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Repulsive & Attractive Type Magnetic Levitation for Mechanical Isolation of the Planar Stage Mover  

정광석 (국립 충주대학교 기계공학과)
이상헌 (연세대학교 기계공학과 대학원)
백윤수 (연세대학교 기계전자공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.4, 2003 , pp. 76-83 More about this Journal
Abstract
To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.
Keywords
Surface actuator; Planar stage; Repulsive levitation; Attractive levitation;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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1 정광석, 이상헌, 백윤수, '자기 흡인식 부상 원리에 기초한 비접촉식 서피스 액추에이터의 초정밀 범용 스테이지에의 적용 가능성,' 대한기계학회 논문집 A 권, 제 26 권, 제 3 호, pp. 452-460, 2002   과학기술학회마을   DOI
2 Jung, K. S. and Baek, Y. S., 'Design, modeling, and control of a novel six d.o.f positiong system using magnetic levitation,' IEICE Trans. on Electronics, Vol. E83-C, No. 12, pp. 1937-1949, 2001
3 Xu, W. and King, T., 'Flexure hinges for piezoactuator displacement amplifiers : flexibility, accuracy, and stress considerations,' Precision engineering, Vol. 19, No.1, pp. 4-10, 1996   DOI   ScienceOn
4 Awabdy, B. A., Shin, W. and Auslander D. M., 'Nanometer positioning of a linear motion stage under static loads,' IEEE/ASME Trans. on Mechatronics, Vol. 3, No.2, pp. 113-119, 1998   DOI   ScienceOn
5 Steve Chen, S. J. and Busch-Vishiniac, I. J., 'A magnetically levitated, automated, contact analytical probe tool,' IEEE Transaction on Semiconductor Manufacturing, Vol. 8, No.1, pp. 72-78,1995   DOI   ScienceOn
6 Jeong M. C. and Busch-Vishiniac I. J., 'A submicron accuracy magnetic levitation micromachine with endpoint friction,' Sensors and Actuators, Vol. 29, pp. 225-234, 1991   DOI   ScienceOn
7 Jung, K. S. and Baek, Y. S., 'Study on a novel contact-free planar moving system using electromagnet and permanent magnet,' IEEE/ASME Trans. on Mechatronics, Vol. 7, No.2, pp. 35-43, 2002   DOI   ScienceOn
8 정광석, 백윤수, '전자기력 제어를 이용한 6 자유도 초정밀 스테이지,' 한국정밀공학회지, 제 17권, 제 3호, pp. 158-164, 2000   과학기술학회마을
9 Holmes M., Hocken R. and Trumper D., 'The longrange scanning stage: a novel platform for scannedprobe microscopy,' Precision engineering, Vol. 24, pp. 191-209, 2000   DOI   ScienceOn
10 Tadokoro S., Murakami T., Fuji S., Kanno R. and Oguro K., 'An elliptic friction drive element using an ICPF actuator,' IEEE Control Systems Magazine, Vol. 17, No.3, pp. 60-68,1997   DOI   ScienceOn
11 Tomita, Y. and Koyanagawa, Y., 'Study on a surfacemotor driven precise positioning system,' Journal of Dynamic systems, Measurement, and Control, Vol. 117, pp. 311-319,1995   DOI   ScienceOn
12 Jung, K. S. and Baek, Y. S., 'Precision stage using a non-contact planar actuator based on magnetic suspension technology,' Mechatronics (to be published)   DOI   ScienceOn
13 Jung, K. S. and Baek, Y. S., 'Contact-free electromagnetic planar motion system for high precision manipulating in super clean environments,' Proc. of the 32nd ISR (International Symposium on Robotics), Korea, April, pp. 1099-1104, 2001
14 정광석, 백윤수, '비접촉 평면 구동기의 자기력 조합 방식 구동 원리,' 한국정밀공학회지, 제 18권 제 3호, pp. 115-121,2001   과학기술학회마을