• 제목/요약/키워드: piezoelectric substrate

검색결과 183건 처리시간 0.026초

Electrospinning법으로 제조된 PZT 섬유의 구조분석 및 특성평가 (Structural Analysis and Characterization of PZT Fiber Fabricated by Electrospinning)

  • 박춘길;윤지선;정영훈;남중희;조정호;백종후;정대용
    • 한국세라믹학회지
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    • 제50권6호
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    • pp.466-469
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    • 2013
  • Currently, piezoelectric ceramics are being applied in various fields, such as ultrasonic sensors, vibration devices, sound filters, and various energy conversion devices. Flexible piezoelectric ceramics are widely studied in an effort to mitigate the disadvantages of their brittle and inductile properties. Structural damage to piezoelectric fibers is much less than that to thin films when piezoelectric fibers are twisted or bent. Therefore, stretchable devices can be fabricated if piezoelectric fibers are obtained using an elongated substrate. In this study, sintering processes of PZT ($Pb(Zr_{0.53}Ti_{0.47})O_3$) fibers prepared by electrospinning were optimized through the TGA and XRD analyses. The crystal structure and microstructure of the piezoelectric fibers were investigated by XRD, FE-SEM and TEM.

RF 마그네트론 스퍼터링 공정 조건에 따른 AlN 박막의 배향성, 표면 거칠기 및 압전 특성에 관한 연구 (Orientation, Surface Roughness and Piezoelectric Characteristics of AlN Thin Films with RF Magnetron Sputtering Conditions)

  • 방정호;장동훈;강성준;김동국;윤영섭
    • 대한전자공학회논문지SD
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    • 제43권4호
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    • pp.1-7
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    • 2006
  • RF 마그네트론 스퍼터링 방법을 이용하여 $Ar/N_2$ 가스비와 기판 온도 변화에 따른 AlN 박막의 배향성과 표면 거칠기 그리고 압전 특성의 변화를 조사하였다. 특히, $Ar/N_2$=10/10 (sccm), 기판 온도 $400^{\circ}C$ 일 때 가장 우수한 (002) 배향성을 얻을 수 있었다. AFM 을 이용하여 표면 거칠기를 분석한 결과, 기판 온도 $400^{\circ}C$ 인 경우 $Ar/N_2$ 가스비의 변화에 대해서는 $N_2$의 분압비가 증가할수록 표면 거칠기 특성이 좋아지는 것으로 나타났으며 $Ar/N_2$=0/20 (sccm) 일 때 2.1 nm 로 가장 작은 값을 나타내었다. $Ar/N_2$=10/10 (sccm) 인 조건에서 기판 온도 변화에 대한 표면 거칠기 특성은 기판 온도가 상온에서 $300^{\circ}C$ 로 증가함에 따라 향상되는 경향을 보였으며, $300^{\circ}C$ 에서 3.036 nm 로 최소값을 나타낸 후, 기판 온도가 $300^{\circ}C$ 이상으로 상승하면 표면 거칠기는 다시 열악해지는 것을 확인할 수 있었다. Pneumatic probe 방법을 이용하여 압전 특성을 측정한 결과, $Ar/N_2$=10/10 (sccm), 기판 온도 $400^{\circ}C$ 일 때 Piezoelectric constant ($d_{33}$)=6.01 pC/N 이라는 가장 우수한 값을 나타내었으며, 이는 AlN 박막이 가장 좋은 (002) 배향성을 갖는 조건과 일치하는 것이다.

마이크로스트립 안테나의 주파수 이동 특성에 관한 연구 (Frequency properties of Microstrip Antenna using LiNbO$_3$)

  • 오승재;우형관;하용만;김영훈;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.375-378
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    • 2000
  • This paper investigated that resonant frequencies of microstrip patch antenna were tunable when piezoelectric materials were used as the antenna substrates. The resonant frequencies of the microstrip antenna using the piezoelectric substrate, like PZT, LiNbO$_3$ were able to be controlled by applied DC voltage. The frequency variation of the air gap antenna was 29MHz when the voltage variation was 14[kV/cm], and the frequency variation of microstrip patch antenna made of LiNbO$_3$substrate was 29MHz when voltage variation was 6[kV/cm].

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PZT틀 이용한 Air gap 안테나의 주파수 특성에 관한 연구 (Frequency properties of Air gap Antenna using PZT)

  • 김영훈;우형관;임승혁;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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    • pp.164-167
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    • 2000
  • This paper investigated that resonant frequencies of microstrip patch antenna were tunable when piezoelectric materals were used as the antenna substrates. The resonant frequencies of the air-gap antenna using the piezoelectric substrate were able to be controlled by applied AC voltage. The frequency variation of the antenn was great when PZT were applied voltage of the resonant frequency.

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주파수 조정이 가능한 PZT Air-Gap Antenna (Frequency Agile Air-Gap Microstrip Antennas using PZT)

  • 우형관;하용만;오승재;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.772-775
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    • 2001
  • This paper investigated that resonant frequencies of microstrip patch antenna were frequency aigle when PZT were used as the antenna substrates. The resonant frequencies of the antenna using the piezoelectric substrate were able to be controlled by applied voltage. The frequency variation of the air gap antenna was 16MHz when the voltage variation was 12[KV/cm].

