• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.829-830
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• 2012

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 제14회 정기총회 및 03년 동계학술발표회
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• pp.278-279
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• 2003

최근 정보, 전자, 광, 반도체 등 각종 첨단산업에서는 다양한 형태와 재료의 가공방법이 요구되고 있으며 요구되는 부품의 정밀도도 마이크로 단위에서 서브 마이크로 단위까지의 고도의 정밀도를 요하는 기술들이 점차 늘어가고 있다. 또 더욱 더 소형화 되어가고 있는 마이크로 부품은 기존의 2차원 및 준 3차원에서 완전한 3차원 형태의 기술로 발달하고 있으며 현재 연구가 활발히 진행되고 있는 MEMS 분야에서 구동부 부품이라든가 또는 그를 지지하는 구조체로 쓰일 수 있어 그 활용 가치는 응용에 따라 폭이 넓다고 할 수 있다. (중략)

• 센서학회지
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• 제14권2호
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• pp.69-77
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• 2005

The electronic nose (e-nose) has been used in food industry and quality controls in plastic packaging. Recently it finds its applications in medical diagnosis, specifically on detection of diabetes, pulmonary or gastrointestinal problem, or infections by examining odors in the breath or tissues with its odor characterizing ability. Moreover, the use of portable e-nose enables the on-site measurements and analysis of vapors without extra gas-sampling units. This is expected to widen the application of the e-nose in various fields including point-of-care-test or e-health. In this study, a PDA-based portable e-nose was developed using micro-machined gas sensor array and miniaturized electronic interfaces. The rich capacities of the PDA in its computing power and various interfaces are expected to provide the rapid and application specific development of the diagnostic devices, and easy connection to other facilities through information technology (IT) infra. For performance verification of the developed portable e-nose system, Six different vapors were measured using the system. Seven different carbon-black polymer composites were used for the sensor array. The results showed the reproducibility of the measured data and the distinguishable patterns between the vapor species. Additionally, the application of two typical pattern recognition algorithms verified the possibility of the automatic vapor recognition from the portable measurements. These validated the portable e-nose based on PDA developed in this study.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.755-758
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• 2000

Rapid prototyping is one of the most important technology for 21th century industry. To overcome the limitation of the material and function, Functional Prototype Development(FPD) concept is newly proposed. Wide function is necessary such as mechanical, optical, chemical and electrical property in order to solve broad requirements of the industry. The process of FPD has more than two conventional processes based on fusion technology and the FPD system is integrated with the interdisciplinary, interfacing and intelligent concepts. This paper shows some representative achievements such as optic coloring prototypes, electric multi layer printed circuit broad(MLB) and MEMS using electrostrictive polymer. Finally, we confirmed that FPD has a great possibility which can be applied in broad industry and will be a powerful tool in near future.

• 정보저장시스템학회논문집
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• 제1권2호
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• pp.192-196
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• 2005

In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by E-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. The nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. In nano-injection molding process, since the solidified layer, generated during the polymer filling, deteriorates transcribability of nano patterns by preventing the polymer melt from filling the nano cavities, an injection-mold system was constructed to actively control the stamper surface temperature using MEMS heater and sensors. The replicated polymeric patterns using nano-injection molding process were as small as 50 nm in diameter, 150 nm in pitch, and 50 nm in depth. The replicated polymeric patterns can be applied to high density patterned media.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2005년도 춘계학술발표대회 개요집
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• pp.43-45
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• 2005

A precise bonding technique, transmission laser bonding using energy transfer, for polymer micro devices is presented. The irradiated IR laser beam passes through the transparent part and absorbed on the opaque part. The absorbed energy is converted to heat and bonding takes place. In order to optimize the bonding quality, the temperature profile on the interface must be obtained. Using optical measurements of the both plates, the absorbed energy can be calculated and heat transfer model was applied for obtaining the transient temperature profile. The transmission laser bonding has a potential in the local precise bonding in MEMS or Lab-on-a-chip.

