• 한국전기전자재료학회논문지
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• 제18권11호
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• pp.1014-1018
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• 2005

The purpose of this study is to obtain strong bond strength at the interface between piezoelectric substrates and semiconductor thin films to be applied for the manufacture of high-performance acoustic wave semiconductor coupled device. For this purpose, we have compared and examined the effects of different surface treatment methods on hydrophile properties at the surface of the piezoelectric substrates. Moreover, we have observed the effect of microwave and laser on the elimination of water molecules at the interface. As for the piezoelectric substrates, dry method for surface treatment was found to be superior in the control of hydrophilicity of the surface compared to wet method. On the other hand, both microwave and laser were found to be effective in the elimination of water molecules in the interface.

• 소성∙가공
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• 제11권7호
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• pp.569-574
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• 2002

Recently, thick PZT films are required for the cases of micro piezoelectric devices with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Microstructures, and electrical properties of films were investigated by XRD, FESEM, impedance analyzer, and P-E hysteresis. PZT films with 2.7$mu extrm{m}$ to 4.4${\mu}{\textrm}{m}$ thickness were fabricated. Dielectric constant, loss, remnant polarization and coercive field of them were 880~1650 at 1kHz, 2~3% at 1kHz, 26~32 $\mu$C/$ extrm{cm}^2$, and 33~60kV/cm, respectively. Also a transverse piezoelectric coefficient $(e_{31,f})$ measurement system was fabricated and tested for thick film samples.

• 센서학회지
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• 제31권5호
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• pp.286-292
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• 2022

As mobile electronics become smarter, higher-level security systems are necessary to protect private information and property from hackers. For this, biometric authentication systems have been widely studied, where the recognition of unique biological traits of an individual, such as the face, iris, fingerprint, and voice, is required to operate the device. Among them, ultrasound fingerprint imaging technology using piezoelectric materials is one of the most promising approaches adopted by Samsung Galaxy smartphones. In this review, we summarize the recent progress on piezoelectric ultrasound micro-electro-mechanical systems (MEMS) transducers with various piezoelectric materials and provide insights to achieve the highest-level biometric authentication system for mobile electronics.

• Smart Structures and Systems
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• 제22권2호
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• pp.133-137
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• 2018

Increasing interest in prognostics and health management has heightened the need for wireless sensor networks (WSN) with efficient power sources. Piezoelectric energy harvesters using Pb(Zr,Ti)O3 (PZT) are one of the candidate power sources for WSNs as they efficiently convert mechanical vibration energy into electrical energy. These types of devices are resonated at a specific frequency, which has a significant impact on the amount of energy harvested, by external vibration. Hence, precise prediction of mechanical deformation including modal analysis of piezoelectric devices is crucial for estimating the energy generated under specific conditions. In this study, an experimental vibrational system capable of controlling a wide range of frequencies and accelerations was designed to generate mechanical vibration for piezoelectric energy harvesters. In conjunction with MATLAB, the system automatically finds the resonance frequency of harvesters. A small accelerometer and non-contact laser displacement sensor are employed to investigate the mechanical deformation of harvesters. Mechanical deformation under various frequencies and accelerations were investigated and analyzed based on data from two types of sensors. The results verify that the proposed system can be employed to carry out vibration experiments for piezoelectric harvesters and measurement of their mechanical deformation.

• Journal of Periodontal and Implant Science
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• 제30권2호
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• pp.429-442
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• 2000

Based on current evidence in the literature, it is known that endotoxin is a weakly adherent surface phenomenon and that power-driven instruments can be used to accomplish definitive root detoxification and maximal wound healing without overinstrumentation of root and without extensive cementum removal. And one of the newly developed curette tips used with low power of piezoelectric ultrasonic scaler, is effective to remove calculus and not to remove the excessive cementum. The purpose of this study is therefore, to assess the influence of ultrasonic power and various working parameters on root substitute removal when instrumentation is performed with the curette tip on piezoelectric ultrasonic scaler. This study assessed defect depth, width and area resulting from instrumentation using a piezoelectric ultrasonic scaler with a curette type tip in vitro to acrylic resin block as a root substitute. The working parameters was standardized by the sledge device which controls lateral force(0.5 N, 1 N, 2 N) and instrumentation time(5 sec, 10 sec, 20 sec) and power setting was adjusted 0,2,4,8 in P mode. Power setting had the greatest influence on defect depth compared to lateral force and instrumentation time(standardized regression parameter estimates${\pm}$standard error, $0.37{\pm}0.02$, $0.19{\pm}0.02$, $0.07{\pm}0.02$). The effects on defect area also greatest for power setting($0.57{\pm}0.03$) compared to lateral force and instrumentation time($0.33{\pm}0.03$, $0.12{\pm}0.03$). The effect of the power setting on the defect width($0.15{\pm}0.01$) is not so great as defect depth or defect area compared to lateral force($0.12{\pm}0.01$) and effect of instrumentation time is minimal($0.02{\pm}0.01$). It could be concluded that the power setting has the greatest influence on the defect depth and area in curette type tip with low power of piezoelectric ultrasonic device. Many parameters can be adjusted in various situation in clinical use of piezoelectric ultrasonic scaler but the power setting is the first parameter to be adjusted.

