to 100nm by applying the proposed cogging farce feed-forward loop. By using analytic model of cogging force, the control scheme is simplified. Also this analytic model is applicable to calculation of characteristic value of positioning system in design process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.117-118
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.377-378
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.177-178
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• 2012

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.20-25
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• 2000

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.121-122
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.314-317
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• 2005

As demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. The ultra precision stage wasn't yet applied in the optical alignment and the optical element alignment was taken too many times. In this paper, the optical element alignment of ultra precision positioning stage was studied. The alignment algorithm is comprised of field search and peak search algorithms. The procedure of the alignment algorithms applied to the ultra precision positioning stage are developed by LabView programming.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.4
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• pp.3-9
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• 2007

Existing long range piezoelectric motors with friction based transmission mechanisms are limited by the axial load capacity. To overcome this problem, a new linear piezoelectric motor using one piezoelectric actuator combined with a novel stepping mechanism is reported in this paper. To obtain both long range and fine accuracy, dual positioning control strategy consisting of coarse positioning and fine positioning is used. Coarse positioning is used for long travel range by accumulating motion steps obtained by piezoelectric actuator. This is followed by fine positioning where required accuracy is obtained by fine motion displacement of piezoelectric actuator. This prototype is able to provide resolution of 20 nanometers and withstand a maximum axial load of 300N. At maximum load condition, the positioner can move forward to a travel distance of 5mm at a maximum speed of 0.4 mm/sec. This design of nanopositioner can be used in applications for ultra precision positioning and grinding operations where high axial force capacity is required.