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A Novel Measuring Method of In-plane Position of Contact-Free Planar Actuator Using Binary Grid Pattern Image  

정광석 (충주대학교 기계공학과)
정광호 ((주)JATC)
백윤수 (연세대학교 기계전자공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.7, 2003 , pp. 120-127 More about this Journal
Abstract
A novel three degrees of freedom sensing method utilizing binary grid pattern image and vision camera is presented. The binary grid pattern image is designed by Pseudo-Random Binary Arrays and referenced to encode in-plane position of a moving stage of the contact-free planar actuator. First, the yaw motion of the stage is detected using fast image processing and then the other planar positions, x and y, are decoded with a sequence of images. This method can be applied to the system that needs feedback of in-plane position, with advantages of a good accuracy and high resolution comparable with the encoder, a relatively compact structure, no friction, and a low cost. In this paper, all the procedures of the above sensing mechanism are described in detail, including simulation and experiment results.
Keywords
Pseudo-Random Binary Sequences (PRBS); Pseudo-Random Binary Arrays (PRBA); Binary Grid Pattern Image (BGPI); In- plane Position; Contact-Free Planar Actuator;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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