• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.44-44
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• 2007

New inchworm type piezoelectric actuator design, which can reduce the number of the piezoelectric body for manufacturing inchworm type actuator, is suggested in this work. Inchworm type actuator consists of three or more piezoelectric bodies, on the other hand the new-designed inchworm type actuator has only one piezoelectric body. The one piezoelectric body that size is $2\;{\times}\;2\;{\times}\;4\;[mm^2]$ (DWL) has 2 clamping part and 1 extending part. The size of the new-designed actuator with one piezoelectric body is $5\;{\times}\;6\;{\times}\;9\;[mm^2]$ (DWL). The new-designed inchworm type actuator performed the operation at a cycle (6 steps) of $0.3{\mu}m$ per $33.3{\mu}s$ and a generated force of 0.6N.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1401-1406
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• 2003

Mechanical behavior of a piezoelectric actuator is studied as a preceding research for the manufacturing of three-dimensional micro-structures. It is needed to examine the simulation of a piezoelectric actuator according to applied direction of voltage, by researching displacement characterization of piezoelectric material through piezoelectric theory. To this end, finite element modeling is employed to study the response of a piezoelectric material under the various input voltages. Where the actuator is simulated by use of ANSYS. To avoid direct contact piezoelectric material with working fluid, silicon, polymer, etc., the actuator is modeled with nickel fixed diaphragm.

• Transactions on Electrical and Electronic Materials
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• 제18권3호
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• pp.144-147
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• 2017

In this study, two- and three-layer ceramic piezoelectric actuators were designed and simulated according to SUS316 thickness, actuator width, and mass using ATILA software in order to develop a piezoelectric actuator for haptic application. Numerical modelling based on the finite element method was performed to find the resonance frequencies and modal shapes of the actuator. The resonance frequency was affected by the thickness of the SUS316 plate and mass. On the other hand, the width of the actuator did not have a significant impact. Maximum displacements were generated at the center of a haptic three-layer ceramic piezoelectric actuator. The two-layer ceramic piezoelectric actuator with a mass of 2.6 g was suitable as $16.28{\mu}m$ at 265 Hz for haptic sensation application.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2014년도 춘계학술대회 논문집
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• pp.374-378
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• 2014

The piezoelectric materials convert from mechanical energy to electrical energy. The piezoelectric materials are used in various engineering applications such as piezoelectric ultrasonic actuators. Since the piezoelectric coupling characteristics of the actuator systems should be considered at the initial design stage, it is essential to analyze the piezoelectric coupling characteristics of the ultrasonic actuators. In this study, we analyzed the electromechanical characteristics of piezoelectric stacked actuator using the equivalent circuit model with modal mass stiffness parameters. It was compared the admittance of piezoelectric stack actuators with the analytical circuit model and the finite element model. Also, the coupling coefficient of piezoelectric stack actuator was discussed according to the number of stacks of actuators.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.127-131
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• 2008

This paper deals with the performance evaluation of piezoelectric unimorph actuator. In the unimorph design, the thickness ratio of substrate to piezoelectric material and the elastic modulus ratio of substrate to piezoelectric material are important parameters. There exists only one structural configuration that satisfies the optimal condition among them, and actuators using that configuration exhibit better actuating displacements. Another design parameter is the piezoelectric coefficient which can be improved due to the induced tensile stress and voltages. The application of the tensile stress to the piezoelectric material makes it get higher piezoelectric coefficient and the total displacement performance of the unimorph actuator is improved. Finally, the piezoelectric actuator system with spring elements is fabricated and it shows higher actuating displacement capability.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.299-299
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• 2007

This paper presents an omni-directional piezoelectric actuator which utilizes only one actuator. The actuator has a simple structure of cone type consists of two piezoelectric ceramics of ring type and electrodes divided four segments and a stainless steel body. To find the optimal operating condition of the actuator, the frequency characteristics of the actuator are analyzed by ATILA, FEM and measured by Impedance Analyzer. We have also developed a stage using the omni-directional actuator and an actuator driver circuit to create four sinusoidal waves with a variable frequency and phase difference.

• 한국전기전자재료학회논문지
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• 제18권12호
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• pp.1124-1128
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• 2005

New piezoelectric actuator design, which can reduce the number of the stacking layer without lowering the piezoelectric displacement, is suggested in this work. Each layer of the new designed multilayer actuator has the same electrode pattern as the cross-sectioned layer of the existing multilayer actuator has. The piezoelectric displacement was calculated by Finite-Element Method (FEM) analysis. The maximum piezoelectric displacement of the new-designed actuator with 13 layers was calculated to be almost same value (55.9 ${\mu}m$) as that of the existing actuator with 25 layers(60.1 ${\mu}m$).

• 한국소음진동공학회논문집
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• 제15권4호
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• pp.499-505
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• 2005

In this paper, a new type of pi+ezoelectric stepping motor is designed, manufactured and tested. This motor is composed of piezoelectric torsional actuator and a pair of one-way clutch bearings. The torsional actuator consists of 16-polygonal tube of piezoceramic that can produce an angular displacement associated with shear mode. One-way clutch bearing converts oscillation of torsional actuator into a continuous stepping rotation. The proposed stepping motor does not require any conversion mechanism for stepping motion like any other motors. In the design process, the shear resonance mode of piezoelectric actuator is analyzed by using a commercial finite element analysis program, and the performance of the fabricated torsional actuator is measured. $0.124^{\circ}$ of maximum angular displacement is measured in square wave excitation on the actuator only. The stepping motor is manufactured by assembling a pair of one-way clutch bearings and the torsional actuator. The maximum rotation speed of 72rpm and the blocking torque of 3.136 mNm are measured at 3540 Hz and 100V/mm. Once the proposed piezoelectric stepping motor is miniaturized, it can be used for many compact and precise moving applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.85-88
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• 2000

In this paper, the ultra precision positioning system for piezoelectric actuator using hysteresis compensation has been developed. Piezoelectric actuators exhibit limited accuracy in tracking control due to their hysteresis nonlinearity. The main purpose of the proposed controller is to compensate the hysteresis nonlinearity of the piezoelectric actuator. The controller is composed of a PD, hysteresis compensation and neural network part in parallel manner, at first, the excellent tracking performance of the neural network controller was verified by experiments and was compared with the classical PD controller.

• 한국소음진동공학회논문집
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• 제13권3호
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• pp.225-231
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• 2003

A new three-dimensional thin shell element for a structure containing an integrated distributed piezoelectric sensor and actuator is Proposed. The assumed strain formulation and the bubble function are introduced to improve the performance of the shell element. A finite element formulation gives a general tool that can predict the static or dynamic responses of the shell with piezoelectric sensor/actuator. The verification through the calculation of the static response for the piezoelectric bimorph beam shows that the results agree with those from the theoretical analysis very well. Dynamic response of a shell shows that the reduction of vibration is possible with the introduction of the piezoelectric shell sensor and actuator. However. the curvature of sensor/actuator is an obstacle for application, since the flexible PVDF is not strong enough and the PZT with curvature should be made specially.