• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.777-781
• /
• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2000.06a
• /
• pp.257-262
• /
• 2000

This research is concerned with the active vibration control of slewing smart structures subjected to rotating disturbance. When cantilever beam rotates about axes perpendicular to the undeformed beam's longitudinal axis, it experiences inertial loading. Hence, the beam vibrates after the slewing ends. In this paper, the analytical model for a single slewing flexible beam with surface bonded piezoelectric sensor and actuator is developed using the Hamilton's principle with discretization by the assumed mode method. The theoretial model is verified by the experimental open loop frequency response data. The controller is designed for residual vibration suppression after slewing. The designed cotroller is a positive position feedback (PPF) controller for controlling the first mode vibration.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.1109-1112
• /
• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• Proceedings of the Optical Society of Korea Conference
• /
• 2000.02a
• /
• pp.36-37
• /
• 2000

최근 Micro-Opto-Electro-Mechanical(MOEMS)기술의 발달과 더불어 적응 광학(Adaptive optics)분야나 패턴 인식 분야에 적용 가능한 공간 빛 변조기의 개발이 이루어지고 있다. 적응 광학용 공간 빛 변조기는 대기의 turbulence에 의하여 왜곡된 빛의 위상을 파면 센서(wave sensor)와 실시간 제어기를 통해 보정하는 역할을 한다. 적응 광학 분야에서 상업적으로 사용되던 기존의 공간 빛 변조기는 전왜소자 배열(piezoelectric actuator array)에 의하여 지지되는 평면 거울을 사용하여 크기가 크고 전력 소비도 심하며 무엇보다도 가격이 비싸다는 단점이 있었다$^{(1)}$ . 그러나 MOEMS 기술의 적용으로 인해 공간 빛 변조기의 크기 및 무게 그리고 소비 전력이 줄어들었으며 반도체 공정을 통한 대량 생산으로 저가로 생산할 수 있게 되었다. (중략)

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.36 no.5
• /
• pp.539-543
• /
• 2012

Cellulose Electro-Active Paper (EAPap) is attractive as a biomimetic actuator because of its merits: it is lightweight, operates in dry conditions, has a large displacement output, has a low actuation voltage, and has low power consumption. Cellulose is regenerated so as to align its microfibrils, which results in a piezoelectric paper. When chemically bonded and mixed with carbon nanotubes, titanium oxide, zinc oxide, tin oxides, the cellulose EAPap can be used as a hybrid nanocomposite that has versatile properties and that can meet the requirements of many application devices. This paper presents trends in recent research on the cellulose EAPap, mainly on material preparation and its use in devices, including biosensors, chemical sensors, flexible transistors, and actuators. This paper also explains wirelessly driving technology for the cellulose EAPap, which is attractive for use in biomimetic robotics and micro-aerial vehicles.

• Journal of Sensor Science and Technology
• /
• v.12 no.6
• /
• pp.265-272
• /
• 2003

This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Structural Monitoring and Maintenance
• /
• v.5 no.2
• /
• pp.313-323
• /
• 2018

The presence of water inside concrete structures is an essential condition for the deterioration of the structures. The free water in the concrete pores and micro-cracks is the culprit for the durability related problems, such as alkali-aggregate reaction, carbonation, freeze-thaw damage, and corrosion of steel reinforcement. To ensure the integrity and safe operation of the concrete structures, it is very important to monitor water seepage inside the concrete. This paper presents the experimental investigation of water seepage monitoring in a concrete slab using piezoelectric-based smart aggregates. In the experimental setup, an $800mm{\times}800mm{\times}100mm$ concrete slab was fabricated with 15 SAs distributed inside the slab. The water seepage process was monitored through interrogating the SA pairs. In each SA pair, one SA was used as actuator to emit harmonic sine wave, and the other was used as sensor to receive the transmitted stress wave. The amplitudes of the received signals were able to indicate the water seepage process inside the concrete slab.

• Journal of the Korean Society for Precision Engineering
• /
• v.34 no.1
• /
• pp.53-58
• /
• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• Steel and Composite Structures
• /
• v.37 no.2
• /
• pp.229-251
• /
• 2020

In this paper, dynamic buckling of a smart sandwich nanotube is studied. The nanostructure is composed of a carbon-nanotube with inner and outer surfaces coated with ZnO piezoelectric layers, which play the role of sensor and actuator. Nanotube is under magnetic field and ZnO layers are under electric field. The nanostructure is located in a viscoelastic environment, which is assumed to obey Visco-Pasternak model. Non-local piezo-elasticity theory is used to consider the small-scale effect, and Kelvin model is used to describe the structural damping effects. Surface stresses are taken into account based on Gurtin-Murdoch theory. Hamilton principle in conjunction with zigzag shear-deformation theory is used to obtain the governing equations. The governing equations are then solved using the differential quadrature method, to determine dynamic stability region of the nanostructure. To validate the analysis, the results for simpler case studies are compared with others reported in the literature. Then, the effect of various parameters such as small-scale, surface stresses, Visco-Pasternak environment and electric and magnetic fields on the dynamic stability region is investigated. The results show that considering the surface stresses leads to an increase in the excitation frequency and the dynamic stability region happens at higher frequencies.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2003.11a
• /
• pp.643-648
• /
• 2003

The problem considered in this paper is that the tip position of a flexible cantilever beam is controlled to follow a command signal, using a pair of piezoelectric actuators at the clamped end. The beam is lightly damped and so the natural transient response is rather long, and also since the sensor and actuator are not collocated, the plant response is non-minimum phase. Two control strategies were investigated. The first involved conventional PID control in which the feedback gains were adjusted to give the fastest closed-loop response to a step input. The second control strategy was based on an internal model control (IMC) architecture. The control filter in the IMC controller was a digital FIR device designed to minimize the expectation of the mean square tracking error. The IMC controller designed fur the beam was found to have very much reduced settling times to a step input compared with those of the PID controller.