• Transactions on Electrical and Electronic Materials
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• v.9 no.1
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• pp.1-5
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• 2008

ZnS is an attractive material for future optical and electrical devices since it has a direct and wide band gap to provide blue emission at room temperature. In this study, inductively coupled $BCl_3/Ar$ plasma was used to etch ZnS:Mn thin films. The maximum etch rate of 164.2 nm/min for ZnS:Mn was obtained at a $BCl_3(20)/Ar(80)$ gas mixing ratio, an rf power of 700 W, a dc bias voltage of -200V, a total gas flow of 20 sccm, and a chamber pressure of 1Pa. The etch behaviors of ZnS:Mn thin films under various plasma parameters showed that the ZnS:Mn were effectively removed by the chemically assisted physical etching mechanism. The surface reaction of the ZnS:Mn thin films was investigated by X-ray photoelectron spectroscopy. The XPS analysis revealed that Mn had detected on the surface ZnS:Mn etched in $BCl_3/Ar$ plasma.

• Journal of the Korean Ceramic Society
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• v.53 no.6
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• pp.700-706
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• 2016

Etch rate, surface roughness and microstructure as plasma resistance were evaluated for six kinds of oxide glass with different compositions. Borosilicate glass (BS) was found to be etched at the highest etch rate and zinc aluminum phosphate glass (ZAP) showed a relatively lower etch rate than borosilicate. On the other hand, the etching rate of calcium aluminosilicate glass (CAS) was measured to be similar to that of sintered alumina while yttrium aluminosilicate glass (YAS) showed the lowest etch rate. Such different etch rates by mixture plasma as a function of glass compositions was dependent on whether or not fluoride compounds were formed on glass and sublimated in high vacuum. Especially, in view that $CaF_2$ and $YF_3$ with high sublimation points were formed on the surface of CAS and YAS glasses, both CAS and YAS glasses were considered to be a good candidate for protective coating materials on the damaged polycrystalline ceramics parts in semi-conductor and display processes.

• Korean Journal of Materials Research
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• v.19 no.5
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• pp.281-287
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• 2009

ZnO thin film was grown on a sapphire single crystal substrate by plasma assisted molecular beam epitaxy. In addition to near band edge (NBE) emissions, both blue and green luminescences are also observed together. The PL intensity of the blue luminescence (BL) range from 2.7 to 2.9 eV increased as the amount of activated oxygen increased, but green luminescence (GL) was weakly observed at about 2.4 eV without much change in intensity. This result is quite unlike previous studies in which BL and GL were regarded as the transition between shallow donor levels such as oxygen vacancy and interstitial zinc. Based on the transition level and formation energy of the ZnO intrinsic defects predicted through the first principle calculation, which employs density functional approximation (DFA) revised by local density approximation (LDA) and the LDA+U approach, the green and blue luminescence are nearly coincident with the transition from the conduction band to zinc vacancies of $V^{2-}_{Zn}$ and $V^-_{Zn}$, respectively.

• Elastomers and Composites
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• v.35 no.1
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• pp.63-70
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• 2000

Zinc plated steel tire cords were subjected to RF plasma etching of argon, followed by plasma polymerization coating of acetylene or butadiene in order to enhance adhesion to rubber compounds. Plasma polymerization was carried out under optimized conditions of 10 W, 30 sec, 30 mTorr for acetylene and butadiene gas, while plasma etching was performed at 90W, 10min and 30mTorr. The adhesion of tire cords was evaluated via Tire Cords Adhesion Test (TCAT) and the failure surfaces of the tested samples were analyzed by SEM. Polymer coating by plasma polymerization was also characterized by FT-IR, Alpha-Step and dynamic contact angle analyzer in order to elucidate the adhesion mechanism.

• Elastomers and Composites
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• v.35 no.1
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• pp.53-62
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• 2000

Zinc plated steel tire cords were treated with RF plasma polymerization coating of acetylene or butadiene in order to enhance adhesion to rubber compounds. Plasma polymerization was carried out as a function of plasma power, treatment tune and gas pressure. In order to maximize adhesion, argon plasma etching was performed, with carrier gas such as argon, nitrogen and oxygen, while the adhesion of tire cords was evaluated via TCAT. Best results were obtained from a combination treatment of argon etching (90 W. 10 min, 30 mTorr) and acetylene plasma polymerization coating (10 W, 30 sec, 30 mTorr) with argon carrier gas (25/5:acetylene/argon). These samples exhibited a pull out force of 285N which is comparable to that obtained from the brass plated tire cords (290N).