• 폴리머
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• 제27권6호
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• pp.555-561
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• 2003

미세전자기계 시스템에 사용되는 실리콘 기판의 표면 특성 조절을 위하여 옥타데실트리클로로실란 (OTS)을 실리콘에 자기조립 단분자층 (SAMs)으로 형성시켜, 코팅 조건 및 코팅 용액 조성에 따른 표면특성 변화를 살펴보았다. OTS와의 솔-젤 반응을 위하여 실리콘 표면을 sulfuric peroxide mixture (SPM) 용액으로 처리한 결과, 실리콘 표면에 -OH기가 형성되어 친수성이 증가됨을 알 수 있었으며 상온에서 황산의 비가 85%인 SPM 용액에서 솔-젤 반응을 위한 최적의 산화막이 형성됨을 알 수 있었다. SPM 처리에 의하여 발현된 실리콘 표면의 -OH기는 솔-젤 반응에 의하여 OTS의 -CI와 반응하여 Si-O 화학결합을 형성하며 이에 따라 표면은 소수성으로 변화됨을 확인할 수 있었다 이 때 코팅 온도 및 시간 그리고 용액의 조성은 솔-젤 반응에 영향을 미쳐 SAMs표면의 소수성을 조절하는 인자로 작용하였다.

• ETRI Journal
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• 제29권5호
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• pp.667-669
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• 2007

This letter presents a smart integrated microfluidic device which can be applied to actively immobilize proteins on demand. The active component in the device is a temperature-controllable microelectrode array with a smart polymer film, poly(N-isopropylacrylamide) (PNIPAAm) which can be thermally switched between hydrophilic and hydrophobic states. It is integrated into a micro hot diaphragm having an integrated micro heater and temperature sensors on a 2-micrometer-thick silicon oxide/silicon nitride/silicon oxide (O/N/O) template. Only 36 mW is required to heat the large template area of 2 mm${\times}$16 mm to $40^{\circ}C$ within 1 second. To relay the stimulus-response activity to the microelectrode surface, the interface is modified with a smart polymer. For a model biomolecular affinity test, an anti-6-(2, 4-dinitrophenyl) aminohexanoic acid (DNP) antibody protein immobilization on the microelectrodes is demonstrated by fluorescence patterns.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권7호
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• pp.298-304
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• 2003

IPMC(Ionic Polymer-Metal Composite) is a highly sensitive actuator that shows a large deformation in presence of low applied voltage. Generally, IPMC can be fabricated by electroless plating of platinum on both sides of a Nafion (perfluorosulfonic acid) film. When a commercial Nafion film is used as a base structure of the IPMC membrane, the micro-pump structure and the IPMC membrane are fabricated separately and then later assembled, which makes the fabrication inefficient. Therefore, fabrication of an IPMC membrane and the micro-pump structure on a single wafer without the need of assembly have been developed. The silicon wafer was partially etched to hold liquid Nafion to be casted and a 60-${\mu}{\textrm}{m}$ thick IPMC membrane was realized. IPMC membranes with various size were fabricated by casting and they showed 4-2${\mu}{\textrm}{m}$ displacements from $4mm{\times}4mm$ , $6mm{\times}6mm$, $8mm{\times}8mm$ membranes at the applied voltage ranging from 2Vp-p to 5Vp-p at 0.5Hz. The displacement of the fabricated IPMC membranes is fairly proportional to the membrane area and the applied voltage.

• 센서학회지
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• 제12권4호
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• pp.156-163
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• 2003

일반적인 표면 마이크로머시닝 공정과 고분자의 중합공정을 결합하여 전도성 고분자인 폴리피롤 액추에이터를 제작하였다. 폴리피롤 액추에이터의 제작 공정을 검증하기 위한 가장 기본적인 구조물은 폴리피롤 캔틸레버이며 이를 이용하여 세포 조작에 응용 가능한 폴리피롤 그리퍼 및 밸브의 기본 구조물들을 제작하였다. 그리퍼는 손가락과 유사한 형태로 뼈에 해당하는 단단한 고분자와 근육에 해당하는 폴리피롤 등으로 구성된다. 밸브는 폴리피롤 캔틸레버에 유로가 결합된 형태로 제작되었다. 제안한 폴리피롤 액추에이터의 제작 공정 및 기본 구조물들은 세포 조작기구와 같은 바이오 관련 응용에 이용될 수 있을 것이다.