Finite Element Analysis of A Piezoelectric Actuator

압전 작동기 거동해석을 위한 유한요소 모사

Mechanical behavior of a piezoelectric actuator is studied as a preceding research for the manufacturing of three-dimensional micro-structures. It is needed to examine the simulation of a piezoelectric actuator according to applied direction of voltage, by researching displacement characterization of piezoelectric material through piezoelectric theory. To this end, finite element modeling is employed to study the response of a piezoelectric material under the various input voltages. Where the actuator is simulated by use of ANSYS. To avoid direct contact piezoelectric material with working fluid, silicon, polymer, etc., the actuator is modeled with nickel fixed diaphragm.