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PZT 캔틸레버의 길이와 면적에 따른 에너지 하베스팅 장치의 출력 특성 (Micro Power Properties of Harvesting Devices as a Function of PZT cantilever length and gross area)

  • 김인성;주현규;송재성;김민수;정순종;이대수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 제39회 하계학술대회
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    • pp.1246-1247
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    • 2008
  • With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device, PMN-PZT thick film was formed by the screen printing method on the Ag/Pd coated alumina substrate. The layer was 8 layers and slurry where a-terpineol, ethycellulose, ferro B-75001 as Vehicle, PMN-PZT powder used are fabricated by ball mill. The output power quality was be also investigated by changing the load resistance, weight and frequency. The made piezoelectric energy harvesting device was resulted from the conditions of 33$k{\Omega}$, 0.25g, 197Hz respectively. The thick film was prepared at the condition of 2.75Vrms, and its power was 230${\mu} W$ and its thickness was 56${mu}m$. The piezoelectric energy harvesting device output voltage was increased, when the load weight, load resistance was increasing and resonance frequency was diminishing. The other side, resonance frequency was diminished, when the weight was increasing. And output power was continuously it changed by load resistance, output voltage, weight and resonance frequency.

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PZT계 압전 세라믹 파이버 복합체의 기계적 물성과 압전 풍력 에너지 하베스팅 특성 (Mechanical Properties and Wind Energy Harvesting Characteristics of PZT-Based Piezoelectric Ceramic Fiber Composites)

  • 이민선;박진우;정영훈
    • 한국전기전자재료학회논문지
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    • 제34권2호
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    • pp.90-98
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    • 2021
  • Piezoelectric ceramic fiber composite (PCFC) was fabricated using a planar electrode printed piezoelectric ceramic fiber driven in transverse mode for small-scale wind energy harvester applications. The PCFC consisted of an epoxy matrix material and piezoelectric ceramic fibers sandwiched by interdigitated electrode (IDE) patterned polyimide films. The PCFC showed an excellent mechanical performance under a continuous stress. For the fabrication of PCB cantilever harvester, five -PCFCs were vertically attached onto a flexible printed circuit board (PCB) substrate, and then PCFCs were serially connected through a printed Cu circuit. The energy harvesting performance was evaluated applying an inverted structure, which imples its free leading edge located at an open end but the trailing edge at a clamped end, to enhance strain energy in a wind tunnel. The output voltage of the PCB cantilever harvester was increased as the wind speed increased. The maximum output power was 17.2 ㎼ at a resistance load of 200 ㏀ and wind speed of 9 m/s. It is considered that the PCB cantilever energy harvester reveals a potential use for wind energy harvester applications.

Sensitivity Improvement and Operating Characteristics Analysis of the Pressure Sensitive Field Effect Transistor(PSFET) Using Highly-Oriented ZnO Piezoelectric Thin Film

  • 이정철;조병욱;김창수;남기홍;권대혁;손병기
    • 센서학회지
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    • 제6권3호
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    • pp.180-187
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    • 1997
  • We demonstrate the improvement of sensitivity and analysis of operating characteristics of the piezoelectric pressure sensor using ZnO piezoelectric thin film and FET(field effect transistor) for sensing applied pressure and transforming the pressure into electrical signals, respectively. The sensitivity of the PSFET(pressure sensitive field effect transistor) was improved by using highly-oriented ZnO film perpendicular to the substrate surface and the operating characteristics was investigated by monitoring output voltage with time in various static pressure levels.

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A Wireless Identification System Using an Efficient Antenna Based on Passive Surface Acoustic Wave(SAW) Devices

  • Chang, Ki-Hun;Lee, Woo-Sung;Yoon, Young-Joong;Kim, Jae-Kwon;Park, Joo-Yong;Burm, Jin-Wook
    • Journal of electromagnetic engineering and science
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    • 제7권1호
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    • pp.12-16
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    • 2007
  • A UHF band wireless identification system based on passive surface acoustic wave(SAW) devices is presented in this paper. SAW ID tags were fabricated on Y-Z $LiNbO_3$ piezoelectric substrate with a good electro-mechanical coupling property. To reduce degradation of the antenna performance associated with the piezoelectric materials, an efficient design of the SAW RFID antenna is introduced. By measuring the parameters of the SAW ID tag, the performance of the antenna was tested by experimentation.

Pulsed Laser Deposition 방법으로 증착된 ZnSnO3 압전 박막의 성장과 특성 평가 (Fabrication and Properties of ZnSnO3 Piezoelectric Films Deposited by a Pulsed Laser Deposition)

  • 박병주;윤순길
    • 한국전기전자재료학회논문지
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    • 제27권1호
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    • pp.18-21
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    • 2014
  • Because the Pb-based piezoelectric materials showed problems such as an environmental pollution. lead-free $O_3$ materials were studied in the present study. The $O_3$ thin films were deposited at $640^{\circ}C$ on $Pt/Ti/SiO_2$ substrate by pulsed laser deposition (PLD) and were annealed for 5 min at $750^{\circ}C$ using rapid thermal annealing (RTA) in nitrogen atmosphere. Samples annealed at $750^{\circ}C$ showed a smooth morphology and an improvement of the dielectric and leakage properties, as compared with as-grown samples. However, electrical properties of the $O_3$ thin films obtained in the present study should be improved for piezoelectric applications.