Effects of Post Annealing on the Properties of ZnO:Al Films Deposited by RF-Sputtering (RF-Sputtering 법을 이용한 ZnO:Al 박막의 후 열처리에 따른 특성 변화)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.21 no.9
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- pp.789-794
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- 2008