Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.07a
- /
- Pages.1367-1368
- /
- 2007
Preparation of Zinc Oxide thin film introducing Ag layer
Ag 층을 도입한 ZnO 박막의 제작
- Kim, Sang-Mo (Kyungwon University) ;
-
Rim, You-Seung
(Kyungwon University)
;
- Keum, Min-Jong (Center for Advanced Plasma Surface Technology) ;
- Son, In-Hwan (Shinsung College) ;
- Jang, Kyung-Wook (Kyungwon University) ;
- Choi, Hyung-Wook (Kyungwon University) ;
- Kim, Kyung-Hwan (Kyungwon University)
- 김상모 (경원대학교 전기공학과) ;
-
임유승
(경원대학교 전기공학과)
;
- 금민종 (플라즈마 응용 표면기술 연구센터) ;
- 손인환 (신성대학) ;
- 장경욱 (경원대학교 전기공학과) ;
- 최형욱 (경원대학교 전기공학과) ;
- 김경환 (경원대학교 전기공학과)
- Published : 2007.07.18
Abstract
We prepared Zinc Oxide thin films introducing Ag layer on glass substrates at room temperature by using facing targets sputtering (FTS) method. In order to obtain good electrical properties, Ag layer was introduced. Ag with various thickness of thin films were used as intermediate layers. The electrical, optical and crystallographic properties of thin films were investigated by Four-Point probe, UV/VIS spectrometer and XRD. From the results, we could confirm that the thickness of Ag layer changes the electrical and optical performances of the multilayers.
Keywords