• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.553-561
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• 2010

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.64-69
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• 2007

Aerostatic planar XY stages are frequently used as the main frames of precision positioning systems. The machining and assembly process of the rails and bed of the stage is one of first processes performed when the system is built. When the system is complete, the 2D position, motion, and stage flatness errors are measured in tests. If the stage errors exceed the application requirements, the stage must be remachined and the assembly process must be repeated. This is difficult and time-consuming work. In this paper, a method for estimating the errors of a planar XY stage is proposed that can be applied when the rails and bed of the stage are evaluated. Profile measurements, estimates of the motion error, and 2D position estimation models were considered. A comparison of experimental results and our estimates indicated that the estimated errors were within $1{\mu}m$ of their true values. Thus, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage is expected to be a useful tool during the assembly process of guideways.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.141-142
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• 2006

This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1703-1708
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• 2004

In this study, we are investigated experimentally the pumping characteristics about the pumping channel shapes of disk-type drag pump (DTDP). We are experimented the pumping performance about the rotors which have channel or do not exist. The channel disk-type rotor has spiral channels both upper and lower part, and stator is planar. The planar disk-type rotor hasn't channel and stator has spiral channels both upper and lower part. The flow-meter method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001 ${\sim}$ 4 Torr. The maximum of compression ratio was about 3300 for three-stage DTDP (channel disk-type rotor), 1000 for four-stage (planar disk-type rotor) and two-stage DTDP (channel disk-type rotor) at zero throughput. The ultimate pressure was $1.6{\times}10^{-6}$ Torr for three-stage DTDP (channel disk-type rotor), $2.5{\times}10^{-6}$ Torr for four-stage DTDP (planar disk-type rotor).

• Geomechanics and Engineering
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• v.14 no.3
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• pp.233-240
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• 2018

Pullout tests are usually employed to determine the ultimate bearing capacity of reinforced soil, and the load-displacement curve can be obtained easily. This paper presents an analytical solution for predicting the full-range mechanical behavior of a buried planar reinforcement subjected to pullout based on a bi-linear bond-slip model. The full-range behavior consists of three consecutive stages: elastic stage, elastic-plastic stage and debonding stage. For each stage, closed-form solutions for the load-displacement relationship, the interfacial slip distribution, the interfacial shear stress distribution and the axial stress distribution along the planar reinforcement were derived. The ultimate load and the effective bond length were also obtained. Then the analytical model was calibrated and validated against three pullout experimental tests. The predicted load-displacement curves as well as the internal displacement distribution are in closed agreement with test results. Moreover, a parametric study on the effect of anchorage length, reinforcement axial stiffness, interfacial shear stiffness and interfacial shear strength is also presented, providing insights into the pullout behaviour of planar reinforcements of MSE structures.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.7
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• pp.675-682
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• 2009

Instead of direct driving like BLDC, the induction principle is adopted as a driving one for planar stage. The stage composed of four linear induction motors put in square type is activated by two-axial forces; low-frequency attractive force and thrust force of the linear induction motors. Here, the modified vector control whose new inputs are q-axis current and dc current biased to three phase current instead of d-axis current or flux current is applied extensively to overall motion of the stage. For the developed system, the precision step test and the constant velocity test are tried to guarantee its feasibility for TFT-LCD pattern inspection. However, to exclude a discontinuity due to phase shift and minimize a force ripple synchronized with the command frequency, the initial system is revised to the antagonistic structure over the full degree of freedom. Concretely describing, the porous air bearings guide an air-gapping of the stage up and down and a pair of liner induction motors instead of single motor are activated in the opposite direction each other. The performances of the above systems are compared from trapezoid tracking test and sinusoidal test.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1863-1872
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• 2001

In this Paper, we suggest the precision stage using a novel non-contact planar actuator that utilizes an interaction between an array type of air-core solenoids and permanent magnets. The former with axes arranged in the mutually orthogonal direction is fixed on the stator and the latter with the same polar direction is attached below the stage. The promising magnetic structure has little uncertainty such as hysteresis loss caused by ferromagnetic material, then it is simple to quantify the magnetic phenomenon. And all the magnetic forces are transmitted through narrow air-gap between the coil and the permanent magnet, therefore the structure can be highly compacted. Furthermore, the stage or plate can be perfectly isolated from the stator without any wire connection, leading to diminish the generating possibility of wear particles due to mechanical contact. Then. it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness. or general-purpose nano stage. The main issues rebated to the plate driving are discussed here.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.120-127
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• 2003

A novel three degrees of freedom sensing method utilizing binary grid pattern image and vision camera is presented. The binary grid pattern image is designed by Pseudo-Random Binary Arrays and referenced to encode in-plane position of a moving stage of the contact-free planar actuator. First, the yaw motion of the stage is detected using fast image processing and then the other planar positions, x and y, are decoded with a sequence of images. This method can be applied to the system that needs feedback of in-plane position, with advantages of a good accuracy and high resolution comparable with the encoder, a relatively compact structure, no friction, and a low cost. In this paper, all the procedures of the above sensing mechanism are described in detail, including simulation and experiment results.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.76-83
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• 2003

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.3
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• pp.452-460
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• 2002

The precision stage using a novel contact-free planar actuator based on magnetic farces, magnetized force and Lorentz farce, is suggested. In the promising magnetic structure, the mover is driven directly without any transmission mechanism, and doesn't need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and a feasibility of the system.