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http://dx.doi.org/10.5369/JSST.2003.12.4.156

Fabrication of Microstructures for Conductive Polymer Actuators Using MEMS Process  

Lee, Seung-Ki (School of Electrical, Electronics and Computer Engineering, Dankook Univ.)
Jung, Seng-Hwan (School of Electrical, Electronics and Computer Engineering, Dankook Univ.)
Publication Information
Journal of Sensor Science and Technology / v.12, no.4, 2003 , pp. 156-163 More about this Journal
Abstract
Polypyrrole microactuators have been fabricated by the standard surface micromachining method combined with the electropolymerization of polypyrrole. The fundamental structure to verify the feasibility of the fabrication process is polypyrrole cantilever. Based on these process, polypyrrole grippers and valves for the manipulation of the cell have been fabricated. Grippers have the structure of bone and muscle which are rigid polymers and polypyrrole, respectively. Valves have the assembled structure of channels with polypyrrole cantilevers. The proposed fabrication process and structures are expected to be used for bio-related applications, for example, the cell manipulation.
Keywords
Polypyrrole; Manipulation;
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