• Applied Chemistry for Engineering
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• v.24 no.1
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• pp.87-92
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• 2013

Nonthermal plasma hybridized with photocatalysts is proven to be an effective tool to degrade toxic organics in wastewater. In this study, a specially designed dielectric barrier discharge (DBD) plasma system combined with photocatalysts was applied to decompose pestiticides such as dichlorovos, carbofuran and methidathon, which are frequently used in the golf courses and the orange plantations. The degradations of the pesticides in single and coupled systems were evaluated. The single system was used with ozone plasma which consisted of electrons, radicals, ions produced by oxygen gas and air, with and without ultra-violet (UV) irradiation, respectively. The coupled systems utilized the air-derived ozone plasma combined with zinc oxide, titanium dioxide and graphite oxide photocatalyst activated by UV. The graphite oxide was synthesized by a modified Hummer's method and characterized using FTIR spectrometer. It was elucidated that the plasma reaction with graphite oxide (0.01 g/L) brought about almost 100% of degradation degrees for dichlorovos and carbofuran in 60 min, as compared with the performances showed by no catalyst condition. The photocatalyst-hybridized plasma in the presence of UV irradiation was proven to be an effective alternative for degrading pesticides.

• Korean Journal of Materials Research
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• v.28 no.4
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• pp.247-253
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• 2018

We examined the characteristics of indium tin zinc oxide (ITZO) thin film transistors (TFTs) on polyimide (PI) substrates for next-generation flexible display application. In this study, the ITZO TFT was fabricated and analyzed with a SiOx/SiNx gate insulator deposited using plasma enhanced chemical vapor deposition (PECVD) below $350^{\circ}C$. X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectroscopy (SIMS) results revealed that the oxygen vacancies and impurities such as H, OH and $H_2O$ increased at ITZO/gate insulator interface. Our study suggests that the hydrogen related impurities existing in the PI and gate insulator were diffused into the channel during the fabrication process. We demonstrate that these impurities and oxygen vacancies in the ITZO channel/gate insulator may cause degradation of the electrical characteristics and bias stability. Therefore, in order to realize high performance oxide TFTs for flexible displays, it is necessary to develop a buffer layer (e.g., $Al_2O_3$) that can sufficiently prevent the diffusion of impurities into the channel.

• Transactions on Electrical and Electronic Materials
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• v.12 no.5
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• pp.200-203
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• 2011

In this research, nitrogen (N)-doped zinc oxide (ZnO) thin films have been grown on a sapphire substrate by dielectric barrier discharge (DBD) in pulsed laser deposition (PLD). DBD has been used as an effective way for massive in-situ generation of N-plasma under conventional PLD process conditions. Low-temperature photoluminescence spectra of N-doped ZnO thin films provided near-band-edge emission after a thermal annealing process. The emission peak was resolved by Gaussian fitting and showed a dominant acceptor-bound excitation peak ($A^{\circ}X$) that indicated acceptor doping of ZnO with N. The acceptor binding energy of the N acceptor was estimated to be approximately 145 MeV based on the results of temperature-dependent photoluminescence (PL) measurements.

• Fisheries and Aquatic Sciences
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• v.20 no.6
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• pp.11.1-11.8
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• 2017

Juvenile black sea bream, Acanthopagrus schlegelii, were exposed to waterborne zinc (Zn) at concentrations of 0, 200, and $400{\mu}g/L$, at temperatures of 18 or $26^{\circ}C$ for 4 weeks. Superoxide dismutase (SOD) activities in the liver and gill of A. schlegelii significantly increased following exposure to waterborne Zn. Significant reduction in glutathione S-transferase (GST) activity in the liver and gill was observed following exposure to waterborne Zn. Glutathione (GSH) concentrations in the liver and gill also significantly decreased following exposure to waterborne Zn. Phagocytosis and lysozyme in the plasma and kidney were significantly increased following exposure to waterborne Zn. High water temperature increased alterations in the antioxidant and immune responses. The results of the present study suggest that waterborne Zn induced significant alterations in oxidative stress, increased immune responses and high temperature that trigger Zn toxicity.

• Korean Journal of Clinical Laboratory Science
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• v.41 no.1
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• pp.31-36
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• 2009

The exposure of human beings to toxic trace metals (Cu, Zn) continues to be an important public health issue and concern. This study was conducted to assess the exposure to trace metals (Cu, Zn) in the general Korean population by inductively coupled plasma mass spectrometry (ICP-MS) and Atomic absorption spectrometry (AAS). Serum samples were obtained from 40 healthy volunteers. Specimens were collected in special container and we applied sample processing to minimize contamination. We used ICP-MS and AAS to analyze simultaneously the concentration of metals including copper, zinc. Distribution of trace metal levels in the general healthy population showed lower values. The results in this study can provide background data for clinical studies associated with trace metal exposure in the korean population.