• Title/Summary/Keyword: pores structure

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Development of CMP Pad with Micro Structure on the Surface (마이크로 표면 구조물을 갖는 CMP 패드 제작 기술 개발)

  • 최재영;정성일;박기현;정해도;박재홍;키노시타마사하루
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.5
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    • pp.32-37
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    • 2004
  • Polishing processes are widely used in the glass, optical, die and semiconductor industries. Chemical Mechanical Polishing (CMP) especially is becoming one of the most important ULSI processes for the 0.25m generation and beyond. CMP is conventionally carried out using abrasive slurry and a polishing pad. But the surface of the pad has irregular pores, so there is non-uniformity of slurry flow and of contact area between wafer and the pad, and glazing occurs on the surface of the pad. This paper introduces the basic concept and fabrication technique of the next generation CMP pad using micro-molding method to obtain uniform protrusions and pores on the pad surface.

Size-dependent magneto-electro-elastic vibration analysis of FG saturated porous annular/ circular micro sandwich plates embedded with nano-composite face sheets subjected to multi-physical pre loads

  • Amir, Saeed;Arshid, Ehsan;Arani, Mohammad Reza Ghorbanpour
    • Smart Structures and Systems
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    • v.23 no.5
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    • pp.429-447
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    • 2019
  • The present study analyzed free vibration of the three-layered micro annular/circular plate which its core and face sheets are made of saturated porous materials and FG-CNTRCs, respectively. The structure is subjected to magneto-electric fields and magneto-electro-mechanical pre loads. Mechanical properties of the porous core and also FG-CNTRC face sheets are varied through the thickness direction. Using dynamic Hamilton's principle, the motion equations based on MCS and FSD theories are derived and solved via GDQ as an efficient numerical method. Effect of different parameters such as pores distributions, porosity coefficient, pores compressibility, CNTs distribution, elastic foundation, multi-physical pre loads, small scale parameter and aspect ratio of the plate are investigated. The findings of this study can be useful for designing smart structures such as sensor and actuator.

Design LixV2O5 Cathode Structure for Effective Lithium Ion Intercalation (리튬 이차전지 양극재 LixV2O5의 효율적인 방전을 위한 구조 설계)

  • Park, Jun Kyu;Kim, Soo Il;Kim, Dongchoul
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.38 no.7
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    • pp.589-594
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    • 2014
  • Recently, higher capacity and energy density of lithium ion batteries are increasingly demanded for enhancing their performance in view of the rise in the commercial distribution of electric and hybrid vehicles. Computational analysis of a porous structure of vanadium pentoxide cathode was performed, employing a phase field model. The incipient model was designed as a spherical structure with cylindrical-shaped pores. Modifying the diameters and lengths of the pore cylinder and the number of pores, we considered different conditions for the porous vanadium pentoxide cathodes for analyzing their effect on the amount of lithium ion intercalated to them. Subsequently, we optimized the porous structure to contain the largest amount of intercalated lithium ion during discharge.

Effect of Tert-Butyl Alcohol Template on the Pore Structure of Porous Tungsten in Freeze Drying Process (동결건조 공정에서 Tert-butyl alcohol 기공형성제가 텅스텐 다공체의 기공구조에 미치는 영향)

  • Lee, Eui Seon;Heo, Youn Ji;Ko, Yun Taek;Park, Jin Gyeong;Cho, Yong-Ho;Oh, Sung-Tag
    • Journal of Powder Materials
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    • v.28 no.3
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    • pp.216-220
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    • 2021
  • The effect of tert-butyl alcohol (TBA) as a freezing solvent on the pore structure of a porous tungsten body prepared by freeze-drying is analyzed. TBA slurries with a WO3 content of 10 vol% are prepared by mixing with a small amount of dispersant and binder at 30℃. The slurries are frozen at -25℃, and pores are formed in the frozen specimens by the sublimation of TBA during drying in air. After hydrogen reduction at 800℃ and sintering at 1000℃, the green body of WO3 is completely converted to porous W with various pore structures. Directional pores from the center of the specimen to the outside are observed in the sintered bodies because of the columnar growth of TBA. A decrease in pore directionality and porosity is observed in the specimens prepared by long-duration drying and sintering. The change in pore structure is explained by the growth of the freezing solvent and densification.