• 대한의용생체공학회:의공학회지
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• 제43권5호
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• pp.319-330
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• 2022

In this study, the optimal driving frequency was derived through finite element analysis (FEA) to optimize the developed piezoelectric ultrasonic medical devices(PUMD) for bone surgery. The core of the PUMD is the piezoelectric ceramic (PZT), which is a vibrator that generates vibration energy. The piezoelectric ceramic shows the maximum current value with respect to the input voltage at the resonance frequency, which generates the maximum mechanical vibration. In the past, various studies have been conducted related to the analysis of PUMD, but most of the research so far has been limited to free vibration analysis. However, in order to derive the accurate resonant frequency, the initial stress generated by bolt tightening in the bolt-clamped Langevin type transducer (BLT) must be considered. In this study, after designing a PUMD, the driving performance according to the bolt tightening value was analyzed through FEA, and this was experimentally verified. First, the resonance mode and frequency response were confirmed through modal and harmonic analysis at 20-40 kHz, which is known as the optimal driving frequency band of PUMD for bone surgery. In addition, the design of the PUMD was confirmed by checking the mechanical behavior of the tip and the piezoelectric ceramic at the resonant frequency. Consequentially, the characteristic evaluation was performed, and it was confirmed that the resonant frequency result derived through the FEA was reasonable. Through this study, we presented a more rational FEA method than before for BLT transducers. We expect that this will shorten the time and cost of developing a PUMD, and will enable the development of more stable and high-quality products.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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• pp.1414-1415
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• 2006

Air-gap type film bulk acoustic wave resonator device using ZnO for piezoelectric layer and sacrifice layer, deposited by RF magnetron sputter with various conditions, fabricated in this study. Also, membrane$(SiO_2)$ and top and bottom electrode(both Al) of piezoelectric layer deposited by RF magnetron sputter. Using micro electro mechanical systems(MEMS) technique, sacrifice layer removed and then air-gap formed. The results of each process checked by XRD, AFM, SEM to obtain good quality device.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 춘계학술대회 논문집
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• pp.280-281
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• 2009

Piezoelectric vibrators can be good replacements of electric motors to excite touch screen of a mobile device owing to small volume and low power consumption. One problem to be solved yet for real application is larger excitation force or moment than available currently. More efficient excitation by a piezoelectric vibrator could be achieved by operating at one of resonance frequencies of the system, which must also be as close as possible to frequency range where index finger is most sensitive and increasing transmission force or moment at that frequency. In this study, dynamic models are derived for the piezoelectric exciter and an adhesive viscoelastic layer, which connect the exciter to the screen. The adhesive layer is modeled as distributed stiffness by considering its geometric shape to relative to the piezoelectric exciter. Then, equations of motion for the piezoelectric exciter and the adhesive layer are derived using Hamilton's principle. Based on this model, dynamic characteristics of the exciter will be designed to maximize the force or moment transmitted onto the screen structure.

• 센서학회지
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• 제31권5호
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• pp.279-285
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• 2022

Recently, 3D printing technology has gained increased attention in the manufacturing industry because it allows the manufacturing of complex but sophisticated structures as well as moderate production speed. Owing to advantages of 3D printers, such as flexible design, customization, rapid prototyping, and ease of access, can also be advantageous to sensor developments, 3D printing demands have increased in various active device fields, including sensor manufacturing. In particular, 3D printing technology is of significant interest in tactile sensor development where piezoelectric materials are typically embedded to acquire voltage signals from external stimuli. In regard with piezoelectricity, researchers have worked with various piezoelectric materials to achieve high piezoelectric response, but the structural approach is limited because ceramics have been regarded as challenging materials for complex design owing to their limited manufacturing methods. If appropriate piezoelectric materials and approaches to design are used, sensors can be fabricated with the improved piezoelectric response and high sensitivity that cannot be found in common bulk materials. In this study, various 3D printing technologies, material combinations, and applications of various piezoelectric sensors using the 3D printing method are reviewed.

• 전기학회논문지
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• 제66권10호
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• pp.1499-1507
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• 2017

This paper presents an impact-based piezoelectric vibration energy harvester using a freely movable metal sphere and a piezoceramic fiber-based MFC (Macro Fiber Composite) as piezoelectric cantilever. The free motion of the metal sphere, which impacts both ends of the cavity in an aluminum housing, generates power across a cantilever-type MFC beam in response to low frequency vibration such as human-body-induced motion. Impacting force of the spherical proof mass is transformed into the vibration of the piezoelectric cantilever indirectly via the aluminum housing. A proof-of-concept energy harvesting device has been fabricated and tested. Effect of the indirect impact-based system has been tested and compared with the direct impact-based counterpart. Maximum peak-to-peak open circuit voltage of 39.8V and average power of $598.9{\mu}W$ have been obtained at 3g acceleration at 18Hz. Long-term reliability of the fabricated device has been verified by cyclic testing. For the improvement of output performance and reliability, various devices have been tested and compared. Using device fabricated with anodized aluminum housing, maximum peak-to-peak open-circuit voltage of 34.4V and average power of $372.8{\mu}W$ have been obtained at 3g excitation at 20Hz. In terms of reliability, housing with 0.5mm-thick steel plate and anodized aluminum gave improved results with reduced power reduction during initial phase of the cyclic testing.