• Journal of KSNVE
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• v.7 no.3
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• pp.377-386
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• 1997

A cantilever type piezoceramic vibration sensor was developed that could make up for the short-comings of current vibration sensors, such as high price, low sensitivity, and complex structure. For the design, in conjunction with piezoelectric constitutive equations, we derived full analytic response equations of the piezoelectric bimorph sensor to external forces. The external forces were supposed to take the form of either step or sinusoidal force. Based on the results, actual piezoelectric vibration sensors were fabricated and tested for verification of the theoretical results. Further, comparison of the performance of the developed sensor was made with that of a commercially available representative vibration sensor so that quantitative evaluation of its sensitivity could be made. The sensor developed in this work showed excellent sensitivity and thermal stability in addition to the merits of simple structure and low fabrication cost in comparison with conventional mass-loaded piezoelectric sensors.

• Transactions of the Society of Information Storage Systems
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• v.1 no.1
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.225-230
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• 2005

This paper describes a novel tip position sensor made of a triangularly shaped piezoelectric PVDF (polyvinylidene fluoride) film for a cantilever beam. Due to the boundary condition of the cantilever beam and the spatial sensitivity function of the sensor, the charge output of the sensor is proportional to the tip position of the beam. Experimental results with the PVDF sensor were compared with those using two commercially available position sensors: an inductive sensor and an accelerometer. The resonance frequencies of the test beam, measured using the PVDF sensor, matched well with those measured with the two commercial sensors and the PVDF sensor also showed good coherence over wide frequency range, whereas the inductive sensor became poor above a certain frequency.

• Smart Structures and Systems
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• v.30 no.3
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• pp.239-243
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• 2022

We investigate the influence of nonlinear viscoelastic damping on the response of a cantilever sensor covered by piezoelectric layers in a symmetric or asymmetric configuration. We formulate an initial-boundary-value problem which consistently incorporates both geometric and material nonlinearities including the effect of viscoelastic damping which cannot be ignored for micro- and nano-mechanical sensor operation in a vacuum environment. We employ an asymptotic multiple-scales methodology to yield the system nonlinear frequency response near its primary resonance and employ a model-based estimation procedure to deduce the system damping backone curve from controlled experiments in vacuum. We discuss the effect of nonlinear damping on sensor applications for scanning probe microscopy.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.12
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• pp.769-775
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• 2016

Characteristics of a wireless sensor powered by the IDE (interdigitated electrode) embedded piezoelectric cantilever generator were analyzed in order to evaluate its potential for use in wireless sensor applications. The IDE embedded piezoelectric cantilever was designed and fabricated to have a self-resonance frequency of 126 Hz and acceleration of 1.57 G, respectively, for the mechanical resonance with a practical conveyor system in a thermal-power plant. It produced maximum output power of 2.81 mW under the resistive load of $160{\Omega}$ at 126 Hz. The wireless sensor module is electrically connected to a rectifier capacitor with capacity of 0.68 farad and 3.8 V for power supply by the piezoelectric cantilever generator. The unloaded capacitor could be charged as a rate of approximately $365{\mu}V/s$ while the capacitor exhibited that of 0.997 mV/min. during communication under low duty cycle of 0.2%. Therefore, it is considered that the fabricated IDE embedded piezoelectric cantilever generator can be used for wireless sensor applications.

• Korean Journal of Materials Research
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• v.17 no.2
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• pp.121-123
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• 2007

Energy harvesting from the vibration through the piezoelectric effect has been studied for powering the wireless sensor node. As piezoelectric unimorph cantilever structure can transfer low vibration to large displacement, this structure was commonly deployed to harvest electric energy from vibrations. Piezoelectric unimorph structure was composed of small stiff piezoelectric ceramic on the large flexible substrate. As there is the large Young's modulus difference between the flexible substrate and stiff piezoelectric ceramic, flexible substrate could not homogeneously transfer the vibration to stiff piezoelectric ceramic. As a result, most piezoelectric ceramics had been broken at the certain point. We measured and analyzed the stress distribution on the piezoelectric ceramic on the cantilever.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.41 no.11
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• pp.743-748
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• 2017

For diseases that are difficult to detect by conventional imaging techniques, the development of a diagnostic method that allows sensors to be inserted into the human body to aid the diagnosis of local spots of the target tissue, is highly desirable. In particular, it is extremely difficult to determine whether vulnerable plaque can later develop into atherosclerosis using only imaging techniques. However, vulnerable plaques are expected to have slightly different mechanical properties than healthy tissue. In this study, we aim to develop a piezoelectric cantilever-type sensor that can be inserted into the human body and can detect the local mechanical properties of the target tissue. A piezoelectric polymer composite based on $BaTiO_3$ nanoparticles was optimized for fabrication of a piezoelectric cantilever. Next, a micro-cone tip was fabricated at the end of the piezoelectric cantilever by thermal drawing. Finally, stiffness of biological tissue samples was measured with the piezoelectric cantilever sensor for verifying its functionality.

• Journal of Sensor Science and Technology
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• v.19 no.4
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• pp.313-319
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• 2010

Vibration energy harvesting is an attractive technique for potential powering of low power devices such as wireless sensors and portable electronic applications. Most energy generator developed to date are single vibration frequency based, and while some efforts have been made to broaden the frequency range of energy harvester. In this work, The effect of energy harvesting were investigated at various vibration frequencies, vibration beams, vibration point and test masses. The maximum output voltage of the bimorph piezoelectric cantilever was shifted according to vibration point. Vibration frequency with maximum output voltage decreased with the increasing length of vibration beam and increasing test mass. The sample with vibration beam length 0.5 L generated a peak output voltage of 32 $V_{rms}$ and shows a 45 % increase in voltage output in comparison to the corresponding original bimorph. It was found that a piezoelectric bimorph has a possibility to be as the energy harvesting cantilever, which is successfully tuned over a vibration frequency range to enable a maximum harvesting energy.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.267-272
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• 2008

Energy harvesting from the vibration through the piezoelectric effect has been studied for powering the small wireless sensor nodes. As piezoelectric uni-morph cantilever structure can transfer low vibration to large displacement, this structure was commonly deployed to harvest electric energy from vibrations. Through our previous results, when stress was applied on the cantilever, stress was concentrated on the certain point of the ceramic of the cantilever. In this study, for miniaturing the energy harvester, we investigated how the size of ceramics and the stress distribution in ceramic affects energy harvester characteristics. Even though the area of ceramic was 28.6 % decreased from $10{\times}35{\times}0.5mm^3$ to $10{\times}25{\times}0.5mm^3$, both samples showed almost same maximum power of 0.45 mW and the electro-mechanical coupling factor ($K_{31}$) of 14 % as well. This result indicated that should be preferentially considered to generate high power with small size energy harvester.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.261-265
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• 2020

In cantilever type piezoelectric energy harvester, the amount of power generation decreases rapidly when outside a certain frequency. The thickness and weight of the cantilever metal plate were modified to develop cantilevers that could produce high power over a wide frequency range. The thicker the cantilever, the higher the power in the higher frequency range. As the weight of the mass increased, the cantilever tended to generate higher power, and the frequency band decreased. A 0.6 mm metal plate cantilever that had a mass of 3.3 g generated power that exceeded 3 mW within the 91-102 Hz range, with average and output values of 9.484 mW and 20.748 mW, respectively, at 99 Hz.