Characteristics of pore structure of steam activated carbon with carbonization temperature (수증기 활성화법으로 제조된 활성탄의 탄화온도에 따른 세공구조 고찰)

  • 이송우;나영수;김도한;최동훈;류동춘;송승구
    • Journal of Environmental Science International
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    • v.9 no.4
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    • pp.345-349
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    • 2000
  • Activated carbons were prepared from Korean coal by steam activation in this study. The variation of pore structure of the activated carbons were investigated according to different carbonization temperatures. Yield, surface area, pore volume and pore structure of this activated carbon were compared with those of activated carbon prepared without carbonization. The investigated carbonization temperature ranged from 700${\circ}C$ to 1,000${\circ}C$. Carbonization was carried out in nitrogen atmosphere for 70 minutes and activation was performed by steam at 950${\circ}C$ for 210 minutes. Surface area and pore volume of the resulting activated carbons increased with carbonization temperature. Also pore volume increased by 20% compared to the activated carbon without carbonization. Especially, in mesopore region, the activated carbon carbonized at 900${\circ}C$ had more pores by 60% than that of activated carbon carbonized at other temperature.

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Formation Mechanisms of TiO2 Layer by Electrochemical Method (전기화학적 방법에 의한 TiO2 피막의 생성기구)

  • O, Han-Jun;Lee, Jong-Ho;Jang, Jae-Myeong;Ji, Chung-Su
    • Korean Journal of Materials Research
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    • v.12 no.6
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    • pp.482-487
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    • 2002
  • A $TiO_2$ film for photocatalyst was prepared by anodic oxidation at 180V in acidic electrolyte and film formation mechanism was studied. The major part of anodic $TiO_2$ film consisted of anatase type structure and surface morphology exhibited a porous cell structure. The thickness growth rate of the oxide film with anodization time revealed two-stage slope corresponds to the surface morphology between anodic films. The growth of pores on cell structure and the growth rate of film with two-stage slope are related to the constant formation rate of the $TiO_2$ layer.

A Helix-induced Oligomeric Transition of Gaegurin 4, an Antimicrobial Peptide Isolated from a Korean Frog

  • Eun, Su-Yong;Jang, Hae-Kyung;Han, Seong-Kyu;Ryu, Pan-Dong;Lee, Byeong-Jae;Han, Kyou-Hoon;Kim, Soon-Jong
    • Molecules and Cells
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    • v.21 no.2
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    • pp.229-236
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    • 2006
  • Gaegurin 4 (GGN4), a novel peptide isolated from the skin of a Korean frog, Rana rugosa, has broad spectrum antimicrobial activity. A number of amphipathic peptides closely related to GGN4 undergo a coil to helix transition with concomitant oligomerization in lipid membranes or membrane-mimicking environments. Despite intensive study of their secondary structures, the oligomeric states of the peptides before and after the transition are not well understood. To clarify the structural basis of its antibiotic action, we used analytical ultracentrifugation to define the aggregation state of GGN4 in water, ethyl alcohol, and 1,1,1,3,3,3-hexafluoro-2-propanol (HFIP). The maximum size of GGN4 in 15% HFIP corresponded to a decamer, whereas it was monomeric in buffer. The oligomeric transition is accompanied by a cooperative 9 nm blue-shift of maximum fluorescence emission and a large secondary structure change from an almost random coil to an ${\alpha}$-helical structure. GGN4 induces pores in lipid membranes and, using electrophysiological methods, we estimated the diameter of the pores to be exceed $7.3{\AA}$, which suggests that the minimal oligomer structure responsible is a pentamer.

