• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.5
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• pp.262-267
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• 2002

In this paper, we first studied the factors affecting the motor current (MC) signal, which was strongly affected by the systematic hardware noises depending on polishing such as pad conditioning and arm oscillation of platen and recipe, head motor. Next, we studied the end point detection (EPD) for the chemical mechanical polishing (CMP) process of shallow trench isolation (STI) with reverse moat structure. The MC signal showed a high amplitude peak in the fore part caused by the reverse meal. pattern. We also found that the EP could not be detected properly and reproducibly due to the pad conditioning effect, especially when conventional low selectivity slurry was used. Even when there was no pad conditioning effect, the EPD method could not be applied, since the measured end points were always the same due to the characteristics of the reverse moat structure with an open nitride layer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.78-81
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• 2003

Polishing Processes are widely used in the glass, optical, die and semiconductor industry and are conventionally carried out using abrasive slurry and a polishing pad. But abrasive slurry process has a weak point that is high cost of handling of used slurry and hard controllability of slurry. Recently, some researches have attempted to solve these problems and one method is the development of a fixed abrasive pad. FAP has a couple of advantages including clean environment, lower CoC, easy controllability and higher form accuracy. But FAP also has a weak point that is need of dressing because of glazing and loading. The paper introduces the basic concept and fabrication technique of FAP using hydrophilic polymers with swelling characteristics in water and explains the self-conditioning phenomenon. Experimental results demonstrate to achieve nano surface roughness of soda lime glass for optical application

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.03a
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• pp.59-64
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• 1998

We need to achieve th mass product through methods of higher efficient, higher precise manufacturing process than those of existing precision abrasive machining. Thus, this study is to develop mirror-like surface machining technique of outer diameter of the piston pin by the compound magneto-electrolytic abrasive polishing system. The procedure of machining is followed as first, fulfill the pre-processing by cylindrical grinder, second, complete mirror-like surface by the method of magneto-electrolytic abrasive polishing used CBN non-woven abrasive pads. In this study, it was found that the best suitable conditions of mirror-like surface polishing were that the electrode density was 0.1A/$\textrm{cm}^2$, the applied pressure 1.5kgf/$\textrm{cm}^2$, the feed rate 0.5mm/rev, and the rotoation velocity of workpiece 80rpm, and that the surface roughness was reduced in this conditions.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.313-318
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• 2005

The present study deals design and manufacture of automatic polishing machine that can cut diamond to have 58 facets in a brilliant cutting which has been hardly achieved by a conventional manually operating polishing machine. Upon the 3-dimensional Sarin M/C test and analysis on the diamond processed by the automatic polishing machine developed in this study its proportion and finishing turned out to be better than the diamond processed by the conventional method, by being rated as 'very good'.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.12 no.5
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• pp.59-66
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• 2003

This study suggests the new ultraprecision finishing techniques for micro die and mold parts using magnetic field-assisted polishing. Conventional magnetic abrasives have several disadvantages, which are missing of abrasive particle and inequal mixture between magnetic particle and abrasive particle. Therefore, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Carbonyl iron powder is used as magnetic particle there silicon carbide and alumina are abrasive particles. Developed magnetic abrasives are analyzed using SEM. Feasibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 85.4 ㎚ Ra to 9 ㎚ RA.

• Journal of Mechanical Science and Technology
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• v.15 no.5
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• pp.580-591
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• 2001

This paper proposes a fuzzy-sliding mode control which is designed by a self tuning fuzzy inference method based on a genetic algorithm. Using the method, the number of inference rules and the shape of the membership functions of the proposed fuzzy-sliding mode control are optimized without the aid of an expert in robotics. The fuzzy outputs of the consequent part are updated by the gradient descent method. It is further guaranteed that the selected solution becomes the global optimal solution by optimizing Akaikes information criterion expressing the quality of the inference rules. In order to evaluate the learning performance of the proposed fuzzy-sliding mode control based on a genetic algorithm, a trajectory tracking simulation of the polishing robot is carried out. Simulation results show that the optimal fuzzy inference rules are automatically selected by the genetic algorithm and the trajectory control result is similar to the result of the fuzzy-sliding mode control which is selected through trial error by an expert. Therefore, a designer who does not have expert knowledge of robot systems can design the fuzzy-sliding mode controller using the proposed self tuning fuzzy inference method based on the genetic algorithm.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.3
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• pp.128-132
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• 2004

The perovskite ferroelectric materials of the PZT, SBT and BST series will attract much attention for application to ULSI devices. Among these materials, the BST ($Ba_0.6$$Sr_0.4$/$TiO_3$) is widely considered the most promising for use as an insulator in the capacitors of DRAMS beyond 1 Gbit and high density FRAMS. Especially, BST thin films have a good thermal-chemical stability, insulating effect and variety of Phases. However, BST thin films have problems of the aging effect and mismatch between the BST thin film and electrode. Also, due to the high defect density and surface roughness at grain boundarys and in the grains, which degrades the device performances. In order to overcome these weakness, we first applied the chemical mechanical polishing (CMP) process to the polishing of ferroelectric film in order to obtain a good planarity of electrode/ferroelectric film interface. BST ferroelectric film was fabricated by the sol-gel method. And then, we compared the surface characteristics before and after CMP process of BST films. We expect that our results will be useful promise of global planarization for FRAM application in the near future.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.247-251
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• 2004

Chemical-Mechanical Polishing(CMP) especially is becoming one of the most important ULSI processes for the 0.25m generation and beyond. And there are many elements affecting CMP performance such as slurry, pad, process parameters and pad conditioning. Among these elements the CMP pad is considered one of the most important because of its change. But the surface of the pad has irregular pores, so there is non-uniformity of slurry flow and of contact area between wafer and the pad, and glazing occurs on the surface of the pad. So we make CMP pad with micro structure using micro molding method. This paper introduces the basic concept and fabrication technique of CMP pad with micro-structure and the characteristic of polishing. Experimental results demonstrate the removal rate, uniformity, and time vs. removal rate.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1997.10a
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• pp.190-195
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• 1997

The requirement of precision products about difficult-to-cut materials such as Cu and Aluminum alloy is becoming more and more. Because of soft materials, the exist narrow groves on surface are difficult to gotten off even on the polishing stage. It has been proved that Magnetic-Electrolytic-Abrasive Polishing (MEAP) is a efficient method to resolve this problem by using the nonwoven-abrasive pads together [1, 2]. In this study, through the experiments, their machining properties of newly developer polishing material of SiC, Al2O3 and diamond nonwoven abrasive pads have been proved. Through the experiments, the optimal machining conditions on larger cylinder shape workpiece of Cu and Aluminium alloy have been found, through the Taguchi[3] method the optimal machining conditions can be selected.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.5
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• pp.23-29
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• 2008

Magnetic abrasive polishing is one of the nontraditional machining technologies newly developed. But it was very difficult to cut non-magnetic materials using MAP process because the process was fundamentally possible by help of a magnetic farce. In this study, we aimed to verify analytically formation of the magnetic field in a case of the nonmagnetic materials especially focused on an aluminum alloy. And also an improving strategy of the magnetic force for the non-magnetic materials was proposed and experimentally verified. Design of experimental method was adopt for assessment of parameters' effect on the MAP results of the aluminum alloy.