The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Fabrication of a Membrane Type Micro=Actuator Using IPMC(Ionic Polymer-Metal Composite) for Micro-Pump Application

마이크로 펌프 응용을 위한 이온성 고분자-금속 복합체를 이용한 멤브레인형 마이크로 액추에이터 제작에 관한 연구

  • Published : 2003.07.01
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Abstract

IPMC(Ionic Polymer-Metal Composite) is a highly sensitive actuator that shows a large deformation in presence of low applied voltage. Generally, IPMC can be fabricated by electroless plating of platinum on both sides of a Nafion (perfluorosulfonic acid) film. When a commercial Nafion film is used as a base structure of the IPMC membrane, the micro-pump structure and the IPMC membrane are fabricated separately and then later assembled, which makes the fabrication inefficient. Therefore, fabrication of an IPMC membrane and the micro-pump structure on a single wafer without the need of assembly have been developed. The silicon wafer was partially etched to hold liquid Nafion to be casted and a 60-${\mu}{\textrm}{m}$ thick IPMC membrane was realized. IPMC membranes with various size were fabricated by casting and they showed 4-2${\mu}{\textrm}{m}$ displacements from $4mm{\times}4mm$ , $6mm{\times}6mm$, $8mm{\times}8mm$ membranes at the applied voltage ranging from 2Vp-p to 5Vp-p at 0.5Hz. The displacement of the fabricated IPMC membranes is fairly proportional to the membrane area and the applied voltage.

Keywords

References

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