Development of Ceramic Media for Yeast Immobilization (효모 고정화용 세라믹 담체의 개발)

  • 이율락;박상재
    • KSBB Journal
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    • v.15 no.3
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    • pp.285-292
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    • 2000
  • Support media for yeast immobilization was prepared from a porous volcanic rock used as a moisturizer in orchid growing. The rock was broken to the size of 2-3 mm and burned at $600^{\circ}C$ in a furnace in order to remove organic materials blocking the pores or treated with HCI solution or NaOH solution to remove the inorganic dirts by dissolving. Even through both the acid and the akali solution were effective the latter was not recommendable because it broke the pore structure by dissolving the elements of the media. This media was mainly consisted of SiO2 with $Al_2O_3$ as a minor component and CaO and K2O as trace elements. It had the finely developed pores of $15-80\mu\textrm{m}$size. Yeast immobilization capacity of this media was about $5{\times108}$ cells/ml bed which is large enough to be used for the practical applications. Yeast immobilization capacities of Alumina and Cordierite were much smaller than that of silica-based media. Scanning electron micrograph of Cordierite and Alumina showed uneven surfaces and small size of pores in contrast to relatively smooth surface and large pores of silica based media which means that smooth surface and large pores are desirable for the good adsorption of microbes on the media.

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The Effect of Pore Structure of Zeolites on their Product Distribution and Deactivation in the Catalytic Cracking of n-Octane (n-옥탄의 촉매 분해반응에서 제올라이트의 세공구조가 생성물 분포와 활성저하에 미치는 영향)

  • Min, Byung Goo;Lee, Jae Youl;Song, Yo Soon;Seo, Gon
    • Korean Chemical Engineering Research
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    • v.45 no.6
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    • pp.547-553
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    • 2007
  • The catalytic cracking of n-octane over FER, MFI, MOR and BEA zeolites was studied by the protolytic cracking mechanism in order to understand the effect of pore structure of zeolites on their product composition and deactivation. The selectivities for $C_3$ and $C_3{^=}$ were high over the zeolites with medium pores due to additional cracking, while those for $C_4$ and $C_4{^=}$, the initial products, were high over the zeolites with large pores. MFI zeolite showed slow deactivation due to small carbon deposit, while FER zeolite with small pores deactivated rapidly with severe carbon deposit. The deactivation of BEA zeolite was slow even with a large amount of carbon deposit, but MOR zeolite showed a rapid deactivation even with a small amount of carbon deposit. The conversion measured along with the time on stream on these zeolite catalysts was simulated by a mechanism based on the simplified reaction path of n-octane cracking and the deactivation related to the pore blockage by carbon deposit.

The Study of Pore Structure in Shale Gas Reservoir Using Large-area Particle Measurement Method (대면적 입자 측정 분석법을 이용한 셰일 가스 저류층 내공극 구조 연구)

  • Park, Sun Young;Ko, Yong-kyu;Choi, Jiyoung;Lee, Junhee
    • Korean Journal of Mineralogy and Petrology
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    • v.34 no.4
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    • pp.209-218
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    • 2021
  • Studies of pore structure in shale gas reservoirs are essential to increase recovery rates, which is in the spotlight concerning unconventional resources. In this study, the distribution of pores in shale gas reservoir sample were observed using Scanning Electron Microscope Particle Analysis (SELPA), which is appropriate to analyze the distribution of particle or shape for sample in large area. A sample from the A-068 borehole drilled in the Liard Basin was analyzed; calcite is the main mineral. The pore size ranges from tens of nanometers to hundreds of micrometers and the contribution of each pore size to overall sample porosity was determined using SELPA. The distribution of pores was determined by observing the surface in the same area at magnifications of ×1000, ×3000 and ×5000. Pores less than 100 nm were observed at high magnifications and confirm that small-scale pore distribution can be analyzed and identified rapidly using SELPA. The method introduced in this study will be useful to understand pore structures in unconventional reservoirs.