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A Study on the Fabrication of a Membrane Type Micro=Actuator Using IPMC(Ionic Polymer-Metal Composite) for Micro-Pump Application  

조성환 (고려대 전기공학과)
이승기 (단국대 전기전자컴퓨터공학부)
김병규 (한국과학기술연구원)
박정호 (고려대 전기공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.52, no.7, 2003 , pp. 298-304 More about this Journal
Abstract
IPMC(Ionic Polymer-Metal Composite) is a highly sensitive actuator that shows a large deformation in presence of low applied voltage. Generally, IPMC can be fabricated by electroless plating of platinum on both sides of a Nafion (perfluorosulfonic acid) film. When a commercial Nafion film is used as a base structure of the IPMC membrane, the micro-pump structure and the IPMC membrane are fabricated separately and then later assembled, which makes the fabrication inefficient. Therefore, fabrication of an IPMC membrane and the micro-pump structure on a single wafer without the need of assembly have been developed. The silicon wafer was partially etched to hold liquid Nafion to be casted and a 60-${\mu}{\textrm}{m}$ thick IPMC membrane was realized. IPMC membranes with various size were fabricated by casting and they showed 4-2${\mu}{\textrm}{m}$ displacements from $4mm{\times}4mm$ , $6mm{\times}6mm$, $8mm{\times}8mm$ membranes at the applied voltage ranging from 2Vp-p to 5Vp-p at 0.5Hz. The displacement of the fabricated IPMC membranes is fairly proportional to the membrane area and the applied voltage.
Keywords
IPMC(Ionic Polymer Metal Composite); MEMS; Membrane; Casting; Micro-pump; Actuator; Nafion;
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Times Cited By KSCI : 2  (Citation Analysis)
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1 차승은, 박정호, 이승기, '백금의 무전해 도금에 의한 이온성 고분자-금속 복합물 액추에이터의 제작 공정 및 특성 측정', 대한전기학회논문지, 제51권, 9호, pp.455-463, 2002. 9
2 S. Tadoko et al., 'Development of a distributed actuation device consisting of soft gel actuator elements' , Proceedings of the 1998 IEEE International Conference on Robotics and Automation, pp. 2155-2160, May 1998   DOI
3 Y. Bar-Cohen, 'Electroactive polymers as artificial muscles - capabilities, potentials and challenges' , Handbook on Biomimetics, Section 11, Chap. 8, pp. 1- 13, 2000
4 R. Kanno, S. Tadokoro, T. Takamori and K. Oguro, '3-dimensional dynamic model of ionic conducting polymer gel film(ICPF) actuator', Proceedings of IEEE International Conference on Systems, Man and Cybernetics, pp. 2179-2184, 1996   DOI
5 S. Guo, T. Fukuda, T. Nakamura, F. Arai, K. Oguro and M. Negoro, 'Micro active guide wire catheter system -characteristic evaluation, electrical model and operability evaluation of micro active catheter -', Proceedings of the 1996 IEEE International Conference on Robotics and Automation, pp. 2226-2231, April 1996   DOI
6 M. Shainpoor and K wang J Kim, 'Novel ionic polymeric hydraulic actuators', Proceedings of SPIE, Vol. 4329, pp. 164-173, 2001   DOI
7 A. Keshavarzi, M. Shahinpoor, Kwang J. Kim and J. Lantz, 'Blood pessure, pulse rate, and rhythm measurement using ionic polymer-metal composites sensors', Proceedings of SPIE, Vol. 3669, pp. 369-376, 1999   DOI
8 S. Guo, S. Hata, K Sugumoto, T. Fukuda, K. Oguro 'Development of a new type of capsule micropump', Proceedings of the 1999 IEEE International Conference on Robotics & Automation, Detroit, Michigan, pp. 2171-2176, May 1999   DOI
9 Y. Bar-Cohen et al., 'A CAE approach in application of Nafion-Pt composite(ICPF) actuators -analysis for surface wipers of NASA MUSES-CN nanorovers' , Proceedings of SPIE, Vol. 3987, pp. 262-272, 2000   DOI
10 Y. Bar-Cohen, T. Xue, M. Shainpoor, J. Simpson. and J. Smith, 'Flexible, low-mass robotic arm actuated by electroactive polymers and operated equivalently to human arm and hand', Robotics 98: The 3rd Conference and Exposition/Demonstration on Robotics for Challenging Environments Sponsored by American Society of Civil Engineers, April 1998   DOI
11 S. Nemat-Nasser and J. Y. Li, 'Electromechanical response of ionic polymer-metal composites', Journal of Applied Physics, vol. 87, pp. 3321-3331, 2000   DOI   ScienceOn
12 M. Shahinpoor and Kwang J. Kim, 'Design, development and testing of a multi -fingered heart compression! assist device equipped with IPMC artificial muscles', Proceedings of SPIE, Vol. 4329, pp. 411-420, 2001   DOI
13 이승기, 김병목, 김병규, 박정호, '캐스팅 방법에 의해 제작한 이온성 고분자-금속 복합체 액추에이터의 기계적 특성 분석', 대한전기학회논문지, 제52권, 3호, pp. 144-151, 2003. 3   과학기술학회마을